PCU LED
10. Monitoring
The different process parameters are recorded by means of the sensors used in the
PCU LED. These are shown in the final screen in the user level.
Explanation of the parametric representation in the final screen in the user level
Presentation Meaning
216
Sequence number (number of exposure jobs)
01/01/2000
Date
01:17:35
Time
040
LED – intensity of the upper panel in %
040
LED – intensity of the lower panel in %
0800
Exposure time [place 1 and 2: minutes; place 3 and 4: seconds]
1
Vacuum ON [1 – ON; 0 – OFF]
0
Nitrogen OFF [1 – ON; 0 – OFF]
Breakdown of the error codes in the final screen in the user level
Code
Status
00
Accurate work flow
01
Pump runs during the exposure process
02
Pump cannot draw any vacuum
03
Lid opened
04
No nitrogen flow
05
Run time of program = 0
06
LED error in program LEDTest
11. Troubleshooting plan
Code
Defect
Cause
00
Accurate work flow
Not applicable
01
Pump is running
Cover gasket of
during the exposure
exposure chamber
process
leaky
Hoses of the vacuum
system leaky
38
38
Background display
Green
Red
Red
Red
Red
Red
Red
Troubleshooting
Not applicable
Replacement
of the lid sealing
Replacement
of the hoses
Code
Defect
Cause
02
Pump cannot draw
Cover gasket for
any vacuum
exposure chamber
Cutout after 150
leaky
seconds
Hoses of the vacuum
system leaky
Vacuum pump
defective
03
Lid is opened
Lid not closed
LED do not work
Lid control (micro
switch) defective
LED defective
04
No nitrogen flow
Nitrogen valve at
the gas cylinder not
opened. Warning:
The device is only o
be operated with a
maximum pressure
of 5 bar (70 psi)
05
run time of
no run time of
program=0
program was set
06
LED error in
LED defective
program LEDTest
Further
Device does not
Network connection
show any function
not correct
Main switch off
Main switch
defective
Troubleshooting
Replacement
of the lid sealing
Replacement
of the hoses
Exchange of the
vacuum pump
Close lid
Exchange lid control
(micro switch)
Exchange
of the LED
Open nitrogen valve
gas cylinder not
opened.
set a run time > 0
LED has to be changed
by trained personnel
Control network
connection
Switch on
main switch
Exchange
main switch
39
39