Table des Matières
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Les langues disponibles
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TriScroll
Dry Scroll
Vacuum Pump
Manual No. 699904290
Revision K
February 2005
600 Series
TM
vacuum technologies
INSTALLATION AND
OPERATION MANUAL
INSTALLATIONS- UND
BETRIEBSHANDBUCH
MANUEL D'INSTALLATION
ET D'OPÉRATION
MANUAL DE INSTALACIÓN Y
FUNCIONAMIENTO
MANUALE
D'INSTALLAZIONE E D'USO
付 と 操 作 仕 様 書
装 和 操 作 手 册
치 및 조 작 안 내 서
Publicité
Table des Matières
Manuels Connexes pour Varian TriScroll Dry Scroll 600 Série
Sommaire des Matières pour Varian TriScroll Dry Scroll 600 Série
- Page 1 vacuum technologies TriScroll 600 Series INSTALLATION AND OPERATION MANUAL Dry Scroll INSTALLATIONS- UND BETRIEBSHANDBUCH Vacuum Pump MANUEL D'INSTALLATION ET D'OPÉRATION MANUAL DE INSTALACIÓN Y FUNCIONAMIENTO MANUALE D'INSTALLAZIONE E D'USO 付 と 操 作 仕 様 書 装 和 操 作 手 册 치...
- Page 2 ™ TriScroll 600 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies. Copyright 2005 Vacuum Technologies...
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Page 3: Table Des Matières
TriScroll 600 Series Vacuum Pump Table of Contents Declaration of Conformity Istruzioni per l'uso............17 Informazioni generali ..........17 Warranty ..............viii Conservazione ............17 Warranty Replacement and Adjustment....viii Disimballaggio ed ispezione ........17 Instructions for Use ............. 1 Requisiti per l'installazione ........18 General Information ..........1 Sicurezza ............18 Storage .............. - Page 4 TriScroll 600 Series Vacuum Pump Technical Information ..........33 Electrical Connections ..........36 Single Phase Motor Connection......36 Three Phase Motor Connection ......37 Mechanical Connections ........38 Pump Location ........... 38 Rotation of the Pump Inlet with Respect to the Motor Frame ......38 Pump Inlet............
- Page 5 TriScroll 600 Series Vacuum Pump List of Figures List of Tables Figure Caption Page Table Title Page Interface Drawing with Dimensions ..34 Pump Models and Power Cords ..... 3 Pumping Speed Curves ....34 Circuit Breaker Requirements......
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Page 7: Declaration Of Conformity
Declaration of Conformity Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità Varian, Inc. Nous Vacuum Technologies Nosotros 121 Hartwell Avenue Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß... -
Page 8: Warranty
TriScroll 600 Series Vacuum Pump Warranty Products manufactured by Seller are warranted against Warranty Replacement and Adjustment defects in materials and workmanship for twelve (12) All claims under warranty must be made promptly after months from date of shipment thereof to Customer, and occurrence of circumstances giving rise thereto, and must Seller’s liability under valid warranty claims is limited, at be received within the applicable warranty period by... -
Page 9: Instructions For Use
TriScroll 600 Series Vacuum Pump Instructions for Use General Information Unpacking and Inspection This equipment is designed for use by professionals. The The shipping container is a double carton. user should read this instruction manual and any other 1. After opening the outer box, remove the foam packing. additional information supplied by Vacuum Technologies 2. -
Page 10: Installation Requirements
TriScroll 600 Series Vacuum Pump Installation Requirements During operation, the following environmental conditions should not be exceeded: Safety Temperature: +5 °C to +40 °C (41 °F to 104 °F) Do not remove or modify any safety or insulating Relative humidity: 0 to 95% (non-condensing) equipment from the pump. -
Page 11: Pump Models And Power Cords
TriScroll 600 Series Vacuum Pump Table 1 lists the available TS-600 pump models and Three phase pumps are shipped without a power cord. indicates the power cord to be used with each particular A three phase power cable kit, Vacuum Technologies part pump. -
Page 12: Operation
TriScroll 600 Series Vacuum Pump Operation Maintenance In order to reach ultimate vacuum, the pump must be left Personnel responsible for pump operation and running for about one hour with the inlet sealed. maintenance must be well-trained and aware of the accident prevention rules. -
Page 13: Anleitungen Zur Benutzung
TriScroll 600 Series Vacuum Pump Anleitungen zur Benutzung Allgemeine Informationen Auspacken und Inspektion Dieses Gerät ist zur Benutzung durch Fachkräfte Beim Versandbehälter handelt es sich um einen bestimmt. Der Benutzer muss vor der Bedienung des doppelten Karton. Gerätes das Anleitungshandbuch und alle zusätzlichen 1. -
Page 14: Installationsanforderungen
TriScroll 600 Series Vacuum Pump Installationsanforderungen Während des Betriebes dürfen die folgenden Umgebungsbedingungen nicht überschritten werden: Sicherheit Temperatur: + 5 °C bis + 40 °C (41 °F bis 104 °F) Sicherheits- oder Isoliervorrichtungen dürfen nicht von Relative der Pumpe entfernt oder modifiziert werden, da sonst Feuchtigkeit: 0 bis 95 % (nicht kondensierend) schwerwiegende Sicherheitsrisiken entstehen und die... - Page 15 TriScroll 600 Series Vacuum Pump In Tabelle 3 sind die lieferbaren TS-600 Pumpenmodelle Dreiphasenpumpen werden ohne aufgeführt. Die Tabelle enthält außerdem Informationen Spannungsversorgungskabel geliefert. Ein zu den Spannungsversorgungskabeln, die mit jeder Dreiphasen-Kabelsatz, Vacuum Technologies einzelnen Pumpe verwendet werden müssen. Teilenummer S4789001, ist lieferbar. Dieser Satz enthält keinen Stecker.
