Brooks Instrument 48 Serie Manuel D'installation Et D'utilisation page 18

Section 2 Installation
®
Brooks 48xx Series
2-6
h. Check the analog output signal. The output signal should match the
setpoint signal in accordance with the accuracy specifications provided
in Section 1 of this document.
i. If flow output signal does not match the setpoint, and pressure settings
are correct, this could indicate a problem in the MFC. A secondary issue
could be the gas type. When checking with a surrogate gas, ensure that
there is enough pressure to the MFC in order to flow the correct amount
of the surrogate gas.
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017