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Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
5-1 Overview
Table 5-1 GF100, GF120 & GF125 Series Product Description Code
Code Description
Code Description
Code Description
Code Description
Code Description
I. I. I. I. I.
Base Model Code
II. II. II. II. II.
Package / Finish Specifications
III.
III.
III.
III.
III.
Configurability
IV.
IV.
IV.
IV.
IV.
Special Application
V. V. V. V. V.
Valve Configuration
VI.
VI.
VI.
VI.
VI.
Gas or SH MultiFlo Bin
VII.
VII.
VII.
VII. Fitting
VII.
VIII.
VIII. Downstream Condition
VIII.
VIII.
VIII.
IX.
IX.
IX.
Sensor
IX.
IX.
Reference Tables 5-1 through 5-5 for specific Product Description Codes.
Code Option
Code Option
Code Option
Code Option
Code Option
Option Description
Option Description
Option Description
Option Description
Option Description
GF GF
GF
GF GF
High Purity/Ultra High Purity Digital Mass Flow Controllers
100
100
100
Flow range 3 sccm -55 slpm N
100
100
120
120
120
Flow range 3 sccm -55 slpm N
120
120
125
125
125
Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N
125
125
300-700 msec Response; 4 Ra
C C C C C
MultiFlo capable. Standard bins or specific gas/range may be selected.
X X X X X
Not MultiFlo capable. Specific gas/range required. (must select w/ SD, SL or HA special application)
XX
XX XX
XX XX
Standard
SL SL SL SL SL
Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, Nitrogen Equivalent
SD
SD
SD
SD
SD
Safe Delivery System (GF120 Only) Full scale flow range; >25 sccm to 1 slpm, Nitrogen Equivalent
O O O O O
Normally Open valve (not available with SD, SL or HA options)
C C C C C
Normally Closed valve (must select with SD, SL or HA special application)
M M M M M
Meter (No Valve)
XXXX XXXX
XXXX XXXX
XXXX XXXX
XXXX XXXX
XXXX XXXX
Specific Gas Code & Range, i.e. "0004" = Argon and "010L" = 10 slpm (must select w/ SD, SL or
HA special application).
SH40 010C
SH40 010C
SH40 010C
SH40 010C
SH40 010C
Standard Configuration #40, 3-10 sccm Nitrogen Equivalent (0° C Reference)
SH41 030C
SH41 030C
SH41 030C
SH41 030C
SH41 030C
Standard Configuration #41, 11-30 sccm Nitrogen Equivalent (0° C Reference)
SH42 092C
SH42 092C
SH42 092C
SH42 092C
SH42 092C
Standard Configuration #42, 31-92 sccm Nitrogen Equivalent (0° C Reference)
SH43 280C
SH43 280C
SH43 280C
SH43 280C
SH43 280C
Standard Configuration #43,93-280 sccm Nitrogen Equivalent (0° C Reference)
SH44 860C
SH44 860C
SH44 860C
SH44 860C
SH44 860C
Standard Configuration #44, 281-860 sccm Nitrogen Equivalent (0° C Reference)
SH45 2.6L
SH45 2.6L
SH45 2.6L
SH45 2.6L
SH45 2.6L
Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent (0° C Reference)
SH46 7.2L
SH46 7.2L
SH46 7.2L
SH46 7.2L
SH46 7.2L
Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent (0° C Reference)
SH47 015L
SH47 015L
SH47 015L
SH47 015L
SH47 015L
Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent (0° C Reference)
SH48 030L
SH48 030L
SH48 030L
SH48 030L
SH48 030L
Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent (0° C Reference)
SH49 040L
SH49 040L
SH49 040L
SH49 040L
SH49 040L
Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent (0° C Reference)
SH50 055L
SH50 055L
SH50 055L
SH50 055L
SH50 055L
Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent (0° C Reference)
VX
VX VX
VX VX
1-1/2" body width, 124mm 1/4" VCR male
VS VS
VS VS
VS
1-1/8" body width, 124mm 1/4" VCR male
CX CX
CX CX
CX
1-1/8" body width, 92mm C Seal
DX
DX
DX
DX
DX
1-1/8" body width, 79.8mm C Seal
EX EX EX EX EX
1-1/2" body width, 79.8mm W Seal
WX
WX
WX
WX
WX
1-1/8" body width, 92mm W Seal
YX YX
YX YX
YX
1-1/8" body width, 79.8mm W Seal
AX AX
AX
AX AX
1-1/2" body width, 92mm C Seal
BX
BX BX
BX BX
1-1/2" body width, 92mm W Seal
LX LX LX LX LX
1-1/8" body width, 92mm C Seal w/Poke Yoke
AS AS AS AS AS
1-1/2" body width, 92mm 0.440" large bore C Seal (only for bins SH45-SH50)
A A A A A
Atmosphere
V V V V V
Vacuum; Default for SD, SL and HA special application
O O O O O
Default Sensor Orientation
Section 5 Product Description Code
Eq.; + 1.0% SP Accuracy; 1 sec Response; 10 Ra
2 2 2 2 2
Eq.; + 1.0% SP Accuracy; 700 msec Response; 4 Ra
2 2 2 2 2
Model Code continued on next page.
GF100 Series
Eq.; + 1.0% SP Accuracy;
2 2 2 2 2
5-1
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