Technical Specification - Agilent Technologies TwisTorr 84 FS Notice De Mode D'emploi

Technical Specification

Max gas throughput:
water cooling (ambient temperature=35°C; water temperature= 25°C; backing
•
pump 5 m3/h)
air cooling (ambient temperature=35°C; backing pump 5 m3/h)
•
Pumping speed
N
2
He
H
2
Ar
Max gas throughput at full
rotational speed (with
recommended forepump)
N
2
Ar
Compression ratio
N
2
He
H
2
Ar
Foreline Tolerance( )
*
N
2
He
H
2
Ar
Base pressure with recommended
forepump
( ) The Foreline Tolerance is the pressure at which the turbopump still produce a compression of
*
100
TwisTorr 84 FS User Manual / 87-901-043-01(B)
ISO 63 / CFF 4.5"
67 l/s
63 l/s
53 l/s
66 l/s
Air cooling
100 sccm
70 sccm
 5 x 10 mbar
-10
( 3.75 x 10 Torr)
-10
(According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the completion of
test dome bake-out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump)
Technical Information

Technical Specification

CFF 2.75"
56 l/s
46 l/s
40 l/s
57 l/s
Water cooling
100 sccm
70 sccm
1  10
11
2  10
6
5  10
4
> 1  10
11
> 14 mbar
> 12 mbar
> 4 mbar
> 14 mbar
17
KF 40
49 l/s
38 l/s
36 l/s
44 l/s
283/336