Table des Matières
Publicité
Liens rapides
Turbo-V300 ICE
Model 969-9076
Model 969-9083
Model 969-9095
Model 969-9096
87-900-897-01(C)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian Turbo-V300 ICE
Sommaire des Matières pour Varian Turbo-V300 ICE
- Page 1 MANUALE DI ISTRUZIONI Turbo-V300 ICE BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING Model 969-9076 INSTRUKSTIONSBOG Model 969-9083 BRUKSANVISNING Model 969-9095 INSTRUKSJON MANUAL Model 969-9096 OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-897-01(C) APRIL 2002...
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Page 5: Table Des Matières
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Istruzioni Per L'uso
L'effetto pompante è ottenuto tramite una turbina rotante ad elevata velocità (56000 giri/min. max) mossa da un motore elettrico trifase ad alto rendimento. Le pompe Turbo-V300 ICE NOTA sono totalmente prive di agenti contaminanti, e sono quindi adatte per applicazioni che richiedono un vuoto "pulito". - Page 7 ISO 100 Morsetto doppio 22 Nm con filettatura M10 MANUTENZIONE Morsetto singolo 11 Nm Le pompe della serie Turbo-V300 ICE non richiedono alcuna con filettatura M8 manutenzione. Qualsiasi intervento deve essere eseguito da ISO 160 Morsetto doppio 22 Nm personale autorizzato.
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Page 8: Gebrauchsanleitung
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V300 ICE handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich insbesonders für... - Page 9 Wenn die Pumpen über ihr Unterteil installiert werden sollen, ANMERKUNG müssen in die Bohrungen des Unterteils 3 M6-Schrauben Vor dem Versand einer defekten Pumpe an die Fa. Varian muß eingesetzt werden. Die Schrauben müssen eine Dehngrenze das Formular "Sicherheit und Gesundheit", das diesem von 500 N/mm haben und mit einen Anzugsmoment von 3.1...
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Page 10: Mode D'emploi
Les pompes de la série Turbo-V300 ICE sont des pompes turbomoléculaires conçues pour des applications de vide poussé et ultrapoussé, particulièrement adaptées à l’utilisation dans les secteurs liés à... - Page 11 ENTRETIEN BRIDE TYPE DE COLLIER COUPLE DE Les pompes de la série Turbo-V300 ICE n'exigent aucun autre SERRAGE entretien. Toute opération doit être effectuée par un personnel agréé. ISO 100 Collier double à...
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Page 12: Instrucciones De Uso
En las bombas La bomba no se puede dañar sólo por quedar expuesta a la Turbo-V300 ICE no hay agentes contaminantes y, por lo tanto, atmósfera. De todas formas, se aconseja mantenerla cerrada son apropiadas incluso para las aplicaciones que necesitan un hasta el momento de la instalación en el sistema para evitar... - Page 13 MANTENIMIENTO BRIDA TIPO DE MORDAZA Nº PAR DE Las bombas de la serie Turbo-V300 ICE no necesitan ningún APRIETE mantenimiento. Cualquier intervención deberá ser realizada por ISO 100 Mordaza doble con 22 Nm personal autorizado.
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Page 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Page 15 Não usar a bomba na presença de gases explosivos. de borne, o número de bornes e o torque de aperto necessários. MANUTENÇÃO As bombas da série Turbo-V300 ICE não requerem qualquer FLANGE TIPO DE BORNE N° TORQUE DE manutenção.
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 De volgende tabel beschrijft, voor elke maat flens of klemtype, het aantal benodigde klemmen en het aanhaalkoppel ONDERHOUD waarmee ze vastgezet moeten worden. De pompen van de serie Turbo-V300 ICE zijn onderhoudsvrij. Eventuele werkzaamheden moeten door bevoegd personeel FLENS KLEMTYPE AANHAAL worden uitgevoerd.
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Page 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Page 19 VEDLIGEHOLDELSE Følgende tabel angiver det nødvendige antal af klemmer og det anvendte tilspændingsmoment enkelte Pumperne i Turbo-V300 ICE serien behøver ikke nogen flangedimensioner og typer af klemmer. vedligeholdelse. Ethvert indgreb på pumpen skal foretages af autoriseret personale. FLANGE KLEMMETYPE ANT.
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Page 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Page 21 öppnas. Vänta sedan tills rotorn stannat samt tills pumpens yttemperatur är lägre än 50ºC. Enkel klammer, gänga 11 Nm Om pumpen havererar, kontakta Varian reparationsverkstad eller Varian utbytesservice, som kan ersätta pumpen med en ISO 160 Dubbel klammer, gänga 22 Nm renoverad pump.
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Page 23 Følgende tabell angir det nødvendige antall klemmer og det relevante VEDLIKEHOLD strammemomentet for de enkelte flensdimensjonene og typer Turbo-V300 ICE serien pumper er vedlikeholdsfrie. Alt arbeid klemmer. på pumpen må kun utføres av autorisert personell. FLENS TYPE KLEMME ANT.
