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Section 5 Product Description Code
GF100 Series
Table 5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code
Code Description
Code Description
Code Description
Code Description
Code Description
I. I. I. I. I.
Base Model Code
II. II. II. II. II.
Package / Finish Specifications
III.
III.
III.
III.
III.
Configurability
IV. IV.
IV.
IV.
IV.
Special Application
V. V. V. V. V.
Valve Configuration
VI.
VI. VI.
VI.
Gas or SH MultiFlo Bin
VI.
VII.
VII.
VII.
VII. Fitting
VII.
VIII.
VIII.
VIII. Downstream Condition
VIII.
VIII.
IX.
IX.
IX.
IX.
IX.
Sensor
X. X. X. X. X.
Connector
XI.
XI.
XI.
XI.
XI.
Customer Special Request
XII.
XII. Auto Shut-Off
XII.
XII.
XII.
XIII.
XIII.
XIII. Auto Zero
XIII.
XIII.
XIV.
XIV.
XIV. Reference Temperature
XIV.
XIV.
5-6
Code Option
Code Option
Code Option
Code Option
Code Option
Option Description
Option Description
Option Description
Option Description
Option Description
GF GF
GF GF
High Purity/Ultra High Purity Digital Mass Flow Controllers
GF
101
101
101
101
101
Flow range 55 - 300 slm N2 Equivalent.; 10 Ra HP wetted flow path
121
121
121
121
121
Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path
126
126
126
126
126
Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path & integrated pressure measurement
C C C C C
MultiFlo capable. Standard bins or specific gas/range may be selected
X X X X X
Not MultiFlo capable. Specific gas/range required
XX XX
XX XX
XX
Standard
C C C C C
Normally Closed valve
M M M M M
Meter (No Valve)
XXXX XXXX
XXXX XXXX
XXXX XXXX
Specific Gas Code & Range, i.e. "0004" = Argon and "010L" = 10 slpm
XXXX XXXX
XXXX XXXX
SH51 055L
SH51 055L
SH51 055L
SH51 055L
SH51 055L
Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)
SH52 100L
SH52 100L
SH52 100L
SH52 100L
SH52 100L
Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)
SH53 200L
SH53 200L
SH53 200L
SH53 200L
SH53 200L
Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)
SH54 300L
SH54 300L
SH54 300L
SH54 300L
SH54 300L
Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)
V1
V1
V1
V1
V1
1-1/2" body width, 134mm 1/2" VCR male
C1 C1
C1 C1
C1
1-1/2" body width, 92mm C Seal
C2
C2 C2
C2 C2
1-1/2" body width, 114mm C Seal
A A A A A
Atmosphere
V V V V V
Vacuum
O O O O O
Default Sensor Orientation
E0 E0 E0 E0 E0
EtherCAT Communication
XXXX
XXXX
XXXX
XXXX
XXXX
Customer Special Request (CSR) Number
A A A A A
Auto Shut-Off (Included)
X X X X X
Auto Shut-Off (Not Included)
X X X X X
Auto Zero (Not Included)
000
000
000
000
000
0
o o o o o
C Reference Calibration (Standard) - Default Setting
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
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