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The turbopump with ISO inlet flange must be fixed to the
vacuum chamber by means of clamps or claws. The following
table shows, for each fixing device, the necessary number of
clamps or claws and the relevant fixing torque.
FIXING
FLANGE
DEVICE
ISO 63
M10 clamps
M8 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian
hardware. See the appendix "Technical Information" for a
detailed description.
NOTE
The Mini-TASK AG81 cannot be fixed by means of its base.
For installation of optional accessories, see "Technical
Information".
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of
the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C.
Never use the turbopump when the inlet flange is not
connected to the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
Avoid impacts or harsh movements of the pump when in
operation. The bearings may become damaged and damages
to the persons or the things could be taken place.
!
CAUTION
Use inert gas free from dust, particles or humidity (like
Nitrogen) for venting the pump. The pressure at the vent port
must be less than 2 bar (above atmospheric pressure).
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
FIXING
N.
TORQUE
4
22 Nm
4
11 Nm
WARNING!
WARNING!
WARNING!
WARNING!
Switching on and Use of Mini-TASK AG81
To switch on the Mini-TASK AG81 it is sufficient to supply the
mains and then move the external switch to ON position (red
light on). The integrated controller automatically recognizes the
mains presence and start up the pump.
At the first start up it is recommended to use the "Soft Start"
mode by enabling it on the controller. For the following start ups
it is recommended to disable the "Soft Start" mode. For the
"Soft Start" mode activation procedure, see the paragraph
"Signal Description" in the chapter "Technical Information".
The blue LED "STATUS" located on the Mini-TASK AG81 base
front panel indicates with its flashing frequency the system
operating conditions:
•
with no flashing: the pump is normally rotating;
•
slowly flashing (period of about 400 ms): the system is in
ramp, or in braking, or in Stop, or in "Waiting for interlock"
status;
•
fast flashing (period of about 200 ms): error condition.
See the appendix "Technical Information" for a detailed
description of the Mini-TASK AG81 control panel.
Mini-TASK AG81 Switching off
To switch off the Mini-TASK AG81 it is sufficient to move the
external switch to OFF position (red light off). The integrated
controller immediately stops the pump.
Emergency Stop
To immediately stop the Mini-TASK AG81 in an emergency
condition it is necessary to remove the supply cable from the
mains plug or moving the external switch to OFF position.
MAINTENANCE
The Mini-TASK AG81 does not require any maintenance. Any
work performed on the system must be carried out by
authorized personnel.
Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center.
Before returning the system to the constructor for repairs, the
"Health and Safety" sheet attached to this instruction manual
must be filled-in and sent to the local sales office. A copy of the
sheet must be inserted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in
accordance with the specific national standards.
67/84
INSTRUCTIONS FOR USE
WARNING!
NOTE
87-901-003-01(A)
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