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Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code
Code Description
Code Description
Code Description
Code Description
Code Description
I. I. I. I. I.
Base Model Code
II. II. II. II. II.
Package / Finish Specifications
III.
III.
III.
III.
III.
Configurability
IV.
IV.
IV.
Special Application
IV.
IV.
V. V. V. V. V.
Valve Configuration
VI.
VI.
VI.
VI.
VI.
Gas or SH MultiFlo Bin
VII. Fitting
VII.
VII.
VII.
VII.
VIII.
VIII.
VIII.
VIII. Downstream Condition
VIII.
IX.
IX.
IX.
IX.
IX.
Sensor
X. X. X. X. X.
Connector
XI.
XI.
XI.
XI.
XI.
Customer Special Request
XII.
XII.
XII.
XII. Auto Shut-Off
XII.
XIII. Auto Zero
XIII.
XIII.
XIII.
XIII.
XIV. Reference Temperature
XIV.
XIV.
XIV.
XIV.
Code Option
Code Option
Option Description
Option Description
Code Option
Code Option
Code Option
Option Description
Option Description
Option Description
GF GF
GF
GF GF
High Purity/Ultra High Purity Digital Mass Flow Controllers
100
100
100
100
100
Flow range 3 sccm - 55 slpm N2 Equivalent.; 1 sec Response; 10 Ra
120
120
120
120
120
Flow range 3 sccm - 55 slpm N2 Equivalent.; 700 msec Response; 5 Ra
125
125
125
125
125
Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N2 Equivalent;
300-700 msec Response; 5 Ra
C C C C C
MultiFlo capable. Standard bins or specific gas/range may be selected.
X X X X X
Not MultiFlo capable. Specific gas/range required. (must select w/ SD or SL special application)
XX XX
XX XX
Standard
XX
SL SL SL SL SL
Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, N2 Equivalent
SD
SD
SD
SD
SD
Safe Delivery System (GF120 Only) Full scale flow range; 25 sccm to 1 slpm, N2 Equivalent
O O O O O
Normally Open valve (not available with SD, SL or VS options)
C C C C C
Normally Closed valve
M M M M M
Meter (No Valve)
XXXX XXXX
XXXX XXXX
XXXX XXXX
XXXX XXXX
XXXX XXXX
Specific Gas Code & Range, i.e. "0004" = Argon and "010L" = 10 slpm
SH40 010C
SH40 010C
SH40 010C
SH40 010C
SH40 010C
Standard Configuration #40, 3-10 sccm Nitrogen Equivalent
SH41 030C
SH41 030C
SH41 030C
SH41 030C
SH41 030C
Standard Configuration #41, 11-30 sccm Nitrogen Equivalent
SH42 092C
SH42 092C
SH42 092C
Standard Configuration #42, 31-92 sccm Nitrogen Equivalent
SH42 092C
SH42 092C
SH43 280C
SH43 280C
SH43 280C
Standard Configuration #43,93-280 sccm Nitrogen Equivalent
SH43 280C
SH43 280C
SH44 860C
SH44 860C
SH44 860C
SH44 860C
SH44 860C
Standard Configuration #44, 281-860 sccm Nitrogen Equivalent
SH45 2.6L
SH45 2.6L
SH45 2.6L
SH45 2.6L
SH45 2.6L
Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent
SH46 7.2L
SH46 7.2L
SH46 7.2L
SH46 7.2L
SH46 7.2L
Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent
SH47 015L
SH47 015L
SH47 015L
SH47 015L
SH47 015L
Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent
SH48 030L
SH48 030L
SH48 030L
Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent
SH48 030L
SH48 030L
SH49 040L
SH49 040L
SH49 040L
SH49 040L
SH49 040L
Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent
SH50 055L
SH50 055L
SH50 055L
SH50 055L
SH50 055L
Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent
VS VS
VS VS
VS
1-1/8" body width, 1/4" VCR male
VX
VX VX
VX VX
1-1/2" body width, 1/4" VCR male
CX CX
CX CX
CX
1-1/8" body width, C Seal 92mm
WX
WX
WX
1-1/8" body width, W Seal 92mm
WX
WX
A A A A A
Atmosphere
V V V V V
Vacuum
O O O O O
Default Sensor Orientation
E0 E0 E0 E0 E0
EtherCAT Communication
XXXX
XXXX
XXXX
XXXX
XXXX
Customer Special Request Number
A A A A A
Auto Shut-Off (Included)
X X X X X
Auto Shut-Off (Not Included)
X X X X X
Auto Zero (Not Included)
000
000
000
000
000
0 deg C Reference Calibration (Standard) - Default Setting
Section 5 Product Description Code
GF100 Series
5-3
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