With Standard Rack Controller; Connection A - High Vacuum Flange - Varian Turbo-V 81-T Notice De Mode D'emploi

With Standard Rack Controller

1. Turbo-V standard rack controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionization gauge
7. Fore-vacuum pump connecting flange
8. Oil mist elimin
ator
9. Fore-vacuum pump with internal one-way valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (opt
13. Turbopump
14. Flexible connection
ional)
62
TECHNICAL INFORMATION
Connection A - HIGH VACUUM
To connect the Turbo-V 81-T pump to the ISO inlet
flange, remove the outer ring
tering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat flange co nnections we recommend
using Varian hardware.
To facilitate assembly and dismantling
pro C-100 high temperature lubric
threads protruding from the flang
the nuts and flange.
Attach the units an d tighten each one in turn. Re-
peat the se quential tightening until the flange faces
meet.
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
FLANGE
and position the cen-
, apply Fel-
ant to the screw
e and between
CAUTION
87-900-984-01(B)