Brooks Instrument GF100 Serie Manuel D'installation Et D'utilisation

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Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Brooks

GF100 Series

High Purity/Ultra-High Purity Digital Thermal

Mass Flow Devices

Model GF125 Analog I/O

Model GF135 Analog I/O

Model GF125 Digital I/O

Model GF121 Analog I/O

GF100 Series

Sommaire des Matières pour Brooks Instrument GF100 Serie

Page 1 Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 ® Brooks GF100 Series High Purity/Ultra-High Purity Digital Thermal Mass Flow Devices Model GF125 Analog I/O Model GF125 Digital I/O Model GF135 Analog I/O Model GF121 Analog I/O...
Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
Page 4 Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
Page 5 Contents Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Paragraph Page Number Number Section 1 General Information Introduction ........................... 1-1 How to Use This Manual ....................... 1-1 Product Support References ......................1-2 Notice and Caution Statements ..................... 1-2 Product Warranty ..........................
Page 6 Contents Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Figure Page Number Number GF100 Series High Performance Gas Flow Controller Analog and Digital ........1-1 LCD Display ..........................1-7 Dimensions - GF100/GF120/GF125 Series ................. 1-15 Dimensions - GF135, DeviceNet ....................1-16 Dimensions - GF135, RS485 .......................
Page 7 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 1-1 Introduction Designed for semiconductor, MOCVD , and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers and meters deliver outstanding performance, reliability, and flexibility.
Page 8 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF100 Series. Those documents include: Brooks MultiFlo Configurator Quick Start Manual: X-SW-MultiFlo-Config-QS-eng.
Page 9 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-1 Industry Standard References Reference Number Reference Description MIL-STD-810 Method 514.4, Category 1, Transportation Requirement Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates...
Page 10 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-2 Terms and Acronyms Term or Acronym Definition Customer Special Requirement Chemical Vapor Deposition DeviceNet A 5-wire local network I/O communication device that employs a command/response communication protocol Digital Signal Processor EPI Epitaxy (EPI).
Page 11 Adapter Cables *Software, MultiFlo Configurator A331710003 Cable Assembly 2.5mm 214F027AAA USB-RS485 Converter with DB-9 female A332295001 Power Supply MFC A332297002 Cable, Power, 9-Pin A332297001 Cable, Power, DeviceNet * MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo www.BrooksInstrument.com/Documentation&Downloads...
Page 12 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Pressure Transient Insensitivity (PTI)— Included with all GF125 & GF135 models Cost and space constraints are driving gas panel designers to remove point-of-use pressure regulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions.
Page 13 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 High Purity Flow Path The Brooks GF Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice.
Page 14 RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). EtherCAT is an Ethernet based communications system know for its high cycle time and cost efficient cabling and master application solutions.
Page 15 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-3 Specifications for Standard GF100/GF120/GF125 Series GF100 GF100 GF120 GF120 GF125 GF125 GF100 GF100 GF100 GF120 GF120 GF120 GF125 GF125 GF125 Performance Performance Performance Performance Performance Full Scale Flow Range (N...
Page 16 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series Performance Performance Performance Performance Performance GF120XSL GF120XSL GF120XSD GF120XSD GF120XSL GF120XSL GF120XSL GF120XSD GF120XSD GF120XSD Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N...
Page 17 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications Performance Performance Performance Performance Performance GF100 GF100 GF100 GF100 GF100 GF120 GF120 GF120 GF120 GF120 GF125 GF125 GF125 GF125...
Page 18 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-6 Specifications for GF135 Series P P P P P erformance erformance erformance erformance erformance Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.)
Page 19 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-7 Specifications for GF101/GF121/GF126 Series GF101 GF101 GF101 GF101 GF101 GF121 GF121 GF121 GF121 GF121 GF126 GF126 GF126 GF126 GF126 Performance Performance Performance Performance Performance Full Scale Flow Range (N Full Scale Flow Range (N...
Page 20 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications Performance Performance Performance Performance Performance GF101 GF101 GF101 GF101 GF101 GF121 GF121 GF121 GF121 GF121 GF126 GF126 GF126 GF126...
Page 21 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Downport Configurations Electrical Connector Electrical Connector Electrical Connector G1/GX/TX Specific Dimensions SX Specific Dimensions DX/BB Specific Dimensions 3.29in 3.67in 84mm 93mm .98in 25mm 5.09in 4.45in 129mm 113mm 3.75in...
Page 22 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Model GF135, DeviceNet, C-Seal Connections Model GF135, DeviceNet, VCR Connections 1-16 Figure 1-4 Dimensions - GF135, DeviceNet...
Page 23 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Model GF135, RS485, C-Seal Connections Model GF135, RS485, VCR Connections 1-17 Figure 1-5 Dimensions - GF135 Series, RS485...
Page 24 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 C-Seal Configurations VCR Configurations 1-18 Figure 1-6 Dimensions - GF101/GF121/GF126...
