Publicité
Les langues disponibles
Les langues disponibles
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
2-9 Operation Check Procedure
Analog I/O Versions
• Signal Common
• Signal Output (Voltage or Current)
• Nominal +15 Vdc or +24 Vdc
• Setpoint Input (Voltage or Current)
• Setpoint Common
• Supply Common
• Chassis Ground (via unit body)
Refer to Table 1-1 for pin connections
Local Operator Interface (LOI) Versions
For description and specifications for the local operator interface refer to
Section 1-4 in this manual and the Brooks document
X-SE-4800-LOI-eng
a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately 15 minutes for
the instrument to completely warm up and stabilize its temperature.
c. Do NOT supply gas to the MFC/MFM. Ensure that the differential
pressure across the MFC/MFM is zero.
d. Apply a setpoint (MFC only) of:
0.000 Vdc ± 10 mV (0 - 5 Vdc setpoint)
4.000 mA ± 32 μA (4 - 20 mA setpoint)
e. If the zero exceeds one of these limits, follow the re-zeroing procedure
in Section 3. The analog output signal should be:
0.000 Vdc ± 10 mV (0 - 5 Vdc output)
4.000 mA ± 32 μA (4 - 20 mA output)
f. Turn on the gas supply. A positive flow signal may be present due to
slight valve leak-thru (MFC only).
g. Supply a setpoint signal between:
0 to 5 Vdc (0 - 5 Vdc setpoint)
4 to 20 mA (4 - 20 mA setpoint)
Section 2 Installation
®
Brooks
48xx Series
2-5
Publicité
