Brooks Instrument 48 Serie Manuel D'installation Et D'utilisation page 27

Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
Figure 4-1 Bench Troubleshooting Circuit
4-2-4 Calibration Procedure
Section 4 Maintenance and Troubleshooting
The calibration of Brooks 48xx Series Mass Flow devices is not described
in this manual. Such calibration requires accurate and traceable calibration
equipment. To re-calibrate a device contact the Brooks factory.
®
Brooks 48xx Series
4-5