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Page 24: Käyttöohjeet
Turbo-V300 ICE sarjan pumpuissa ei ole lainkaan likaavia HUOMAUTUS aineita, joten ne soveltuvat myös "puhdasta" tyhjiötä vaativiin Pumppu ei vahingoitu sen ollessa yksinkertaisesti avoinna. On käyttötarpeisiin. kuitenkin suositeltavaa pitää se suljettuna kunnes se kytketään Seuraavilla sivuilla on luettavissa kaikki tarpeellinen tieto järjestelmään, jotta vältettäisiin sen mahdollinen saastuminen... - Page 25 Älkää käytä pumppua räjähdysherkkien kaasujen lähellä. Turbopumppu tulee kiinnittää vakaaseen asentoon liittämällä turbopumpun sisääntulolaippa kiinteään vastalaippaan, joka kannattaa 1000 Nm momenttia akselinsa ympärillä, tai käyttäen HUOLTO tarkoitukseen sopivia lisävarusteita sen kiinnittämiseen. Sarjan Turbo-V300 ICE pumput eivät vaadi lainkaan huoltoa. Turbopumpun sisääntulolaipalla tulee kiinnittää tyhjiökammariin kaksois kiinnikkeillä...
- Page 26 £llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgièn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ˇ...
- Page 27 ˇ monèn dagk£nwn. H akÒlouqh SUNTHRHSH tamp◊lla perigr£fei, gia k£qe m◊geqoj fl£ntzaj kai e∂doj Oi antl∂ej thj kathgor∂aj Turbo-V300 ICE de crei£zontai kam∂a dagk£nhj, ton apara∂thto ariqmÒ dagk£nwn kai me poio zeÚgoj bidèmatoj pr◊pei na sfictoÚn.
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Page 28: Instructions For Use
See the appendix "Technical Information" for detailed information. CAUTION The Turbo-V300 ICE series pumps must only be used with one of the special Varian controllers (series 969-9433, 969-9533) The caution messages are displayed before procedures which, and must be connected to a primary pump (see "Technical... - Page 29 FIXING FIXING TORQUE DEVICE MAINTENANCE ISO 100 M10 clamps 22 Nm The Turbo-V300 ICE series pump does not require any M8 claws 11 Nm maintenance. Any work performed on the pump must be carried ISO 160 M10 clamps 22 Nm out by authorized personnel.
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Page 30: Technical Information
DESCRIPTION OF THE TURBOPUMP The turbine rotor is supported by permanently lu- The Turbo-V300 ICE pump is available in four ver- bricated high precision ceramic ball bearings in- sions which differ only in their inlet flange. They are: stalled on the forevacuum side of the pump. -
Page 31: Technical Specification
Start-up time < 3 minutes Weight kg (lbs) 4.5 (10) Recommended mechanical: Varian DS 302 forepump diaphragm: Varian MD 60 * According to standard DIN 28 428, the base Operating pressure is that measured in a leak-free test dome,... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-897-01(C)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump model INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9302 and 969-9304 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Page 34: Heating Jacket Installation
TECHNICAL INFORMATION HEATING JACKET INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model). -
Page 35: Vent Valve Installation
TECHNICAL INFORMATION The metallic model is assembled as shown in the VENT VALVE INSTALLATION figure. The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. -
Page 36: Vent Device Installation
− model 969-9342 for ISO 100 flange; − model 969-9343 for ISO 160 flange. They typically reduce the vibration transmitted from the Turbo-V300 ICE pump to the system by a fac- tor of 20. Please refer to the relevant instruction manual. -
Page 37: Solid State Flowmeter Installation
20 sccm that could move into the pump. (0.34 mbar l/s). Please contact Varian for specific applications. To the purge valve can be connected a solid state... -
Page 38: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM Connection A - HIGH VACUUM FLANGE To connect the Turbo-V300 ICE pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure. Then fix the two flanges with the clamps or claws as shown in the figure. -
Page 39: Connection Configurations
Connection C - ELECTRICAL A flange KF 25 NW is available to connect the Turbo-V300 ICE to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical pump must be eliminated through the use of bellows. -
Page 40: Suggested Pump Installation
The heater jacket working tempera- ture should be adjusted on the pump control unit (see controller manual for reference). Ask VARIAN Vacuum chamber for proper temperature setting. Heater jacket must be always on even during start-up and shutdown. -
Page 41: Pump Used In Presence Of Magnetic Fields
Varian's specialist. As a matter of fact, in case of high magnetic fields, For a complete overview of Varian's extensive also important forces might be generated and ap- product lines, please refer to the Varian catalog. plied to the rotor. 87-900-897-01(C) - Page 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...