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5
Technical Information
Description of the Pump
Description of the Pump
The Agilent VacIon 2 l/s pumps are ion pumps and are available in
the following versions:
Tab. 1
PART NUMBER
9190520
9190521
9190522
9190523
9190524
The part numbers in the table are relevant to the pump without the magnet.
NOTE
The magnet part numbers is 9190038.
The 2 l/s pump is a pump which operates on the principle of ion
gettering in the pressure range from 10
roughing pump is needed to lower the system pressure from
atmosphere to below 10
Figure 2
Figure 3
48/68
MODEL
2 l/s pump mini CFF
2 l/s pump ¾" O.D. 180 ° SST tube
2 l/s pump 3/8" O.D. 180 ° copper tube
2 l/s pump ¾" O.D. 180 ° SST tube vacuum proc.
2 l/s pump¾" O.D. 90 ° SST tube tee style
-4
mbar.
Model 9190520
Model 9190521
2 l/s Ion Pump User Manual / 87-900-091-01 (E)
-4
to less than 10
-9
mbar. A
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