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GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions, im-
proper use by untrained persons, non-authorized interference
with the equipment or any action contrary to that provided for
by specific national standards.
The Turbo-V 1000 ICE E-series series pumps are turbo-
molecular pumps for high and ultra-high vacuum applications
particularly suitable for use in semiconductor industry sector
and can pump any type of gas or gas compound. They are not
suitable for pumping liquids or solid particles.
The pumping action is obtained through a high speed turbine
(max. 38000 rpm) driven by a high-performance 3-phase elec-
tric motor. The Turbo-V 1000 ICE-E series pumps are free of
contaminating agents and, therefore, are suitable for applica-
tions requiring a "clean" vacuum.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equip-
ment. Detailed information is supplied in the appendix "Techni-
cal Information".
This manual uses the following standard protocol:
! ! ! !
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not fol-
lowed correctly, could lead to serious injury.
! ! ! !
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
When transporting and storing the pumps, the following envi-
ronmental requirements should not be exceeded:
−
temperature: from -20N to +70 NC
−
relative humidity: 0 - 95% (non-condensing)
If the storage time is long start the pump using the SOFT
START mode (see control unit manual).
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this
shows signs of damage which may have occurred during
transport, contact your local sales office.
When unpacking the pump, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
! ! ! !
In order to prevent outgassing problems, do not use bare
hands to handle components which will be exposed to vacuum.
Always use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed
in the system, thus preventing any form of pollution by dust.
CAUTION
CAUTION
INSTALLATION
! ! ! !
Cause its weight, the pump must be handled by means of suit-
able moving and handling tools.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. Dur-
ing operation, the following environmental conditions must be
respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 NC to +35 NC
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information.
Do not remove the adhesive and protective cap before con-
necting the turbopump to the system.
23
INSTRUCTIONS FOR USE
WARNING!
! ! ! !
CAUTION!
87-900-942-01(A)
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