Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
1-1 How to Use This Manual
1-2 Description
1-3 Specifications for Meter/Controller
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 48xx
Series Products.
This manual is organized into the following sections:
Section 1.
Introduction
Section 2.
Installation
Section 3.
Operation
Section 4.
Maintenance and Troubleshooting
Section A.
Essential Instructions
Back Cover
Warranty, Local Sales/Service Contact Information
The Brooks 48xx Series Products are mass flow measurement devices
designed for accurately measuring (MFMs) and rapidly controlling (MFCs)
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
Model 4850 mass flow controller(MFC) and 4860 mass flow meter (MFM).
Do not operate on gases other than those listed in this
specification. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
Section 1 Introduction
Brooks
!
WARNING
®
48xx Series
1-1