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Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
1-1 Introduction
1-2 How to Use This Manual
Designed for semiconductor, MOCVD , and other gas flow control
applications that require a high purity all-metal flow path, the Brooks
GF100 Series mass flow controllers and meters deliver outstanding
performance, reliability, and flexibility. Process throughput and yield are
maximized while process costs are reduced by the GF100 Series featuring:
• Ultra fast settling time for quick start up and very rapid process steps
• MultiFlo™ gas and range configurability enabling reconfiguration without
removing device from the gas line
• An independent diagnostic/service port to troubleshoot or change flow
conditions without removing the mass flow controller from service
• Long-term stability due to extremely low wetted surface area, and
corrosion resistant Hastelloy
Optional model variations including—pressure transient insensitivity (PTI)
and Safe Delivery System (SDS)
Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital
This manual is intended to provide the user with all the information
necessary to install, operate, troubleshoot and maintain these thermal
mass flow devices. The manual is organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code
Appendix A GF100 Series Gas Table
Appendix B GF100 Series Patents
Appendix C Essential Instructions
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.
Section 1 Introduction
sensor and valve seat
®
GF100 Series
1-1
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