Table des Matières
Publicité
Liens rapides
Turbo-V300HT
969-9037 series
969-9038 series
969-9039 series
969-9040 series
87-900-875-01(C)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian 969-9037 Série
Sommaire des Matières pour Varian 969-9037 Série
- Page 1 MANUALE DI ISTRUZIONI Turbo-V300HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9037 series INSTRUKSTIONSBOG 969-9038 series BRUKSANVISNING 969-9039 series INSTRUKSJON MANUAL 969-9040 series OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-875-01(C) APRIL 2002...
- Page 2 Turbo-V 300HT...
-
Page 5: Table Des Matières
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Informazioni Generali
NOTA Le pompe turbomolecolari della serie Turbo-V300HT devono Le note contengono informazioni importanti estrapolate dal te- essere utilizzate solo con uno degli appositi controllori Varian sto. (serie 969-9424, 969-9524, 969-9870) e devono essere colle- gate ad una pompa primaria (vedere schema in "Technical In- formation"). - Page 7 In caso di guasto è possibile usufruire del servizio di riparazio- fissata alla camera da vuoto per mezzo dell'apposita minuteria ne Varian o del "Varian advanced exchange service", che per- meccanica Varian. Per ulteriori dettagli vedere l'appendice "Te- mette di ottenere una pompa rigenerata in sostituzione di chnical Information".
-
Page 8: Vor Der Installation
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V300HT handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich für jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Förderung... - Page 9 NM10-Gewinde am Pumpenghehäuse unter 50°C abgesunken ist. Turbopumpen mit ConFlat-Eingangsflansch müssen mit dem Bei einem Defekt kann der Varian Service oder der " advanced speziellen Varian-Befestigungsmaterial an die Vakuumkammer exchange service" in Anspruch genommen werden. angeschlossen werden. Weitere Hinweise siehe Anhang “Technical Information”.
-
Page 10: Indications Generales
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire... -
Page 11: Utilisation
3,1 Nm. réparations ou un "advanced exchange service", remplir et Pour l’installation des accessoires en option, consulter faire parvenir au bureau local Varian la fiche "Sécurité et “Technical Information”. Santé" annexée à la présente notice d'instructions. Une copie de cette fiche devra être mise dans l'emballage de la pompe... -
Page 12: Informacion General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 En caso de avería se podrá utilizar el servicio de reparación Para más detalles véase el anexo “Technical Information”. Varian o el "Varian advanced exchange service", que permite Para fijar la bomba mediante su base, es necesario utilizar tres obtener una bomba regenerada para sustituir la averiada.
-
Page 14: Informações Gerais
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Page 15 à câmara de vácuo através de parafusos específicos da Em caso de defeito é possível usufruir do serviço de reparação mecânica Varian. Para maiores detalhes, ver o apêndice Varian ou do "Varian advanced exchange service", que permite "Technical Information". obter uma bomba regenerada que substitua a bomba com Para fixar a bomba através da sua base, é...
-
Page 16: Installatie
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 In geval van storing is het mogelijk om de reparatiedienst van meer informatie de bijlage “Technical Information”. Varian of de "Varian advanced exchange service" in te Om de pomp met behulp van zijn basis te bevestigen, zijn drie schakelen: zo krijgt men een ruilpomp ter vervanging van de M6 bouten nodig die in de gaten in de basis van de pomp defecte pomp.
-
Page 18: Almene Oplysninger
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Page 19 Hvis pumpen går i stykker, kan man benytte sig af Varians fra Varian. For detaljer henvises til “Teknisk information”. reparationsservice eller af Varians "Advanced Exchange For at fastspænde pumpen til fundamentet er det nødvendigt at Service", hvorved man kan få...
-
Page 20: Förberedelser För Installationen
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Page 21 öppnas. Vänta sedan tills rotorn stannat samt tills pumpens yttemperatur är lägre än 50ºC. Om pumpen havererar, kontakta Varian reparationsverkstad eller Varian utbytesservice, som kan ersätta pumpen med en renoverad pump. OBSERVERA Innan pumpen lämnas in till tillverkaren för reparation eller...
