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Section 2 Installation
GF100 Series
2-11 Purge the Gas Supply Line Before GF100 Series Installation
2-4
Before operating the GF100 Series, the gas supply line must be
completely purged with nitrogen or argon to ensure the line is free from
toxic or flammable gases, contaminants, moisture, and oxygen. The purge
gas must be free of moisture and oxygen to less than 100 ppb. Purge the
gas lines as follows or in accordance to prescribed company and safety
procedures.
1. Shut off the process gas supply valve(s) upstream of the GF100 Series.
If such a valve is not available, shut the valve on the gas panel. Tag the
valve at this point to prevent accidental re-exposure of the process gas
to the gas line.
2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the
process gas. Cycle purging consists of evacuating to a low pressure
adequate to induce out-gassing and then purging to remove adhered
moisture and oxygen. If a toxic or reactive gas is present and a clogged
GF100 Series is suspected, then proceed with caution. Pump down
and purge the GF100 Series from both downstream and upstream
lines. If check valves are present in the gas line, both pumping down
and purging are required. Pumping down without purging is inadequate.
If a good vacuum source is not available, the GF100 Series can be de-
contaminated by purge only.
3. Repeat the purge cycle several times within 2-4 hours to complete the
cleaning. For toxic and corrosive gasses, it is recommended to use
100-120 cycles.
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
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