Publicité
Section 1 Introduction
GF100 Series
1-6
Pressure Transient Insensitivity (PTI)— Included with all GF125 &
GF135 models
Cost and space constraints are driving gas panel designers to remove
point-of-use pressure regulators and pressure monitoring components from
the process design and rely solely on the mass flow controller to accurately
control the process under dynamic pressure conditions. The Brooks GF125
& GF135 (PTI) devices utilize a patented control algorithm that inverts the
pressure signal, compares it to the pre-fluctuation signal and drives real-
time valve position compensation to maintain stable flow. Enhanced
pressure transient is achieved through faster sensing, quicker processing,
and a reduction in internal dead-volume between the sensors and valve
orifice.
GF101/121/126 based on the same technology and design as the low
flow GF's (same sensor, same electronics, low power support)
• Smaller footprint than competitive MFC's
• Handles flow rates up to 300 slpm
• Metal seal for durability and high leak integrity
• Proprietary sensor technology
• Precise flow control with fast sub-1 second settling time
• 1% of reading accuracy
• Corrosion-resistant Hastelloy C-22 sensor tube
Optional Safe Delivery System (SDS)— GF120 model only
The Safe Delivery System (SDS) enhanced GF120 model is a state-of-the-
art low pressure drop devices for the delivery of sub atmospheric safe
delivery system gases used in Implant and Etch processes. The Brooks
GF120 SDS models are available in full scale flow ranges 4 sccm -1 slpm.
Advanced Thermal Flow Measurement Sensor
Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an
enhanced sensor manufacturing and burn in process incorporates a unique
orthogonal sensor mounting orientation to eliminate sensor drift caused by
valve heating effects and eliminates thermal siphoning effects. This unique
sensor configuration includes an optimized temperature profile for gases
prone to thermal decomposition. This design results in:
• Enhanced signal to noise performance for improved accuracy at low
set points
• Superior reproducibility at elevated temperature through new
isothermal packaging and onboard conditioning electronics with
ambient temperature sensing and compensation
• Improved long-term stability
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Publicité
