Table des Matières
Publicité
Liens rapides
Turbo-V250SF
969-9009 series
969-9010 series
87-900-881-01(B)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian 969-9010 Serie
Sommaire des Matières pour Varian 969-9010 Serie
- Page 1 MANUALE DI ISTRUZIONI Turbo-V250SF BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING 969-9009 series INSTRUKSTIONSBOG 969-9010 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-881-01(B) APRIL 2002...
- Page 2 Turbo-V 250SF...
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Page 5: Table Des Matières
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Informazioni Generali
"Technical Information" per ulteriori dettagli. Le pompe turbomolecolari della serie Turbo-V 250SF devono NOTA essere utilizzate solo con uno degli appositi controllori Varian Le note contengono informazioni importanti estrapolate dal (serie 969-9423, 969-9504, 969-9523, 969-9425 e 969-9866) e testo. - Page 7 In caso di guasto Ë possibile usufruire del servizio di "Technical Information". riparazione Varian o del "Varian advanced exchange service", Per fissare la pompa per mezzo della sua base, Ë necessario che permette di ottenere una pompa rigenerata in sostituzione utilizzare tre viti M4 fissate agli appositi fori presenti sulla base di quella guasta.
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Page 8: Gebrauchsanleitung
flem Gebrauch durch ungeschultes Personal, nicht autorisier- ten Eingriffen und Miflachtung der einheimischen, hier zur Geltung kommenden Bestimmungen ¸bernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V 250SF handelt es sich um Turbomolekularpumpen f¸r Hoch- und Ultrahochvakuuman- wendungen. - Page 9 Klemmschellen an die Vakuumkammer an- geschlossen werden. In der nachstehenden Tabelle sind die Anzahl der jeweils erforderlichen Klemmschellen sowie der jewei- Bei einem Defekt kann der Varian Service oder der " advanced lige Anzugsmoment angegeben. exchange service" in Anspruch genommen werden.
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Page 10: Generalites
Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈquent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un personnel non formÈ, d'opÈrations non autorisÈes ou d'un emploi contraire... -
Page 11: Entretien
"advanced exchange service", remplir et La turbopompe ‡ bride díentrÈe ConFiat doit Ítre fixÈe ‡ la faire parvenir au bureau local Varian la fiche "SÈcuritÈ et chambre ‡ vide ‡ líaide des ÈlÈments mÈcaniques Varian SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie prÈvus ‡... -
Page 12: Almacenamiento
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 En caso de averÌa se podr· utilizar el servicio de reparaciÛn Varian o el "Varian advanced exchange service", que permite BRIDA TIPO DE MORDAZA PAR DE obtener una bomba regenerada para sustituir la averiada.
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Page 14: Instru«'Es Para O Uso
Varian antes de usar a aparelhagem. A Varian n„o se responsabiliza pela eventual inobserv‚ncia total ou parcial das instruÁıes, pelo uso indevido por parte de pessoas n„o treinadas, por operaÁıes n„o autorizadas ou pelo uso contr·rio ‡s normas... - Page 15 Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Varian ou do "Varian advanced exchange service", que permite FLANGE TIPO DE BORNE TORQUE...
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 In geval van storing is het mogelijk om de reparatiedienst van FLENS KLEMTYPE AANHAALKOPPEL Varian of de "Varian advanced exchange service" in te ISO 100 Dubbele klem 22 Nm schakelen: zo krijgt men een ruilpomp ter vervanging van de met M10 defecte pomp.
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Page 18: Brugsanvisning
Brugeren bedes lÊse denne hÂndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb pÂ... - Page 19 TurbomolekulÊrpumperne i V 250SF serien m kun anvendes str¯mning skal ligge mellem 0.4 og 1 mbar l/s. med en af de sÊrlige Varian kontrolapparater (serie 969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866) og skal forbindes med en primÊr pumpe (se skemaet i "Technical VEDLIGEHOLDELSE Information").
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Page 20: Bruksanvisning
Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som strider mot g‰llande lokala fˆreskrifter. - Page 21 Denna pumptyp ‰r fˆrsedd med ett specialuttag dit ett ‰delgasflˆde mellan 0.4 och 1 mbar l/s skall anslutas. Turbomolekyl‰rpumparna i serien V 250SF mÂste anv‰ndas med en s‰rskild styrenhet frÂn Varian (serie 969-9423, 969- UNDERHJLL 9504, 969-9523, 969-9425, eller 969-9866), och anslutas till en Pumparna i Turbo-V 250SF-serien ‰r underhÂllsfria.
