N.
130
200
201
202
203
204
205
206
300
301
302
320
to
399
400
402
TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
RS 232/RS 485 Communication Description
Read/
Data
Description
Write
Type
Reserved to Agilent service
R
N
Pump current in mA dc
R
N
Pump voltage in Vdc
R
N
Pump power in W (pump
current x pump voltage
duty cycle)
R
N
Driving frequency in Hz
R
N
Pump temperature in °C
R
N
Pump status
R
N
Error code
R
N
Cycle time in minutes
(zeroed by the reset
command)
R
N
Cycle number (zeroed by
the reset command)
R
N
Pump life in hours
(zeroed by the reset
command)
Reserved to Agilent service
R
A
CRC EPROM (QE)
R
A
CRC Param. (PA)
Technical Information
Admitted Values
0 to 70
Stop = 0
Waiting intlk = 1
Starting = 2
Auto-tuning = 3
Braking = 4
Normal = 5
Fail = 6
Bit description: see the
following figure
999999
9999
999999
QE5XXXX
(where "XXXX" are variable)
PA5XXXX
(where "XXXX" are variable)
241/276
17