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Page 16: Betrieb
TriScroll 600 Series Vacuum Pump Betrieb Wartung Um ein optimales Vakuum zu erreichen, muss die Pumpe Das für den Betrieb und die Wartung der Pumpe für etwa eine Stunde mit abgedichtetem Einlass laufen. zuständige Personal muss gut geschult und mit den Regeln zur Unfallvermeidung vertraut sein. -
Page 17: Instructions D'utilisation
TriScroll 600 Series Vacuum Pump Instructions d'utilisation Informations générales Ce manuel utilise le protocole des normes de sécurité suivant: Cet équipement est conçu pour être utilisé par des ADVERTISSEMENT Les messages d'avertissement visent professionnels. L'utilisateur est tenu de lire ce manuel à... -
Page 18: Déballage Et Inspection
TriScroll 600 Series Vacuum Pump Déballage et Inspection Exigences d'installation Le conteneur d'expédition est un carton double. Sécurité 1. Après l'ouverture de la boîte extérieure, retirez le Ne retirez pas ni ne modifiez l'équipement de sécurité ou bourrage de mousse. d'isolation de la pompe. - Page 19 TriScroll 600 Series Vacuum Pump Pendant l'opération, les conditions environnementales Lorsqu'elle est fournie par l'usine, la ATTENTION suivantes ne doivent pas être dépassées : pompe est configurée tel qu'indiqué Température : +5 °C à +40 °C (41 °F à 104 °F) dans le tableau suivant.
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Page 20: Opération
TriScroll 600 Series Vacuum Pump Opération Entretien Afin d'atteindre le vide complet, la pompe doit Le personnel responsable de l'opération et de l'entretien fonctionner pendant environ une heure avec l'entrée de la pompe doit être parfaitement formé et conscient des hermétiquement fermée. -
Page 21: Instrucciones De Uso
TriScroll 600 Series Vacuum Pump Instrucciones de uso Información general Desembalaje e inspección Este equipos está diseñado para que lo utilicen El embalaje de transporte es un cartón doble. profesionales. El usuario debería leer este manual de 1. Tras abrir la caja exterior, retire la espuma protectora. instrucciones y cualquier otra información adicional 2. -
Page 22: Requisitos De Instalación
TriScroll 600 Series Vacuum Pump Requisitos de instalación Durante su funcionamiento, las siguientes condiciones ambientales no deben superarse: Seguridad Temperatura: +5 °C a +40 °C (41 °F a 104 °F) No desmonte ni modifique ninguno de los equipos de Humedad relativa: 0 a 95% (sin condensación) seguridad o aislamiento presentes en la bomba. - Page 23 TriScroll 600 Series Vacuum Pump La Tabla 7 enumera los modelos de bombas TS-600 Las bombas trifásicas se envían sin cable de corriente. disponibles e indica el cable de corriente que debe Está disponible un kit de cable de corriente trifásico, con utilizarse con cada bomba en concreto.
