Table des Matières
Publicité
Liens rapides
Turbo-V 2000HT
969-9084 series
969-9059 series
87-900-969-01
MAY 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian 969-9059 Serie
Sommaire des Matières pour Varian 969-9059 Serie
- Page 1 MANUALE DI ISTRUZIONI Turbo-V 2000HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES 969-9084 series BEDRIJFSHANDLEIDING 969-9059 series INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-969-01 MAY 2003...
- Page 2 Turbo-V 2000HT...
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Page 5: Table Des Matières
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Informazioni Generali
Onde evitare problemi di degassamento, non toccare con le mani ogni altra informazione addizionale fornita dalla Varian prima dell'uti- nude i componenti destinati ad essere esposti al vuoto. Utilizzare lizzo dell'apparecchiatura. La Varian si ritiene sollevata da eventuali sempre i guanti o altra protezione adeguata. - Page 7 In caso di guasto Ë possibile usufruire del servizio di riparazio- contattare la Varian. ne Varian o del "Varian advanced exchange service", che per- mette di ottenere una pompa rigenerata in sostituzione di Fissare la turbopompa in posizione stabile collegando la flangia quella guasta.
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Page 8: Vor Der Installation
Sch‰den erleiden. Sie sollte jedoch bis Text hervorgehoben werden. zur Installation auf der Anlage geschlossen bleiben, um Staubverschmutzungen zu vermeiden. LAGERUNG Um ein Hˆchstmafl an Effizienz und Zuverl‰ssigkeit der Varian INSTALLATION Turbomolekularpumpen zu gew‰hrleisten, sind die folgenden Anweisungen zu beachten: ! ! ! ! GEFAHR! •... - Page 9 Installieren Sie die Pumpe in einer stabilen Position, indem Sie den Flansch am Eingang der Turbopumpe an einen festen Ge- Bei einem Defekt kann der Varian Service oder der "Varian ad- vanced exchange service" in Anspruch genommen werden. genflansch anschlieflen, der ein Drehmoment von 30000 Nm um seine eigene Achse aush‰lt.
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Page 10: Indications Generales
! ! ! ! indication supplÈmentaire fournie par Varian, avant d'utiliser ATTENTION ! l'appareil. Varian dÈcline par consÈquent toute responsabilitÈ En vue d'Èviter tous problËmes de dÈgazage, ne pas en cas d'inobservation totale ou partielle des instructions toucher, les mains nues, les ÈlÈments devant Ítre exposÈs... -
Page 11: Utilisation
8.8 ( = 800 N/mm ). Il est conseillÈ venir au bureau local Varian la fiche "SÈcuritÈ et SantÈ" de serrer ‡ un couple de 22 Nm. annexÈe ‡ la prÈsente notice d'instructions. Une copie de cette La turbopompe ‡... -
Page 12: Almacenamiento
Varian antes los componentes destinados a someterse al vacÌo. Utilizar siempre de utilizar el equipo. Varian se considera libre de cualquier los guantes u otra protecciÛn apropiada. responsabilidad debida al incumplimiento total o parcial de las... - Page 13 Las bombas turbomoleculares de la serie Turbo-V2000HT se deber·n utilizar sÛlo con uno de los controladores apropiados MANTENIMIENTO Varian (serie 969-9462, 969-9562) y se deber·n acoplar a una bomba primaria (vÈase esquema en "Technical Information". Las bombas de la serie Turbo-V2000HT no necesitan ning˙n La turbobomba se puede instalar en cualquier posiciÛn.
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Page 14: Instru«'Es Para O Uso
Para evitar problemas de perdas de g·s, n„o tocar com as m„os informaÁ„o adicional fornecida pela Varian antes de usar a os componentes destinados ‡ exposiÁ„o do v·cuo. Utilizar sempre aparelhagem. - Page 15 Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Fixar a turbobomba em posiÁ„o est·vel ligando a flange de Varian ou do "Varian advanced exchange service", que permite entrada da turbobomba a uma contraflange fixa capaz de obter uma bomba regenerada que substitua a bomba com resistir a um torque de 30000 Nm ao redor do prÛprio eixo.
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Page 16: Installatie
Varian verstrekte informatie door te lezen ! ! ! ! alvorens het apparaat in gebruik te nemen. Varian acht zich ATTENTIE niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk... - Page 17 ìschoonî vacu¸m is in de handleiding van de regeleenheid vermeld. Lees aandachtig vereist. Neem contact op met Varian Vacuum Technologies of uw deze handleiding vÛÛr ingebruikname door. Om een betere leverancier voor andere toepassingen.
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Page 18: Brugsanvisning
For at undg afgasningsproblemer skal man ikke r¯re med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hÊnder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun... - Page 19 ìTechnical Informationî for yderligere detaljer. Pumpen m ikke anvendes i eksplosionsfarlige milj¯er. TurbomolekulÊrpumperne i Turbo-V2000HT serien m kun anvendes med en af de sÊrlige Varian kontrolapparater (serie VEDLIGEHOLDELSE 969-9462, 969-9562) og skal forbindes med en primÊr pumpe Pumperne af Turbo-V2000HT typen beh¯ver ikke nogen (se skemaet i "Technical Information").
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Page 20: Bruksanvisning
Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som strider mot g‰llande lokala fˆreskrifter. - Page 21 Varian (serie 969-9462, 969- 9562), och anslutas till en fˆrpump (se schemat " Technical Anv‰nd ej pumpen i n‰rheten av explosiva gaser.