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren b¯r lese denne brukerveiledningen og all annen informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf¯lging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som pÂ... - Page 23 0.4 og 1 mbar l/s. Turbo-V 250SF serien turbo-molekulÊre pumper m kun brukes med en av de spesielle Varian kontrollere (969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866), og m koples VEDLIKEHOLD til hovedpumpen (se skjema i "Teknisk informasjon").
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Page 24: Kƒytt÷Ohjeet
YLEISIƒ TIETOJA T‰m‰ laite on tarkoitettu ammattimaiseen k‰yttˆˆn. Ennen laitteen k‰yttˆˆnottoa tulee k‰ytt‰j‰n lukea huolellisesti mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn virheellisest‰ laitteen k‰ytˆst‰,... - Page 25 Sarjan 250SF turbomolekyylipumppuja tulee k‰ytt‰‰ ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- 9423, 969-9504, 969-9523, 969-9425 tai 969-9866) ja niiden HUOLTO t‰ytyy olla yhdistettyin‰ p‰‰pumppuun (katso kaaviota osasta Sarjan Turbo-V 250SF pumput eiv‰t vaadi lainkaan huoltoa. "Technical Information").
- Page 26 £llh pr“sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpiko⁄, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂...
- Page 27 FLANTZA TUPOS MEGGENHS ZEUGOS Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj BIDWMATOS Varian ˇ sto ìVarian advanced exchange serviceî, pou saj d∂nei th ISO 100 22 Nm Diplˇ m◊ggenh dunat“thta na antikatastˇsete thn calasm◊nh antl∂a me m∂a el∂kwsh M10...
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Page 28: General Information
This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper... - Page 29 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Varian In the case of breakdown, contact your local Varian service hardware. See the appendix "Technical Information" for a center who can supply a reconditioned pump to replace that detailed description.
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Page 30: Technical Information
TECHNICAL INFORMATION During normal operation, the motor functions with a DESCRIPTION OF THE TURBOPUMP power feed at 58 Vac three-phase at 933 Hz. To The Turbo-V250SF pump is available in two ver- reduce losses during start-up to a minimum, the sions. -
Page 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION Dimensions: inches [mm] Operating ambient + 5n C to + 35n C Pumping speed (l/s) Main port: Side port: temperature : 250 l/s : 10 l/s He: 220 l/s He: 10 l/s Coolant water flow: 30 l/h (0.13 GPM) : 200 l/s : 8 l/s temperature: + 10n C to + 30n C... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-881-01(B)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION Overall dimensions with the protection screen fitted The inlet screens mod. 969-9302 prevents the on pump series 969-9009 (with ISO 100 flange). blades of the pump from being damaged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%. -
Page 34: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION The metallic model is assembled as shown in the figure. Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model). -
Page 35: Base Fixing Kit Installation
TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION For the feet to the pump by tightening the previ- The kit mod. 969-9326 enables the pump to be ously inserted grub screws with the Allen key. fixed at the base. Open the package containing the feet and respec- tive screws. -
Page 36: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING Two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. 969-9310): − air flow: 9 l/s (10 CFM) − input voltage: 24 Vdc −... -
Page 37: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION Screw the vent valve into the pump. The vent valve mod. 969-9833 enables undesired venting of the pump during a temporary power fail- ure (5 sec maximum) to be avoided, and enables an automatic vent operation. Tighten the valve using a 16 mm hexagonal span- ner. -
Page 38: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VIBRATION ISOLATOR INSTALLATION Two vibration isolators for ISO and CFF inlet flange version pumps are available as accessories. The two model part numbers are the following: − model 969-9342 for ISO 100 flange; − model 969-9332 for CFF 6î flange. They typically reduce the vibration transmitted from the Turbo-V250SF pump to the system by a factor of 20. -
Page 39: Typical Connections
TECHNICAL INFORMATION For ConFlat flange connections we recommend TYPICAL CONNECTIONS using Varian hardware. High Vacuum Flange Connection To facilitate assembly and dismantling, apply Fel- To connect the Turbo-V250SF pump to the ISO pro C-100 high temperature lubricant to the screw... -
Page 40: Fore-Vacuum Pump Connection
CAUTION chanical pump must be eliminated through the use To prevent bearing damage, Varian suggests a of bellows. minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements. -
Page 41: Pump Used In Presence Of Magnetic Fields
Forepump MDP 30, 120 V 949-9451 Forepump MDP 30, 220 V 949-9452 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-881-01(B) -
Page 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...