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Manuels Connexes pour Varian 919-0520
Sommaire des Matières pour Varian 919-0520
- Page 1 MANUALE DI ISTRUZIONI 2 l/s Ion Pump BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 919-0520 (GB) INSTRUCTION MANUAL Model 919-0521 Model 919-0522 Model 919-0523 Model 919-0524 Magnet 919-0038 87-900-091-01(B) APRIL 2006...
- Page 2 2 l/s Ion Pump...
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Page 5: Table Des Matières
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCTIONS FOR USE....................7 TECHNICAL INFORMATION ....................9 DESCRIPTION OF THE PUMP.....................9 OPERATING NOTES........................10 TECHNICAL SPECIFICATION ....................10 OUTLINE DRAWING ........................11 INSTALLATION..........................12 Pump Assembling ......................12 Pump Installation .......................13 CONTROL UNIT CONNECTION....................13 BAKEOUT ............................13 UNUSUAL OPERATING CONDITIONS ..................14 PUMP TROUBLESHOOTING .....................14... -
Page 6: Informazioni Generali
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritie- ne sollevata da eventuali responsabilità dovute all'inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche. -
Page 7: Procedure Di Uso
Il rispetto delle normative di sicurezza nell’uso delle pompe è 2. Collegare l’unità di controllo ad una apposita fonte di ali- garantito solo con l’uso delle unità di controllo e dei cavi Varian. mentazione ed accenderla. 3. Se l’avvio è avvenuto ad una pressione superiore a 1x10 mbar, il MicroVac indicherà... -
Page 8: Allgemeine Hinweise
ALLGEMEINE HINWEISE Dieses Gerät ist für den professionellen Gebrauch bestimmt. Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Varian mitgelieferten Zusatzdokumentationen genau lesen. Bei vollständiger bzw. teilweiser Nichtbeachtung der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mi- ßachtung der nationalen Bestimmungen übernimmt Firma Vari-... -
Page 9: Entsorgung
Der Durchgangsisolator für den Anschluß des Hochspannungs- Wenn die Pumpe zur Förderung von giftigen, leicht entflamm- kabels ist für den Gebrauch des Kabels Varian P/N 929-0706 baren oder radioaktiven Gasen benutzt wird, sind die für das in Verbindung mit der Kontrolleinheit Varian MicroVac P/N 929- jeweilige Gas vorgeschriebenen Vorgänge zu befolgen. -
Page 10: Indications Générales
Il est conseillé à l’utilisateur de lire attentivement cette notice d’instructions ainsi que toute autre indication sup- plémentaire fournie par Varian avant d’utiliser l’appareil. Varian décline toute responsabilité en cas de non respect total ou par- tiel des instructions fournies, d’opérations non autorisées, d’utilisation impropre par du personnel non formé... -
Page 11: Procédure D'utilisation
Dès que conçu pour l'utilisation du câble Varian P/N 929-0706 accouplé la pression diminue, la tension remonte et la soupape de à l'unité de contrôle Varian Micro Vac P/N 929-0200 ou P/N pré-vide doit être refermée. 929-0201. -
Page 12: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. -
Page 13: Operating Procedure
INSTRUCTIONS FOR USE The pump operation is optimized using the special Varian Mi- Operating procedure croVac controller only. Refer to the MicroVac control unit instruction manual and follow the procedure below when operating the pump: CAUTION 1. With a clean roughing pump, establish a roughing pressure... -
Page 14: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE PUMP NOTE The Varian VacIon 2 l/s pumps are ion pumps and The part numbers in the table are relevant to the are available in the following versions: pump without the magnet. The magnet part numbers is 919-0038. -
Page 15: Operating Notes
TECHNICAL INFORMATION OPERATING NOTES TECHNICAL SPECIFICATION VacIon pumps operate as a single-cell Penning The following table details the main technical discharge. A potential of about 3 kV is applied to specifications of the 2 l/s Ion Pump. the anode cell; the cathodes are at ground potential. -
Page 16: Outline Drawing
TECHNICAL INFORMATION OUTLINE DRAWING The following figure shows the outline drawing for the 2 l/s pump and the magnet (all dimensions are in inches [mm]). Model 919-0520 Model 919-0521 Model 919-0522 Model 919-0523 87-900-091-01(B) -
Page 17: Installation
TECHNICAL INFORMATION Model 919-0524 Magnet model 919-0038 INSTALLATION Pump Assembling Before installing the pump into the system, the pump must be assembled. To assemble the pump proceed as follows (see the following figure): 1. Remove the pump parts from the packaging. 2. -
Page 18: Pump Installation
TECHNICAL INFORMATION Connect the control unit to the ion pump with the Pump Installation coaxial high voltage cable assembly as follows: To install the pump into the system proceed as follows: 1. Push the female end of the cable connector over the high voltage feedthrough. -
Page 19: Unusual Operating Conditions
929-0706 13' (4 m) long with safety interlock Control Unit MicroVac 120 Vac input 929-0200 MicroVac 220 Vac input 929-0201 For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Catalogue. 87-900-091-01(B) -
Page 20: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 21 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 22 Toll Free # 1 (800) 882 7426 Tel: 00 800 234 234 00 vtt.technical.support@varianinc.com China Mexico Varian Technologies - Beijing Varian, S. de R.L. de C.V. Rm 1648 Central Tower South Wing Concepcion Beistegui No 109 China Beijing Junefield Plaza Col Del Valle No.