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Page 22: Brukerveiledning
Brukeren b¯r lese denne brukerveiledningen og all annen pumpen. Likevel anbefaler vi  holde den lukket til den er informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke montert i systemet, slik at den ikke forurenses eller utsettes for holdes ansvarlig for hendelser som skjer pÂ... - Page 23 (argon eller kvelstoff) koples for  beskytte lagrene (se skjermer. Se ìTeknisk informasjonî for detaljer. ìTeknisk informasjonî). Turbo-V2000HT serien turbo-molekulÊre pumper m kun brukes med en av de spesielle Varian kontrollere (serie 969- ! ! ! ! 9462, 969-9562), og m koples til hovedpumpen (se skjema i ADVARSEL! "Teknisk informasjon ").
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Page 24: Kƒytt÷Ohjeet
Jotta kaasun poistumisongelmilta v‰ltytt‰isiin, ei tyhjiˆˆn mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin tarkoitettuihin osiin tule koskea paljain k‰sin. Hanskojen tai toimittama lis‰tieto. Varian ei ota vastuuta seurauksista, jotka muun sopivan suojan k‰yttˆ on tarpeellinen. johtuvat laitteen k‰yttˆohjeiden t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn virheellisest‰... - Page 25 Informationì-liitteest‰. Sarjan Turbo-V2000HT pumput eiv‰t vaadi lainkaan huoltoa. Sarjan V2000HT turbomolekyylipumppuja tulee k‰ytt‰‰ Mink‰ tahansa toimenpiteen t‰ytyy suorittaa siihen valtuutettu ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- henkilˆ. 9462, 969-9562) niiden t‰ytyy olla yhdistettyin‰ p‰‰pumppuun (katso kaaviota osasta "Technical Information").
- Page 26 Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. aer∂ou, mhn agg∂zete me gumn£ c◊ria ta tmˇmata pou pr“keitai na H Varian den f◊rei kam∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ ekteqo⁄n sto ken“. Na crhsimopoie∂te p£nta g£ntia ˇ £llh aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj kat£llhlh prostas∂a.
- Page 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij fl£ntza eis“dou me m∂a staqerˇ k“ntrofl£ntza ikanˇ na na episkeuËn Varian ˇ sto ìVarian advanced exchange serviceî, antistaqe∂ se ◊na ze⁄goj 30000 Nm g⁄rw ap“ ton £xon£ thj. pou saj d∂nei th dunat“thta na antikatastˇsete thn Η...
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Page 28: General Information
Varian before operating the equipment. hands to handle components which will be exposed to vacuum. Varian will not be held responsible for any events occurring due Always use gloves or other appropriate protection. to non-compliance, even partial, with these instructions, im-... - Page 29 See the appendix "Technical In- by authorized personnel. formation" for detailed information.The Turbo - V 2000HT se- ries pumps must only be used with one of the special Varian ! ! ! ! controllers (series 969-9462, 969-9562) and must be con- WARNING! nected to a primary pump (see "Technical Information").
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Page 30: Technical Information
TECHNICAL INFORMATION The Turbo-V2000HT pump consists of a high fre- DESCRIPTION OF THE TURBOPUMP quency motor driving a turbine fitted with 8 bladed The Turbo-V2000HT pump is available in two ver- stages and 4 Macrotorr stages. The turbine rotates sions which differ only in their inlet flange. in an anticlockwise direction when viewed from the They are: high vacuum flange end. -
Page 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm]. Pumping speed : 1950 l/s Coolant water minimum flow: 200 l/h (0.89 GPM) He: 2000 l/s temperature: + 10f C to + 20f C : 1500 l/s pressure: 3 to 5 bar (45 to 75 Psi) Compression ratio... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-969-01...
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9338 (metal- lic model), and 969-9348 (plastic model). - Page 34 TECHNICAL INFORMATION Two 6 mm (1/4") internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. NOTE These hoses must be held on the respective noz- zles using hose clips to avoid that the tube(s) gets loose or disconnected during operation.
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Page 35: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9843 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an The vent device mod. 969-9831 allows to avoid automatic vent operation. -
Page 36: Gas Purge Valve Installation
! ! ! ! CAUTION To prevent bearing damage, Varian suggests the following purge gas flow rates: 10 sccm (0.17 mbar l/s) for a mild purge process, or 20 sccm (0.34 mbar l/s) for an heavy process. Please contact Varian for specific applications. -
Page 37: Typical Layout Diagram
TECHNICAL INFORMATION The recommended procedure to vent the system TYPICAL LAYOUT DIAGRAM and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points: Close the corrosive gas flow into the system. Leaving the Turbo-V pump and the backing pump running and the purge gas flowing, wait for enough time to evacuate the corrosive gas... -
Page 38: Connection B - Fore-Vacuum Pump
TECHNICAL INFORMATION For ConFlat flange connections we recommend Connection C - ELECTRICAL using Varian hardware. Other hardware can be used if it satisfies to this specifications: − stainless steel screws − minimum strength point of 500 N/mm − length: 63.5 mm (2.5 inches). -
Page 39: Moving The Gas Purge Valve And Forevacuum Pump Connections
Dual stage rotary vane pump DS 949-9335 602 with single phase motor Dual stage rotary vane pump DS 949-9336 602 with 3 phase motor For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-969-01... -
Page 40: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...