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Page 24: Funcionamiento
TriScroll 600 Series Vacuum Pump Funcionamiento Mantenimiento Para alcanzar el vacío máximo, la bomba debe dejarse en El personal responsable del funcionamiento y funcionamiento durante aproximadamente una hora con mantenimiento de la bomba debe estar cualificado y ser la admisión a la misma sellada. consciente de las normativas de seguridad e higiene en el trabajo. -
Page 25: Istruzioni Per L'uso
TriScroll 600 Series Vacuum Pump Istruzioni per l'uso Informazioni generali Disimballaggio ed ispezione Quest'attrezzatura è stata progettata per personale Il contenitore di spedizione consiste in un doppio specializzato. Prima di mettere in funzione l'attrezzatura, scatolone. l'utente deve leggere questo manuale di istruzioni e le 1. -
Page 26: Requisiti Per L'installazione
TriScroll 600 Series Vacuum Pump Requisiti per l'installazione Durante il funzionamento, è opportuno rispettare i seguenti requisiti ambientali: Sicurezza Temperatura: da +5 °C a +40 °C (da 41 °F a 104 °F) Non rimuovere o modificare i sigilli di sicurezza o di Umidità... - Page 27 TriScroll 600 Series Vacuum Pump Nella tabella 9 sono elencati i modelli di pompe TS-600 e Le pompe trifasi vengono spedite senza il cavo di sono indicati i cavi di alimentazione da utilizzare con alimentazione. È disponibile un kit di cavi di ogni particolare pompa.
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Page 28: Funzionamento
TriScroll 600 Series Vacuum Pump Funzionamento Manutenzione Al fine di raggiungere il vuoto massimo, la pompa deve Il personale responsabile del funzionamento e della funzionare per circa un'ora con l'ingresso sigillato. manutenzione della pompa deve essere ben addestrato e deve conoscere le regole per la prevenzione di incidenti. A differenza delle pompe convenzionali a tenuta d'olio, ❑... - Page 29 TriScroll 600 Series Vacuum Pump 使用仕様 況 要 開 梱 と 点 検 Vacuum Technologies Vacuum Technologies TriScroll™ 600 NW25 Vacuum Technologies 警 告 警 告 注 意 TriScroll 600 警 告 注 注 存 ° ° ° ° 無...
- Page 30 TriScroll 600 Series Vacuum Pump 以 下 取 付 要 求 ° ° 安 全 ° ° 絶 縁 修 正 そ 大 危 険 修 理 証 無 効 誘 無 能 注 意 ❑ 警 告 ° ° ❑...
- Page 31 TriScroll 600 Series Vacuum Pump TS-600 Vacuum 表 利 能 示 三 誘 Technologies 指 品 番 号 S 三 配 グ 1 1 ポ ン プ 型 式 と 電 源 コ ー ド ポ ン プ 型 電 動 機 電 圧 プ...
- Page 32 TriScroll 600 Series Vacuum Pump 操 作 保 守 到 達 実 現 入 口 密 封 担 当 厳 １ ほ ど 続 そ 防 止 則 精 通 Vacuum 従 来 油 回 ❑ 接 死 亡 警 告 Technologies 液...
- Page 33 TriScroll 600 Series Vacuum Pump 使用说明 般 信 息 开 箱 和 检 查 Vacuum Technologies Vacuum Technologies TriScroll™ 600 NW25 Vacuum Technologies Technical Information 告 告 告 TriScroll 600 放 (-4 °F 140 °F) 95% (...
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Page 34: 安 全
TriScroll 600 Series Vacuum Pump 安 装 要 求 (41 °F 104 °F) 安 全 95% ( 告 ❑ (131 °F) ❑ 您 地 压 匹 ❑ 需 换 压 第 页 第 E lectrical Connections 页 “ ” ❑ 说... - Page 35 TriScroll 600 Series Vacuum Pump TS-600 Vacuum 三 随 电 源 电 缆 向 客 电 源 电 缆 Technologies 部 S4789001 三 电 源 电 缆 套 套 插 泵 型 号 和 电 源 电 缆 型 号 电...
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Page 36: 操 作
TriScroll 600 Series Vacuum Pump 操 作 维 护 实 极 限 须 密 封 吸 入 口 情 况 维 护 须 格 且 熟 持 小 悉 预 防 规 传 统 油 封 同 Vacuum Technologies ❑ 告... -
Page 37: 반 정 보
TriScroll 600 Series Vacuum Pump 사용설명 반 정 보 포 장 열 기 및 검 사 Vacuum Technologies Vacuum Technologies TriScroll NW25 Vacuum Technologies " " 고 고 고 TriScroll 600 주 의 주 석 주 석 관 -20 °C 60 °C -4 °F 140 °F... -
Page 38: 설 치 요 구
TriScroll 600 Series Vacuum Pump 설 치 요 구 +5 °C +40 °C 안 전 장 치 (41 °F 104 °F 주 의 고 ❑ 55 °C (131 ° F ) ❑ 주 의 ❑ ❑ " " 주 의... - Page 39 TriScroll 600 Series Vacuum Pump TS-600 Vacuum Technologies S4789001 펌 프 모 델 및 코 드 펌 프 모 델 발 동 기 전 압 플 러 그 유 형 퓨 징 도 체 사 이 즈 코 드 표 기 코...
