Table des Matières
Publicité
Liens rapides
Turbo-V250
969-9007 series
969-9008 series
87-900-851-01(A)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian Turbo-V250
Sommaire des Matières pour Varian Turbo-V250
- Page 1 MANUALE DI ISTRUZIONI Turbo-V250 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9007 series INSTRUKSTIONSBOG 969-9008 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-851-01(A) APRIL 2002...
- Page 2 Turbo-V 250...
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Page 5: Table Des Matières
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Istruzioni Per L'uso
Le note contengono informazioni importanti estrapolate dal Le pompe turbomolecolari della serie Turbo-V 250 devono testo. essere utilizzate solo con uno degli appositi controllori Varian (serie 969-9423, 969-9504, 969-9523, 969-9425 e 969-9866) e IMMAGAZZINAMENTO devono essere collegate ad una pompa primaria (vedere schema in "Technical Information"). - Page 7 La seguente tabella descrive, per ogni dimensione Le pompe della serie Turbo-V250 non richiedono alcuna flangia e tipo di morsetto, il numero di morsetti necessari e con manutenzione. Qualsiasi intervento deve essere eseguito da quale coppia di serraggio stringerli.
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Page 8: Gebrauchsanleitung
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V 250 handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich für jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Förderung... - Page 9 Rotor vollkommen stillsteht. NM8-Gewinde Turbopumpen mit ConFlat-Eingangsflansch müssen mit dem Bei einem Defekt kann der Varian Service oder der " advanced speziellen Varian-Befestigungsmaterial an die Vakuumkammer exchange service" in Anspruch genommen werden. angeschlossen werden. Weitere Hinweise siehe Anhang “Technical Information”.
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Page 10: Mode D'emploi
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire... - Page 11 Pour le pompage de gaz nocif, utiliser exclusivement les se reporter à l'appendice "Technical Information". versions spéciales de la pompe Turbo-V250. Ces pompes sont Les pompes turbomoléculaires de la série Turbo-V 250 ne dotées d'un port ad hoc, à travers laquelle il est nécessaire de doivent être utilisées qu’avec l’un des contrôleurs spéciaux...
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Page 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 La tabla siguiente describe el número de Las bombas de la serie Turbo-V250 no necesitan ningún tipo mordazas necesarias y el par de apriete al que han de de mantenimiento. Cualquier operación tendrá que ser apretarse.
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Page 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Page 15 A turbobomba com flange de entrada ISO, deve ser fixada às câmaras de vácuo através de bornes duplos ou simples. A As bombas da série Turbo-V250 não requerem qualquer tabela a seguir descreve o número de bornes necessários e manutenção. Qualquer operação deve ser efectuada por com qual torque devem ser apertados.
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 De volgende tabel beschrijft het aantal benodigde Gebruik voor het pompen van agressieve gassen alleen de klemmen en het aanhaalkoppel waarmee ze vastgezet moeten speciale uitvoeringen van de Turbo-V250 pomp. Deze pompen worden. zijn voorzien van een speciale poort, waardoor een stroom inert gas moet worden geleverd die varieert tussen 0.4 en 1 mbar...
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Page 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Page 19 “Technical Information” for yderligere detaljer. Turbomolekulærpumperne i V 250 serien må kun anvendes ! ! ! ! med en af de særlige Varian kontrolapparater (serie 969-9423, PAS PÅ 969-9504, 969-9523, 969-9425 eller 969-9866) og skal Brug kun specialpumperne af Turbo - V 250 typen til pumpning forbindes med en primær pumpe (se skemaet i "Technical...
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Page 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Page 21 22 Nm med gänga M10 Om pumpen havererar, kontakta Varian reparationsverkstad Enkel klammer 11 Nm eller Varian utbytesservice, som kan ersätta pumpen med en med gänga M8 renoverad pump. Turbopumparna med intagsfläns ConFlat ska fästas till OBSERVERA vakuumkammaren med hjälp av Varian fästdelar. För detaljer Innan pumpen lämnas in till tillverkaren för reparation eller...
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Page 23 Se “Teknisk informasjon” for detaljer. VEDLIKEHOLD Turbo-V 250 serien turbo-molekulære pumper må kun brukes med en av de spesielle Varian kontrollere (969-9423, 969- Turbo-V 250 serien pumper er vedlikeholdsfrie. Alt arbeid på 9504, 969-9523, 969-9425 eller 969-9866), og må koples til pumpen må...
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Page 24: Käyttöohjeet
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Page 25 Laakerit voivat Information”-liitteestä. vahingoittua. Sarjan V 250 turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sarja 969-9423, 969- ! ! ! ! 9504, 969-9523, 969-9425 tai 969-9866) ja niiden täytyy olla HUOMIO yhdistettyinä pääpumppuun (katso kaaviota osasta "Technical Information").
- Page 26 £llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂...
- Page 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj q£lamo kenoÚ m◊sw diplèn ÿ monèn m◊ggenwn. H akÒlouqh Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th tamp◊la perigr£fei to apara∂thto noÚmero m◊ggenwn kai me poio zeÚgoj bidèmatoj na ta sf∂xete.
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Page 28: Instructions For Use
This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper... - Page 29 In the case of breakdown, contact your local Varian service FLANGE FIXING...
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Page 30: Technical Information
During normal operation, the motor functions with a power feed at 58 Vac three-phase at 933 Hz. To The Turbo-V250 pump is available in two versions. reduce losses during start-up to a minimum, the The difference between the two versions lies frequency increases according to a ramp with a purely in the high vacuum connection. -
Page 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION UPPER VIEW BOTTOM VIEW Pumping speed (l/s) : 250 l/s Operating ambient + 5° C to + 35° C He: 220 l/s temperature : 200 l/s Coolant water flow: 30 l/h (0.13 GPM) Compression ratio : 2 x 10 temperature: + 10°... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-851-01(A)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION The inlet screens mod. 969-9302 prevents the Overall dimensions with the protection screen fit- blades of the pump from being damaged by debris ted on pump series 969-9007 (with ISO 100 greater than 0.7 mm diameter. flange). -
Page 34: Heater Band Installation
TECHNICAL INFORMATION HEATER BAND INSTALLATION Switch on the heater while the turbopump is in op- eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Page 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two 6 mm (1/4") internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. NOTE These hoses must be held on the respective noz- zles using hose clips to avoid that the tube do not detach during operation. -
Page 36: Base Fixing Kit Installation
TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION Fix the feet to the pump by tightening the previ- ously inserted grub screws with the Allen key. The kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. -
Page 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. SIDE MOUNTING Two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. -
Page 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION Screw the vent valve into the pump. Tighten the valve using a 10 mm hexagonal span- ner. CAUTION The vent valve mod. 969-9833 enables undesired Do not overtighten the valve as this may damage pump areation during a temporary power failure (5 the thread on the pump. -
Page 39: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION Assemble the seal ring and lock the vent device in position using the KF klamp. VIBRATION ISOLATOR INSTALLATION The vent device mod. 969-9831 allows to avoid Vibration isolators for both ISO and CF version undesired pump aeration of the pump during a pumps are available as accessories. -
Page 40: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM Connection A - HIGH VACUUM FLANGE To connect the Turbo-V250 pump to the ISO inlet flange, remove the outer ring and position the cen- tering ring as shown in the figure. Then fix the two flanges with the clamps or claws as shown in the figure. -
Page 41: Connection B - Fore-Vacuum Pump
For a complete overview of Varian's extensive through an 6-pin connector. Pins B, C and D are product lines, please refer to the Varian catalog. the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ... - Page 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...