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Installation and Operation Manual
X-TMF-GF40-Series-MFC-eng
Part Number: 541B195AAG
October, 2017
®
Brooks
GF40 Series
TM
MultiFlo
Digital, Thermal Mass Flow Devices
Brooks
Capable, Elastomer Seal,
®
GF40 Series available with DeviceNet
Brooks
TM
®
, RS485, Profibus
or EtherCAT
®
GF40 Devices
®
I/O
Publicité
Manuels Connexes pour Brooks Instrument MultiFlo GF40 Serie
Sommaire des Matières pour Brooks Instrument MultiFlo GF40 Serie
- Page 1 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 ® Brooks GF40 Series MultiFlo Capable, Elastomer Seal, Digital, Thermal Mass Flow Devices ® ® ® Brooks GF40 Series available with DeviceNet , RS485, Profibus or EtherCAT...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 5 Contents Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Paragraph Page Number Number Section 1 Introduction Introduction ........................... 1-1 How to Use This Manual ....................... 1-1 Product Support References ......................1-2 Warning, Caution and Notice Statements ..................1-2 Product Warranty ..........................
- Page 6 Contents Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Appendix A: GF40 Series Gas Table .......................A-1 Appendix B: GF40 Series Patents ......................B-1 Appendix C: Essential Instructions ....................... C-1 Warranty, Local Sales/Service Contact Information ............... Back Cover Figure Page Number...
- Page 7 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 1-1 Introduction Based upon Brooks award-winning GF100 Series, the GF40 Series is a performance/value MFC platform designed for OEM applications, delivering the following class leading features: •...
- Page 8 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF40 Series. Those documents include: •...
- Page 9 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 1-7 Industry Standard References Refer to Table 1-1. 1-8 GF40 Devices Gas Table Refer to Appendix A. 1-9 Glossary of Terms and Acronyms Refer to Table 1-2 Table 1-1 Industry Standard References Reference Number...
- Page 10 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table 1-2 Terms and Acronyms Term or Acronym Definition Customer Special Requirement. Chemical Vapor Deposition. Digital Signal Processor. EPI Epitaxy (EPI). A process technology where a pure silicon crystalline structure is deposited or “grown”...
- Page 11 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 1-10 Description Control The GF40 Series brings together Brooks high-performance, patented ultra- fast T-rise flow sensor, high-speed ARM based digital architecture, and a fast-acting diaphragm-free solenoid valve to deliver: •...
- Page 12 641Z117AAA Power Supply 24 Vdc with DB-15 female 124Z171AAA Cable, Power, DeviceNet to DB-15 male * MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo www.BrooksInstrument.com/Documentation&Downloads Advanced Thermal Measurement Sensor Brooks high-performance thermal flow sensor brings together key design...
- Page 13 Brooks Instruments' DeviceNet profile has been certified by the ODVA (Open DeviceNet Vendor's Association). Brooks Instrument Profibus interface has been certified by the PNO (Profibus User Organization). The Brooks Instrument EtherCAT interface has been successfully tested by the EtherCAT Conformance Test application version 1.20.30.0.
- Page 14 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table 1-3 Specifications for Standard GF40 Series GF40 GF40 GF40 GF40 GF40 Performance Performance Performance Performance Performance Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N...
- Page 15 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table 1-4 GF40 Series Electrical Specifications Communication Protocol Communication Protocol Communication Protocol Communication Protocol Communication Protocol RS485* RS485* RS485* Profibus Profibus Profibus ® ® ® ® ® DeviceNet DeviceNet DeviceNet...
- Page 16 Section 1 Introduction Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Figure 1-2 Dimensions - GF40 Series 1-10...
- Page 17 If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters...
- Page 18 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 2-5 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit.
- Page 19 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 The GF40 Series also utilizes MultiFlo ® technology that allows the user to configure standard configurations ("SAs") or "blanks" for a variety of pure ®...
- Page 20 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 2-11 Purge the Gas Supply Line Before GF40 Series Installation Before operating the GF40 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen.
- Page 21 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 100-120 cycles. 2-12 Position and Mount the GF40 Series It is recommended that the MFC is re-zeroed with process gas following the recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for futher information).
- Page 22 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 GF40 Series (i.e., provide a zero setpoint) for a time period of twice the vacuum purge time. 3. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the downstream shut-off valve (7).
- Page 23 Connect the USB end of the converter to the USB Port of a laptop or PC. The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo. Please reference the MultiFlo Configurator Quick Start Guide for installation and operation details.
