Publicité
Installation and Operation Manual
X-TMF-GF40-Series-MFC-eng
Part Number: 541B195AAG
October, 2017
Table A-7 GF40 Series Gas Table - Codes 949-5022, Bins SA40 to SA44
Gas
Gas Symbol
Code
949 2%F2/Ne
950 10%H2/He
951 7%AsH3/H2
953 15%H2/B2H6
954 14%SiH2Cl2/20%SiH4/33%HCl/N2 14%Dichlorosilane/20%Silane/33%
958 17%CH4/CO2
962 20%CH6Si/H2
963 20%F2/N2
965 50%CH3SiHCl2/H2
976 4%CH4/Ar
977 4%He/H2
978 20%GeH4/H2
979 0.5%B2H6/He
980 20%F2/Ar
982 5%HF/N2
983 3%H2S/CO
984 1.4%C2H2/Ar
985 2%Ge2H6/H2
986 38%SiCl4/O2
987 20%H2S/20%CO2/N2
988 20%SiH2Cl2/H2
989 0.1%Cl2/N2
990 1%HCl/N2
991 3%BCl3/N2
992 18%NO/N2
993 9%NO/41%N2/H2
994 20%H2/Ar
996 25%H2S/Ar
997 25%H2Se/Ar
998 50%NH3/He
999 40%CO/45%C2H4/Ar
999 40%CO/45%C2H4/Ar
1000 0.9%SiH4/N2
1001 5%Ar/N2
1002 25%PH3/N2
1003 5%C4H6-e)/He
1004 10%Cl2/N2
1005 15%Xe/H2
5022 COS-Special
For reference only, consult factory on the latest tables.
Min inlet pressure for vac.
Gas Name
SA40-SA47
2%Fluorine/Neon
19.7
10%Hydrogen/Helium
19.7
7%Arsine/Hydrogen
19.7
15%Hydrogen/Diborane
19.7
14.7
17%Methane/Carbon Dioxide
24.7
20%Methylsilane (MONO)/Hydroge
14.7
20%Fluorine/Nitrogen
24.7
50%Dichloromethylsilane/Hydroge
11.7
4%Methane/Argon
19.7
4%helium/Hydrogen
14.7
20%Germane/Hydrogen
19.7
0.5%Diborane/Helium
14.7
20%Fluorine/Argon
24.7
5%Hydrogen Fluoride/Nitrogen
24.7
3%Hydrogen Sulfide/Carbon Mono
24.7
1.4%Acetylene/Argon
24.7
2%Digermane/Hydrogen
24.7
38%Silicon Tetrachloride/Oxygen
24.7
20%Hydrogen Sulfide/20%Carbon
24.7
20%Dichlorosilane/Hydrogen
24.7
0.1%Chlorine/Nitrogen
24.7
1%Hydrogen Chloride/Nitrogen
24.7
3%Boron Trichloride/Nitrogen
24.7
18%Nitric Oxide/Nitrogen
24.7
9%Nitric Oxide/41%Nitrogen/H2
24.7
20%Hydrogen/Argon
24.7
25%Hydrogen Sulfide/Argon
31.7
25%Hydrogen Selenide/Argon
34.7
50%Ammonia/Helium
14.7
40%Carbon Monoxide/45%Ethylen
40%Carbon Monoxide/45%Ethylen
24.7
24.7
0.9%Silane/Nitrogen
19.7
5%Argon/Nitrogen
19.7
25%Phosphine/Nirtogen
19.7
5%Butadiene/Helium
14.7
10%Chlorine/Nitrogen
24.7
15%Xenon/Hydrogen
24.7
Carbonyl Sulfide (Special)
24.7
Appendix A: GF40 Series Gas Table
SA40
SA41
exhaust (PSIA)
SA48
SA50
Low High Low High Low High Low High Low
19.7
4
14
15
19.7
4
13
14
19.7
3
10
11
19.7
3
4
5
19.7
3
7
8
29.7
3
7
8
19.7
3
7
8
29.7
3
10
11
13.7
3
4
5
24.7
4
13
14
19.7
3
10
11
24.7
3
8
9
19.7
5
14
15
29.7
4
13
14
29.7
3
10
11
29.7
3
10
11
29.7
5
14
15
29.7
3
10
11
29.7
3
5
6
29.7
3
9
10
29.7
3
8
9
29.7
3
10
11
29.7
3
10
11
29.7
3
9
10
29.7
3
10
11
29.7
3
10
11
29.7
4
13
14
37.7
59.7
4
12
13
39.7
64.7
4
12
13
24.7
34.7
3
10
11
29.7
29.7
39.7
39.7
3
3
8
8
9
9
24.7
24.7
3
10
11
24.7
24.7
4
10
11
24.7
24.7
3
9
10
19.7
4
12
13
29.7
3
10
11
29.7
4
10
11
29.7
3
6
7
®
Brooks
GF40 Devices
SA42
SA43
SA44
High
42
43
130
131
400
401 1200
40
41
125
126
373
374 1145
30
31
92
93
280
281
860
14
15
42
43
130
131
400
23
24
71
72
212
213
670
23
24
70
71
210
211
650
23
24
71
72
212
213
660
30
31
92
93
280
281
860
14
15
42
43
130
131
400
41
42
125
126
390
391 1200
30
31
94
95
280
281
880
26
27
81
82
241
242
750
42
43
130
131
400
401 1200
39
40
120
121
360
361 1100
30
31
92
93
280
281
860
30
31
92
93
280
281
860
42
43
130
131
390
391 1200
30
31
92
93
280
281
860
16
17
50
51
150
151
460
27
28
85
86
252
253
790
24
25
74
75
222
223
700
30
31
94
95
280
281
880
30
31
94
95
280
281
880
29
30
91
92
270
271
850
30
31
94
95
280
281
880
30
31
94
95
281
282
880
40
41
120
121
370
371 1120
37
38
111
112
340
341 1040
36
37
110
111
340
341 1030
30
31
94
95
280
281
880
24
24
25
25
75
75
76
76
230
230
231
231
700
700
30
31
94
95
280
281
880
31
32
96
97
290
291
890
28
29
86
87
260
261
810
36
37
110
111
336
337 1032
29
30
90
91
275
276
844
32
33
97
98
294
295
903
20
21
60
61
183
184
562
Doc# 990-100-0087 RevF • Ref. Temp. 0.0°C
A-7
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