-
Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Page 23 50°C. vakuumkammeret ved hjelp av de spesielle låsedelene fra Varian. For detaljer henvises det til “Teknisk informasjon”. Dersom pumpen stanser, må du ta kontakt med Varians For å feste pumpen til fundamentet er det nødvendig å bruke reparasjonservice eller med Varians avanserte bytteservice tre M6-skruer, som skrues fast i hullene på...
-
Page 24: Yleisiä Tietoja
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Page 25 Yksinkertainen 22 Nm pysähtymistä ja että pumpun pintalämpö on alle 50º. kiinnike, kierteitys Laitteen vahingoittuessa on mahdollista käyttää Varianin korjauspalvelua tai "Varian advanced exchange service", joka mahdollistaa regeneroidun pumpun saamisen vahingoittuneen Torbopumppu ConFlat siaääntilolaipalla tulee kiinnittää tilalle.
- Page 26 £llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂...
- Page 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj ISO 100 22 Nm Diplÿ m◊ggenh el∂kwsh M10 Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th Monÿ m◊ggenh 11 Nm dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a el∂kwsh M8 £llh eniscum◊nh.
-
Page 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 29 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Varian hard- In the case of breakdown, contact your local Varian service ware. See the appendix "Technical Information" for a detailed center who can supply a reconditioned pump to replace that description.
-
Page 30: Technical Information
TECHNICAL INFORMATION The turbine rotor is supported by permanently lu- DESCRIPTION OF THE TURBOPUMP bricated high precision ceramic ball bearings in- The Turbo-V300HT pump is available in four ver- stalled on the forevacuum side of the pump. sions which differ only in their inlet flange. The static blades of the stator are made of They are: stainless steel. -
Page 31: Technical Specification
56000 RPM CFF 6” and 8”: 8 (17.6) Start-up time < 3 minutes Recommended mechanical: Varian SD 300 * According to standard DIN 28 428, the base forepump diaphragm: Varian MD 60 pressure is that measured in a leak-free test dome,... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-875-01(C)
-
Page 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump model INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9302 and 969-9303 prevents the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Page 34: Heater Band Installation
TECHNICAL INFORMATION HEATER BAND INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model). - Page 35 TECHNICAL INFORMATION The metallic model is assembled as shown in the NOTE figure. These hoses must be held on the respective noz- zles using hose clips to avoid that the tube(s) gets loose or disconnected during operation. The plastic model must be screwed into the suit- able holes of the pump.
-
Page 36: Air Cooling Kit Installation
TECHNICAL INFORMATION GAS PURGE VALVE INSTALLATION AIR COOLING KIT INSTALLATION A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to un- screw the purge port cover as shown in the follow- ing figure, A fan kit model 969-9314 is available for air cooling... -
Page 37: Vent Valve Installation
TECHNICAL INFORMATION Screw the vent valve into the pump inserting the VENT VALVE INSTALLATION supplied adapter between the valve and the pump. The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. -
Page 38: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VIBRATION ISOLATOR INSTALLATION Four vibration isolators for ISO and CFF inlet flange version pumps are available as accessories. The four model part numbers are the following: − model 969-9342 for ISO 100 flange; − model 969-9343 for ISO 160 flange; −... -
Page 39: Typical Layout Diagram
10. Fore-vacuum pump control relay For ConFlat flange connections we recommend 11. Connection for water cooling using Varian hardware. To facilitate assembly and dismantling, apply Fel- 12. Roughing line with valve (optional) pro C-100 high temperature lubricant to the screw 13. -
Page 40: Connection Configurations
TECHNICAL INFORMATION Connection configurations Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL A flange KF 25 NW is available to connect the Turbo-V300HT to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical pump must be eliminated through the use of bellows. -
Page 41: Pump Used With Corrosive Gases
! ! ! ! CAUTION 1. Purge gas line 2. Pressure regulator To prevent bearing damage, Varian suggests a 3. Gas purge valve minimum purge gas flow rate of 10 sccm (0.17 4. Gas purge port mbar l/s). This value can be exceeded, according 5. -
Page 42: Pump Used In Presence Of Magnetic Fields
949-9412 As a matter of fact, in case of high magnetic fields, also important forces might be generated and ap- For a complete overview of Varian's extensive plied to the rotor. product lines, please refer to the Varian catalog. 87-900-875-01(C) -
Page 43: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 44 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 45 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...