Publicité
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-7 Specifications for GF101/GF121/GF126 Series
Performance
Performance
Performance
Performance
Performance
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Eq.)
Eq.)
Eq.)
Full Scale Flow Range (N
Full Scale Flow Range (N
Eq.)
Eq.)
2 2 2 2 2
Flow Accuracy
Flow Accuracy
Flow Accuracy
Flow Accuracy
Flow Accuracy
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Linearity
Linearity
Linearity
Linearity
Linearity
Response Time (Settling Time)
Response Time (Settling Time)
Response Time (Settling Time)
Response Time (Settling Time)
Response Time (Settling Time)
Normally Closed Valve
Normally Closed Valve
Normally Closed Valve
Normally Closed Valve
Normally Closed Valve
Pressure Transducer
Pressure Transducer
Pressure Transducer
Pressure Transducer
Pressure Transducer
Control Range
Control Range
Control Range
Control Range
Control Range
MultiFlo
MultiFlo
MultiFlo
MultiFlo
MultiFlo
# of Bins
# of Bins
# of Bins
# of Bins
# of Bins
Control Range
Control Range
Control Range
Control Range
Control Range
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Zero Stability
Zero Stability
Zero Stability
Zero Stability
Zero Stability
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Ratings
Ratings
Ratings
Ratings
Ratings
Operating Temperature Range
Operating Temperature Range
Operating Temperature Range
Operating Temperature Range
Operating Temperature Range
Differential Pressure Range
Differential Pressure Range
Differential Pressure Range
Differential Pressure Range
Differential Pressure Range
Maximum Operating Pressure
Maximum Operating Pressure
Maximum Operating Pressure
Maximum Operating Pressure
Maximum Operating Pressure
Leak Integrity (external)
Leak Integrity (external)
Leak Integrity (external)
Leak Integrity (external)
Leak Integrity (external)
Mechanical
Mechanical
Mechanical
Mechanical
Mechanical
Valve Type
Valve Type
Valve Type
Valve Type
Valve Type
Wetted Materials
Wetted Materials
Wetted Materials
Wetted Materials
Wetted Materials
Surface Finish
Surface Finish
Surface Finish
Surface Finish
Surface Finish
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Status Lights
Status Lights
Status Lights
Status Lights
Status Lights
Alarms
Alarms
Alarms
Alarms
Alarms
Display Type
Display Type
Display Type
Display Type
Display Type
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Units Displayed / Resolution
Units Displayed / Resolution
Units Displayed / Resolution
Units Displayed / Resolution
Units Displayed / Resolution
Electrical
Electrical
Electrical
Electrical
Electrical
Electrical Connection
Electrical Connection
Electrical Connection
Electrical Connection
Electrical Connection
Digital Communication
Digital Communication
Digital Communication
Digital Communication
Digital Communication
Diagnostic /Service Port
Diagnostic /Service Port
Diagnostic /Service Port
Diagnostic /Service Port
Diagnostic /Service Port
Power Supply/Consumption
Power Supply/Consumption
Power Supply/Consumption
Power Supply/Consumption
Power Supply/Consumption
Compliance
Compliance
Compliance
Compliance
Compliance
EMC
EMC
EMC
EMC
EMC
Environmental Compliance
Environmental Compliance
Environmental Compliance
Environmental Compliance
Environmental Compliance
GF101
GF101
GF101
GF101
GF101
Span: 0.05% S.P. per
Normally Closed
Meter (no valve)
GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
10μ inch Ra
MFC Health, Network Status
Control Valve Output, Network Interruption
Top Mount Integrated LCD
Fixed / 10 feet
o
Flow (%), Temp. (
C), Pressure (psia, kPa) / 0.1 (unit)
RS485/Analog via 9-Pin "D" connector, DeviceNet
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
RS485 via 2.5mm jack
DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)
RS485/Analog: 6 Watts max @ +15 Vdc. (+10%) (Under typical operating conditions)
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
GF121
GF121
GF121
GF121
GF121
55 to 300 slm
+1% S.P. > 35-100%, +0.35% F.S. 2-35%
< + 0.15% S.P.
+ 0.5% F.S. (included in accuracy)
< 1 sec
5-100% (Normally Closed Valve)
Standard (All typical high flow rate process gases & mixtures supported)
4 Bins
5-100% (Normally Closed Valve)
< 2% of F.S. @ 30 N2 psig/atm out
< + 0.5% F.S. per year
o
C, Zero: 0.005% F.S. per
o
10-50
C
30-90 psid
Controller: 75 psig / Meter: 150 psig
-10
1x10
atm. cc/sec He
5μ inch Ra (0.1 μm Ra)
TM
via 5-Pin "M12" connector
Section 1 Introduction
GF100 Series
GF126
GF126
GF126
GF126
GF126
Ability to measure inlet pressure
o
C
1-13
Publicité