Page 25 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 EtherCAT, Downport Configurations EtherCAT, VCR Configurations 1-19 Figure 1-7 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications...
Page 26 Section 1 Introduction Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-20...
Page 27 If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters...
Page 28 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-5 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit.
Page 29 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 The GF100 Series is equipped with PTI technology, which reduces the effect of pressure fluctuations on gas flow. In PTI technology, a signal from an integrated pressure transducer is combined with the standard thermal sensor output.
Page 30 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-11 Purge the Gas Supply Line Before GF100 Series Installation Before operating the GF100 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen.
Page 31 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Figure 2-3 GF100 Series Mounting Attitude Positions 2-12 Position and Mount the GF100 Series Position the GF100 Series so that the gas flow is pointed in the direction of the flow arrow on the GF100 Series rear S/N label.
Page 32 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Figure 2-4 GF100 Series Mounted to K1 Series Substrate Blocks Figure 2-5 Mounting Screws Torque Pattern Table 2-1 K1 Series Fasteners Connection Fastener Size K1R2 GF 100 Series M4 x 34mm M5 x 30mm...
Page 33 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-13 Perform a Leak Test WARNING It is critical to leak test the gas supply lines and GF100 Series connections before turning on the process gas supply after any new installation. Check for leaks using a helium leak detector or any other appropriate leak test method.
Page 34 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Shut-off valves, whether upstream or downstream from the GF100 Series, should be programmed to turn on before the GF100 Series is turned on and turned off after the GF100 Series is turned off. 2-15-1 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel 1.
Page 35 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-15-2 Zeroing GF100 Series Flow from LCD Display Panel 1. Place the GF100 Series under normal inlet operating pressure. Close the down stream valve to prevent any flow. 2.
Page 36 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-17 Introduction to the MultiFlo Configurator The MutliFlo Configurator application is used to configure the gas and range of the GF Series devices. The following section describes the MultiFlo Configurator and its uses.
Page 37 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Figure 2-10 MultiFlo Cable Adapter Figure 2-11 USB-RS485 Converter (214F027AAA) Connect the USB end of the converter to a laptop or PC. For GF1xx devices with EtherCAT communication, the diagnostic port must be used to interface with the MultiFlo Configurator.
Page 38 GF100 Series April, 2017 The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo. Please reference the MultiFlo Configurator Quick Start Guide for installation and operation details. Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www.BrooksInstrument.com/MultiFlo.
Page 39 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-19-2 Analog/RS485 Connections The GF100 Series devices are available with Analog 9-Pin D-Connectors shown in Figure 2-14. Analog 9-Pin Connector (Refer to Figure 2-15 for Pin-Out Details) Figure 2-14 GF100 Series with 9-Pin Analog Connector Connection Valve Control...
Page 40 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-19-3 EtherCAT Connections Power needs to be supplied via the standard male M8 5-pin connector. The M8 connector is located on the upper inlet side of the device. Refer to Figures 2-16 and 2-17 below.
Page 41 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Base I/O Options I/O Options Using Base Model and Adapter Cable PDC Or PDC Or PDC Ordering Code G1 dering Code G1 dering Code G1 dering Code G1 PDC Or PDC Or...
Page 42 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2-20 GF135 Inlet Valve Installation When installing the GF135 – 1. Connect the MFC tubing labeled "IN" to a CDA or N2 supply of 90 ±3 psi. 2.
Page 43 Part Number: 541B137AAG GF100 Series April, 2017 2-21 GF135 Commissioning Download the GF135 commissioning software, part number 805-C-026, from the Brooks Instrument website. The software will need to be downloaded onto a computer with a Windows ® based operating system. Necessary equipment: •...
Page 44 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 2. Select the single device that you want to perform the commissioning and click on "Connect to Device". The Commissioning button becomes enabled. 3. Click on the "Commission" button to begin the process. Some intermediate messages will appear on the bottom mesage bar.
Page 45 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 4. The user will be presented the option to override a few of the parameters being tested prior to actual commissioning. Selecting "Yes" will continue the process. By selecting "No" the commissioning process will end.
Page 46 Section 2 Installation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 6. Once the auto-volume and the K1 set points are complete, the program will go back to the initial screen. In addition, the overall run time will be displayed.
Page 47 Section 3 Operation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 3-1 General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge.
Page 48 Section 3 Operation Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Operating principles are listed below by following #1-5. 1. The GF125 uses a pressure transducer and support circuitry that sums the transducer signal in the sensor path (transducer not included in the GF100 and the GF120).
