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Connection B - FORE-VACUUM PUMP
A flange KF 16 NW is available to connect the
Turbo-V301SF pump to the fore-vacuum pump. A
hose or vacuum approved pipe can be used. If a
rigid pipe is used, any vibration generated by the
mechanical pump must be eliminated through the
use of bellows.
Connection configurations
Connection C - ELECTRICAL
The turbopump is connected to the controller
through an 6-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the temperature sensor (NTC type,
30 KΩ resistance at 25° C) and pin E is connected
to the pump ground.
If the temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60° C, the
sensor automatically cuts out the power supply.
The Turbo-V301SF pump is characterized by its
high compression ratio also for oil vapors. When
using a mechanical oil-sealed pump, it is advisable
to install a suitable trap between the turbopump
and the fore-vacuum pump in order to prevent oil
backstreaming.
PUMP USED WITH CORROSIVE GASES
To prevent damage to the bearings, an inert gas
must flow into the pump body around the upper
bearing towards the forevacuum line. To supply
the inert purge gas (e. g. nitrogen) to the pump
through the purge port, connect a gas purge valve
between the pressure regulator and the pump.
Adjust the pressure regulator in order to read a
gas flow rate of 0.1 to 0.8 mbar l/s.
To prevent bearing damage, Varian suggests a
minimum purge gas flow rate of 10 sccm (0.17
mbar l/s). This value can be exceeded, according
to the process requirements. Please contact Var-
ian for specific applications.
The purge gas throughput with the recommended
3
forepump of 15 m
high vacuum pressure in the 10
The recommended gas flow maintains a pressure
into the pump body higher than the forevacuum
pressure.
88
TECHNICAL INFORMATION
NOTE
CAUTION
/h (11 CFM) allows to achieve a
-8
mbar range.
87-900-957-01(E)
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