Pump Used With Corrosive Gases; Connection C - Electrical - Agilent Technologies TV 551 Notice De Mode D'emploi

Connection C – ELECTRICAL
Figure 54
The turbopump is connected to the controller through an 8-pin
connector. Pins B, C and D are the 3-phase supply to the motor, pins
A and F are connected to the temperature sensor (NTC type, 30 KΩ
resistance at 25 °C) and pin E is connected to the pump ground; pins
G and H are not connected.
If the temperature sensor is disconnected, the pump will not start. To
prevent damage to the pump when the temperature exceeds 60 °C,
the sensor automatically cuts out the power supply.

Pump Used with Corrosive Gases

To prevent damage to the bearings, an inert gas must flow into the
pump body around the upper bearing towards the forevacuum line.
To supply the inert purge gas (e. g. nitrogen) to the pump through the
purge port, connect a gas purge valve between the pressure regulator
and the pump.
TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
Technical Information

Pump Used with Corrosive Gases

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