Varian TriScroll 300 Série Manuel D'installation Et D'opération page 4

Technical Information ............................................... 33
Electrical Connections............................................ 36
Single Phase Motor Connection.......................... 36
Three Phase Motor Connection .......................... 37
Mechanical Connections........................................ 38
Pump Location ................................................... 38
Rotation of the Pump Inlet
with Respect to the Motor Frame ........................ 38
Pump Inlet.......................................................... 38
Pump Exhaust..................................................... 38
Optional Isolation Valve......................................... 38
Gas Ballast ............................................................. 39
Bearing Purge......................................................... 39
Purge Kit ................................................................ 39
Troubleshooting ..................................................... 40
Maintenance .......................................................... 41
General Information ........................................... 41
Related TriScroll Manuals................................... 41
Maintenance and Tooling Kits ............................ 41
Factory Service Options...................................... 42
Accessories......................................................... 42
Serial Numbers Notes......................................... 42
Contacting Varian Vacuum Technologies ........... 43
Request for Return Health and Safety Certification
iv
TriScroll 300 Series Vacuum Pump