Contents
GF100 Series
Figure
Number
1-1
GF100 Series High Performance Gas Flow Controller Analog and Digital .................................... 1-1
1-2
LCD Display .................................................................................................................................. 1-7
1-3
Dimensions - GF100/GF120/GF125 Series ................................................................................. 1-15
1-4
Dimensions - GF135, DeviceNet .................................................................................................. 1-16
1-5
Dimensions - GF135, RS485 ....................................................................................................... 1-17
1-6
Dimensions - GF101/GF121/GF126 ............................................................................................ 1-18
1-8
Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications1-19
2-1
Typical Gas Supply Arrangement with Non-PTI MFC .................................................................... 2-4
2-2
Typical Gas Supply Arrangement with PTI MFC ........................................................................... 2-4
2-3
GF100 Series Mounting Attitude Positions .................................................................................... 2-5
2-4
GF100 Series Mounted to K1 Series Substrate Blocks ................................................................. 2-6
2-5
Mounting Screws Torque Pattern .................................................................................................. 2-6
2-6
Display with PSI Reading .............................................................................................................. 2-8
2-7
Display Reading Zero PSI ............................................................................................................. 2-8
2-8
Display Set to %FS ...................................................................................................................... 2-10
2-9
% Flow Display Set to Zero .......................................................................................................... 2-10
2-10
MultiFlo Cable Adapter ................................................................................................................. 2-11
2-11
USB-RS485 Converter (214F027AAA) ........................................................................................ 2-11
2-12
Diagnostic Port Locations ............................................................................................................ 2-11
2-13
GF100 Series DeviceNet Connection .......................................................................................... 2-12
2-14
GF100 Series with 9-Pin Analog Connector ................................................................................. 2-15
2-15
Analog 9-Pin Connector (M) ......................................................................................................... 2-15
2-16
GF100 with EtherCat Communications, M8 Power Connector Location ...................................... 2-14
2-17
M8 Power Connector Drawing ..................................................................................................... 2-14
2-18
GF100 Series Electrical Interface Options ................................................................................... 2-15
2-19
GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines ........................................... 2-16
3-1
GF100 Series Operating Principles ............................................................................................... 3-2
Table
Number
1-1
Industry Standard References ....................................................................................................... 1-3
1-2
Terms and Acronyms .................................................................................................................... 1-4
1-3
Specifications for Standard GF100/GF120/GF125 Series ............................................................. 1-9
1-4
Specifications for Safe Delivery System (SDS) GF120 Series ..................................................... 1-10
1-3
Specifications for GF100/GF120/GF125 Series with EtherCAT Communications ....................... 1-11
1-6
Specifications for GF135 Series ................................................................................................... 1-12
1-7
Specifications for GF101/GF121/GF126 Series ........................................................................... 1-13
1-8
Specifications for GF101/GF121/GF126 Series with EtherCAT Communications ....................... 1-14
2-1
K1 Series Fasteners ...................................................................................................................... 2-7
2-2
K1 Substrate Torque Data ............................................................................................................. 2-7
2-3
Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ................................................... 2-10
4-1
Environmental Factors .................................................................................................................. 4-3
4-2
GF100 Series Troubleshooting Guide ........................................................................................... 4-4
5-1
GF100, GF120 & GF125 Series Product Description Code .......................................................... 5-1
5-2
GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code ...... 5-3
5-3
Model GF135 Product Description Code....................................................................................... 5-4
5-4
GF101, GF121 & GF126 Series Product Description Code .......................................................... 5-5
5-5
GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ...... 5-6
A-1A
GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ...................................................... A-1
A-1B
GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 .................................................. A-2
A-1C
GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ................................................ A-2
B-1
GF100 Series Patents ................................................................................................................... B-1
ii
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
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