Contents
16 Instructions for Use
17 Technical Information
12/304
Safety Guideline for Turbomolecular Pumps 226
General Information 227
Storage
229
Preparation for installation 230
Installation 232
Pump Fixing 234
Use of TwisTorr 304 FS 235
Maintenance
237
Disposal
238
Description of the TwisTorr 304 FS
Technical Specification 248
TwisTorr 304 FS Outline 251
Interconnections
Soft Start
272
Inlet screen installation 273
Air Cooling Kit Installation
Water Cooling Kit Connection
Vent Accessories
Vibration Isolator Installation 285
Purge Valve Installation 286
225
239
241
270
276
278
281
TwisTorr 304 FS User Manual / 87-901-027-01(B)