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Section 1 Introduction
GF100 Series
1-3 Product Support References
1-4 Notice and Caution Statements
1-5 Product Warranty
1-6 How to Order a GF100 Series Device
1-7 Industry Standard References
1-8 GF100 Series Gas Table
1-9 Glossary of Terms and Acronyms
1-2
Refer to www.BrooksInstrument.com for Brooks sales and service
locations and to obtain other documents that support the GF100 Series.
Those documents include:
Brooks MultiFlo
Configurator Quick Start Manual:
TM
-
X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG
Brooks GF100 Series data sheets:
-
DS-TMF-GF100-Series-MFC-eng
DS-TMF-GF135-Series-MFC-eng
DS-TMF-GF121-Series-MFC-eng
DS-DPT-EtherCAT-GF100-Series-eng
Warning, caution and notice statements are located throughout this manual
in the ANSI format. A WARNING statement indicates a potentially
hazardous situation which, if not avoided, COULD result in death or serious
injury. A CAUTION statement indicates a potentially hazardous situation
which, if not avoided, MAY result in minor or moderate injury. It may also be
used to alert against unsafe practices. A NOTICE statement describes
specific information that requires special attention.
Product warranty information can be found on the Back Cover of this
Manual and on the Brooks website at www.BrooksInstrument.com. This
information provides general warranty information, limitations, disclaimers,
and applicable warranty periods according to product group.
Refer to Section 5.
Refer to Table 1-1.
Refer to Appendix A.
Refer to Table 1-2
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
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