- Page 24 Figure 2-3 MultiFlo Cable Adaptor Table 2-1 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent from the Brooks Instrument website www.BrooksInstrument.com/MultiFlo. Install the MultiFlo Configurator as described in the MultiFlo Configurator Quick Start Guide and use the guide as a reference for operation details.
- Page 25 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Diagnostic Port Figure 2-5 Diagnostic Port 2-19 Electrical Connections 2-19-1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave.
- Page 26 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 2-19-2 Analog/RS485 Connections The GF40 Series devices are available with the Analog/RS485 15-Pin D- Connector shown in Figure 2-7. It is recommended that when using -15 Vdc & 0, the wiring hook-up should be: -15V is connected to Pin 9 (POWER COMMON) and 0 is connected to Pin 5 (POWER SUPPLY(+12 to +24 VDC)).
- Page 27 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 2-19-3 Profibus Connections The GF40 Series devices are available with the Profibus connections as shown in Figure 2-8. Profibus Connectors Figure 2-8 GF40 Series Profibus Connections and Pinouts 2-19-4 EtherCAT Connections The GF40 Series devices are available with the EtherCAT connections as shown in Figure 2-9.
- Page 28 Section 2 Installation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 2-19-5 Alarm Output (Analog I/O versions only) The Alarm Output is an open collector or "contact" type that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicaqte any one of various conditions.
- Page 29 Section 3 Operation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 3-1 General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge.
- Page 30 Section 3 Operation Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 Figure 3-1 GF40 Series Operating Principles...
- Page 31 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 4-1 Overview No routine maintenance is required on the Brooks GF40 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.
- Page 32 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a GF40 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions.
- Page 33 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 4-4 Troubleshooting Checklist 1. Check environmental factors that could affect changes to GF40 Series performance. The most common environmental factors are listed in Table 4-1.
- Page 34 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 4-5 GF40 Series Troubleshooting Guide Table 4-2 GF40 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No gas flow. Is the gas supply turned on? Check shut-off valve and pressure readout.
- Page 35 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table 4-2 GF40 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 2. Flow out of range (Continuted). Is the device zero correct? Zero the device according to zeroing procedure in Section 2-16.
- Page 36 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 Table 4-2 GF40 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 5. No gas flow below some setpoint. NOTE: When the setpoint is decreased below this point, the GF40 Series signal remains at...
- Page 37 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table 4-2 GF40 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 7. OEM tool does not read correct GF40 Series zero reading.
- Page 38 Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 39 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 5 Product Description Code Table 5-1 GF40 Series Product Description Code Table Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option...
- Page 40 Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 41 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 A GF40/GF80 Series Gas Table Table A-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42...
- Page 42 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 Table A-2 GF40 Series Gas Table - Codes 1-102, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50...
- Page 43 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table A-3 GF40 Series Gas Table - Codes 104-636, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44...
- Page 44 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 Table A-4 GF40 Series Gas Table - Codes 104-636, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50...
- Page 45 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table A-5 GF40 Series Gas Table - Codes 640-948, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44...
- Page 46 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 Table A-6 GF40 Series Gas Table - Codes 640-948, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50...
- Page 47 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 Table A-7 GF40 Series Gas Table - Codes 949-5022, Bins SA40 to SA44 Min inlet pressure for vac. SA40 SA41 SA42 SA43 SA44...
- Page 48 Appendix A: GF40 Series Gas Table Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 Table A-8 GF40 Series Gas Table - Codes 949-5022, Bins SA45 to SA50 Min inlet pressure for vac. SA45 SA46 SA47 SA48 SA50...
- Page 49 Appendix B: GF40 Series Patents Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 B GF40 Series Patents The GF40 Series may be protected by the following US patents and their international filings. Table B-1 GF40 Series Patents Patent/Pub.
- Page 50 Appendix B: GF40 Series Patents Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG Brooks ® GF40 Devices October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 51 Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG October, 2017 ® Brooks GF40 Devices Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED).
- Page 52 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 53 Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG October, 2017 ® Brooks GF40 Devices Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Page 54 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 55 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 56 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Page 57 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 58 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Page 59 Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG October, 2017 ® Brooks GF40 Devices Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Page 60 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 61 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 62 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 63 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 64 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 65 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 66 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 67 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 68 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 69 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 70 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 71 Installation and Operation Manual X-TMF-GF40-Series-MFC-eng Part Number: 541B195AAG ® Brooks GF40 Devices October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 72 Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.