Agilent Technologies TwisTorr 74 FS Notice De Mode D'emploi page 343

Figure 49 Purge layout
TwisTorr 74 FS User Manual / 87-901-053-01 (A.00)
1 Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
Technical Information
Pump Used with Corrosive Gases
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