Page 49 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 4-1 Overview No routine maintenance is required on the Brooks GF100 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.
Page 50 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017...
Page 51 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a GF100 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions. 4-4 Troubleshooting Checklist 1.
Page 52 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 4-5 GF100 Series Troubleshooting Guide Table 4-2 GF100 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No gas flow. Is the gas supply turned on? Check shut-off valve and pressure readout.
Page 53 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 4-2 GF100 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 4. No gas flow above some set-point. NOTE: When the setpoint is increased beyond this point, the GF100 Series signal remains at some value lower than the set-point.
Page 54 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 4-2 GF100 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 6. Gas flow, or GF100 Series pressure reading oscillates. Are inlet and outlet pressures stable? If outlet pressure is unstable, check for (no oscillation or hunting) a faulty vacuum pump, or hunting at a downstream valve.
Page 55 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 4-2 GF100 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 10. Calibration Drift. Gas box temperature too high? Zero is not correct. Is it linear offset? 11.
Page 56 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
Page 57 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 5-1 Overview Reference Tables 5-1 through 5-5 for specific Product Description Codes. Table 5-1 GF100, GF120 & GF125 Series Product Description Code Code Description Code Description Code Description Code Description...
Page 58 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 5-1 GF100, GF120 & GF125 Series Product Description Code (Continued) Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option...
Page 59 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description...
Page 60 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 5-3 Model GF135 Product Description Code Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description Code Description Code Option Code Option...
Page 61 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 5-4 GF101, GF121 & GF126 Series Product Description Code Code Description Code Description Code Option Code Option Option Description Option Description Code Description Code Description Code Description Code Option...
Page 62 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table 5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option...
Page 63 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 GF100 Series Ordering Instructions Refer to the Product Description Codes on the previous pages. Starting from the left, choose the product code options as follows: 1.
Page 64 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
Page 65 Appendix A: GF100 Series Gas Table Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 A-1 GF100 Series Gas Table Table A-1 GF100 Series Gas Table (Reference the following pages, A-1 and A-2). Table A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 Min inlet pressure for vac.
Page 66 Appendix A: GF100 Series Gas Table Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 Table A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 Min inlet pressure for vac. exhaust (PSIA) SH40 SH41 SH42 SH43 SH44...
Page 67 Appendix B: GF100 Series Patents Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 B-1 GF100 Series Patents The GF100 Series may be protected by the following US patents and their international filings. Table B-1 GF100 Series Patents Patent/Pub.
Page 68 Appendix B: GF100 Series Patents Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
Page 69 Appendeix C Essential Instructions Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017 GF100 Series Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). „ ”...
Page 70 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
Page 71 Appendeix C Essential Instructions Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017 GF100 Series Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
Page 72 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
Page 73 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
Page 74 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
Page 75 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
Page 76 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
Page 77 Appendeix C Essential Instructions Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017 GF100 Series Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED. 2014/34/EU. Brooks Instrument 25 mm PED.
Page 78 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
Page 79 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
Page 80 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
Page 81 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
Page 82 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
Page 83 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
Page 84 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
Page 85 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
Page 86 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
Page 87 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
Page 88 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
Page 89 Installation and Operation Manual X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG GF100 Series April, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
Page 90 Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

Ce manuel est également adapté pour:

Gf135 Gf125