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Page 40: 조 작
TriScroll 600 Series Vacuum Pump 조 작 유 지 Vacuum 고 ❑ Technologies ❑ 시 동 과 정 ❑ 55 °C (131 °F) ❑ 중 단 과 정 ÉD 주 석 " "... -
Page 41: Technical Information
TriScroll 600 Series Vacuum Pump Technical Information Table 17 Specifications Model TriScroll™ 600 Series Dry Scroll Vacuum Pump Interface dimensions See Figure 1 Peak pumping speed 50 Hz: 420 l/m, 25.2 m /hr (14.8 cfm) 60 Hz: 500 l/m, 30 m /hr (17.7 cfm) Media Clean air. - Page 42 TriScroll 600 Series Vacuum Pump 472 (18.57) Single Phase (1.48) Intake (NW40) 472 (18.56) Three Phase ø300 (ø11.80) (13.98) (7.25) (.85) (.50) (3.22) (4.13) Exhaust ( NPT) port swivels 360 NW25 Exhaust extension included but not installed (6.94) (4.02) 145 (5.69) 4 x ø11(ø.43) Thru Figure 1 Interface Drawing with Dimensions Figure 2 Pumping Speed Curves...
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Page 43: (Single Phase Pump Shown)
TriScroll 600 Series Vacuum Pump Cowling Screws; M5 (3) Cowling Inlet (NW40) Inlet Screen NW25 Exhaust Adapter Bearing Purge Port (1/4" National Pipe Thread) Pump Frame Frame Screws; M6 (4) Gas Ballast Port (1/4" National Pipe Thread) 10. Mounting Holes; 11 mm diameter thru (8) 11. -
Page 44: Electrical Connections
TriScroll 600 Series Vacuum Pump Electrical Connections Wire the motor and electrical interlocks (if applicable) in accordance with local electrical codes and the relevant electrical component manufacturer’s instructions. Table 18 lists the full load motor currents at various voltages. Table 18 Full Load Motor Currents, Amperes 1 phase motor 100 V... -
Page 45: Three Phase Motor Connection
TriScroll 600 Series Vacuum Pump Three Phase Motor Connection The pump can be configured for low voltage, 200 VAC to 230 VAC, or for high voltage, 380 VAC to 415 VAC and 460 VAC. As supplied from the factory, the pump is configured for low voltage. Figure 5 shows the electrical connections for a three phase motor. -
Page 46: Mechanical Connections
TriScroll 600 Series Vacuum Pump Mechanical Connections Optional Isolation Valve Scroll pumps return to atmospheric pressure quickly Pump Location when shut off, thus the installation of a fast acting, automatic, normally closed isolation valve is strongly Locate the pump on a firm, level surface. recommended to prevent pump debris from being Mounting holes provided in the frame can be used to transported back into the vacuum chamber when the... -
Page 47: Gas Ballast
TriScroll 600 Series Vacuum Pump 2. Connect the VPI Valve solenoid wire leads to the Wiring pump motor as shown in Figure 4 or Figure 5. Using the data in Table 19, verify that the VPI Valve 3. Replace the motor electrical cover and secure it using chosen is compatible with the TriScroll supply voltage the three screws removed in step 1. -
Page 48: Troubleshooting
TriScroll 600 Series Vacuum Pump Troubleshooting Table 20 contains a list of possible problems, their probable causes, and corrective actions. Table 20 Troubleshooting Chart Problem Probable Cause Corrective Action Pump won’t start Circuit breaker open Close breaker. Identify cause of overload. Motor thermal protector open Allow motor to cool. -
Page 49: Maintenance
TriScroll 600 Series Vacuum Pump Maintenance General Information Vacuum Technologies TriScroll 600 series pumps are designed to provide years of trouble-free service if maintenance pro- cedures and intervals are observed. Bearing grease replenishment and tip seal replacement is recommended when pump base pressure has risen to an unacceptably high level for your application. -
Page 50: Factory Service Options
TriScroll 600 Series Vacuum Pump Factory Service Options Table 23 lists the factory-rebuild service and advance exchange of complete TriScroll 600 series pumps, as well as factory service options that Vacuum Technologies offers. Table 23 Factory Service Options Factory Service Options Part Number Advance Exchange TriScroll 600 Single Phase (US cord) EXPPTS06001... - Page 51 4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 52 9001 Request for Return R E G I S T E R E D Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): URBO UMPS AND URBOCONTROLLERS Claimed Defect Position Parameters...