Brooks Instrument 48 Serie Manuel D'installation Et D'utilisation page 6

Contents
Brooks ® 48xx Series
Figures
Figure
Number
1-1 Dimensions for Model 4850/4860 with Standard Process Connections ..................................... 1-4
1-2 Dimensions for Model 4850/4860 with Downport Connections .................................................. 1-4
1-3 Dimensions for the 48xx Series Local Operator Interface (LOI) ................................................ 1-6
3-1 Gas Flow Across the MEMS Sensor .......................................................................................... 3-1
4-1 Bench Troubleshooting Circuit ................................................................................................... 4-5
Tables
Table
Number
1-1 48xx Series Specifications ......................................................................................................... 1-2
1-2 15-Pin D-Sub Connector Pin-out ................................................................................................ 1-5
4-1 Troubleshooting.......................................................................................................................... 4-2
ii
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B0072AG
October, 2017
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