Publicité
1.
Close the corrosive gas flow into the system.
2.
Leaving the Turbo-V pump and the backing
pump running and the purge gas flowing, wait
for enough time to evacuate the corrosive gas
from the system.
3.
Turn off the Turbopump.
4.
Open the Turbo-V vent port slowly until to
reach atmospheric pressure in the system.
5.
When the Turbo-V pump and the backing
pump are stopped and the system is at at-
mospheric pressure, for a better bearing pro-
tection it is advisable to leave the purge gas
flowing into the Turbo-V pump, with the
chamber or the Turbo-V vent valve opened, to
avoid system overpressures. If the vent valve
can't be kept opened, the backing pump
should be left operating.
1. Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
Purge layout
PUMP USED IN PRESENCE OF MAGNETIC
FIELDS
Magnetic fields induce eddy currents in the rotor of
a turbomolecular pump that tend to oppose to its
rotation.
The result is increased electrical power consump-
tion by the motor, most of which is dissipated in
the rotor.
Since the rotor is not in contact with the stator the
above power can leave the rotor mainly by radia-
tion and hence the rotor may be overheated while
static parts of the pump remain cool.
This effect is strongly dependant from the inten-
sity, time function and distribution of the magnetic
field.
In general, therefore, an increase in pump current
can be expected.
If this increase is lower than 50% of the current
value drawn by the motor in high vacuum opera-
tion, no particular problem should be expected.
However if the effect is grater, than the case
should be carefully reviewed by Varian's specialist.
As a matter of fact, in case of high magnetic fields,
also important forces might be generated and ap-
plied to the rotor.
ACCESSORIES AND SPARE PARTS
DESCRIPTION
Mains cable NEMA Plug, 3m long
Mains cable European Plug, 3m
long
Serial cable and Navigator
Software
Inlet screen, ISO 100
Water cooling kit
Plastic water cooling kit
Air cooling kit for Navigator
Controller
Fan extension cable
Bracket for Navigator Controller
side mounting
Vibration isolator, ISO 100
Vent flange, NW 10 KF / M8
Vent valve for TV-301 AG Rack
Controller
Vent valve for Navigator Controller
Purge valve with KF16 flange
10 SCCM
Purge valve with 1/4 Swagelock
10 SCCM
Purge valve KF16
20 SCCM
Purge valve 1/4 Swagelock
20 SCCM
Foreline flange KF25 1/4 gas
Forepump DS 302, with 1 ph.,
universal motor
Forepump SH 110
89/89
TECHNICAL INFORMATION
PART NUMBER
969-9958
969-9957
969-9883
969-9302
969-9337
969-9347
969-9299
969-9949
969-9970
969-9344
969-9108
969-9844
969-9834
969-9239
969-9240
969-9241
969-9242
969-9130
949-9325
SH01101UNIV
87-900-957-01(F)
Publicité
