Manuels Connexes pour Varian VacIon Plus Série
Sommaire des Matières pour Varian VacIon Plus Série
- Page 1 MANUALE DI ISTRUZIONI VacIon Plus 25 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI (GB) INSTRUCTION MANUAL Triode 911-5030 Noble Diode 911-5050 Diode 911-5036 87-900-063-01(C) APRIL 2006...
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Page 4: Table Des Matières
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCTIONS FOR USE....................7 TECHNICAL INFORMATION ....................9 DESCRIPTION OF THE VACION PUMP ..................9 TECHNICAL SPECIFICATION ......................9 OUTLINE DRAWING ........................13 STRAY MAGNETIC FIELD ......................13 VACION PLUS PUMP INSTALLATION..................15 Inspection procedure ......................15 Visual inspection ........................15 Vacuum evaluation ......................15... -
Page 5: Informazioni Generali
Il funzionamento delle pompe è ottimizzato solo con l’uso delle apposite unità di controllo Varian (Dual, MidiVac o MiniVac). ATTENZIONE! Il rispetto delle normative di sicurezza nell’uso delle pompe è... -
Page 6: Procedure Di Uso
ISTRUZIONI PER L'USO La pompa VacIon Plus può essere installata in qualsiasi posi- zione. Per convenienza normalmente viene montata in posizio- 7. Quando si porta la pompa alla pressione atmosferica, usare ne verticale con la flangia di ingresso in alto, o in posizione azoto secco in modo da evitare l’assorbimento di vapore orizzontale. -
Page 7: Allgemeine Hinweise
Staub zu vermeiden. Der Pumpenbetrieb wird nur durch den Einsatz speziell dafür vorgesehener Varian Steuereinheiten (Dual, MidiVac oder Mi- niVac) optimiert. ACHTUNG! Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur bei Verwendung von Varian Steuereinheiten gewährleistet. 87-900-063-01(C) -
Page 8: Entsorgung
GEBRAUCHSANWEISUNGEN Die Pumpe VacIon Plus kann in einer beliebigen Position instal- Wenn die Pumpe auf den atmosphärischen Druck ge- liert werden. Aus praktischen Gründen wird sie in der Regel bracht wird, ist trockener Stickstoff zu verwenden, um die senkrecht mit nach oben gerichtetem Eintrittsflansch oder waa- Aufnahme von Wasserdampf durch die Pumpenwände zu gerecht eingebaut. -
Page 9: Indications Générales
Le fonctionnement de la pompe n'est optimisé que si celle-ci est utilisée avec l'une des unités de contrôle Varian spécifiques (Dual, MidiVac ou MiniVac). 87-900-063-01(C) -
Page 10: Procédure D'utilisation
Lors de l'utilisation des pompes, le respect des normes de sé- l’appendice “Technical Information” de ce manuel. curité est impérativement subordonné à l'emploi des unités de contrôle Varian. NOTE La pompe Vacion Plus peut être installée dans toutes les posi- Les paliers du diagramme sont caractéristiques du mode de... -
Page 11: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. -
Page 12: Technical Information
CAUTION high voltage output. The safety specifications agreement using the pump is guaran- teed using the Varian controller only. 7. When venting the pump, use dry nitrogen. This will avoid water vapor absorption on the pump walls. The VacIon Plus pump can be installed in any position. For convenience, a pump is usually mounted vertically with the inlet up, or placed horizontally. -
Page 13: Description Of The Vacion Pump
TECHNICAL INFORMATION DESCRIPTION OF THE VACION PUMP TECHNICAL SPECIFICATION The Varian VacIon Plus 25 pumps are ion pumps The following table details the main technical and are available in three types: specifications of the VacIon Plus 25 pumps. • Triode •... - Page 14 TECHNICAL INFORMATION VACION PLUS 25 TRIODE Pumping speed vs pressure for Nitrogen Pumping speed vs pressure for Argon Pressure vs current diagram 87-900-063-01(C)
- Page 15 TECHNICAL INFORMATION VACION PLUS 25 NOBLE DIODE Pumping speed vs pressure for Nitrogen Pumping speed vs pressure for Argon Pressure vs current diagram 87-900-063-01(C)
- Page 16 TECHNICAL INFORMATION VACION PLUS 25 DIODE Pumping speed vs pressure for Nitrogen Pressure vs current diagram 87-900-063-01(C)
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Page 17: Outline Drawing
TECHNICAL INFORMATION OUTLINE DRAWING The following figure shows the outline drawing for the VacIon Plus pump. VacIon Plus pump outline drawing STRAY MAGNETIC FIELD 2. Curves of field strength along the center The following magnetic data for the VacIon Plus 25 line of the pump and in the plane of the pump is presented: flange as a function of distance from the... - Page 18 TECHNICAL INFORMATION Polar magnetic field 87-900-063-01(C)
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Page 19: Vacion Plus Pump Installation
TECHNICAL INFORMATION VACION PLUS PUMP INSTALLATION Inspection procedure VacIon Plus pumps are evacuated, baked out, sealed, and leak-checked at below 1x10 Torr (mbar) prior to shipping. The following information and procedures can be used to establish the vacuum integrity of a VacIon Plus pump before installation. -
Page 20: Short Circuits
TECHNICAL INFORMATION 2. With the main power switch in the OFF posi- unit or high voltage cable and connector, zero tion, plug the control unit into a suitable power voltage will also be observed when the high volt- source. age connector is disconnected from the pump (re- fer to the control unit manuals). -
Page 21: Inlet Flange Connection
TECHNICAL INFORMATION spect to the center of the flange. This will par- INLET FLANGE CONNECTION tially close the gap between the flange faces. The VacIon pump can be installed with any orien- tation, but should be mounted to fulfill two re- 6. -
Page 22: Bakeout Operation
Varian This is done by heating the pump and all the com- sales/service office for repair. -
Page 23: Pump Troubleshooting
TECHNICAL INFORMATION PUMP TROUBLESHOOTING SYMPTOM POSSIBLE CAUSE CORRECTION PROCEDURE 1) - Slow starting Starting vacuum pressure too high. Reduce pressure to 10 Torr rec- ommended 10 Torr minimum. 2) - Slow starting (more than 30 Air leaks which limit pressure to Leak check the vacuum system minutes). -
Page 24: Vacion Plus Pump Replacement Parts And Accessories
Copper gasket for 2 3/4” flange FG-0275-CI (10-pack, individually sealed) Nut and bolt set for 2 3/4" flange, FB-0275-C12 1/4 – 28 x 1 1/4 (25-pack) For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Cata- logue. 87-900-063-01(C) -
Page 25: Vacion Plus Pump Controller
230 Vac with single output 929-5003 230 Vac with double output 929-5007 MiniVac MiniVac 120 Vac 929-0191 220 Vac 929-0290 24 Vdc 929-0196 MiniLink 120 Vac 929-0300 220 Vac 929-0301 Please refer to the Varian Vacuum Catalogue to choose the correct controller. 87-900-063-01(C) -
Page 26: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 27 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 28 Toll Free # 1 (800) 882 7426 Tel: 00 800 234 234 00 vtt.technical.support@varianinc.com China Mexico Varian Technologies - Beijing Varian, S. de R.L. de C.V. Rm 1648 Central Tower South Wing Concepcion Beistegui No 109 China Beijing Junefield Plaza Col Del Valle No.