Publicité
Installation and Operation Manual
X-TMF-GF40-Series-MFC-eng
Part Number: 541B195AAG
October, 2017
A GF40/GF80 Series Gas Table
Table A-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44
Gas
Gas Symbol
Code
1 He
2 Ne
4 Ar
5 Kr
6 Xe
7 H2
8 Air
9 CO
10 HBr
11 HCl
12 HF
13 N2
14 D2
15 O2
16 NO
17 HI
18 F2
19 Cl2
22 H2S
23 H2Se
25 CO2
27 N2O
28 CH4
29 NH3
30 O3
31 PH3
32 SO2
33 CH3F
34 COS
35 AsH3
36 CH3Cl
37 ClCN
38 C2H4
38 C2H4
39 SiH4
42 C2H2
43 GeH4
44 CH3Br
45 C2H4O
46 COF2
47 CH3SH
48 BF3
49 CHF3
51 C2H3F
52 CH5N
53 NF3
54 C2H6
57 CHClF2
58 B2H6
60 COCl2
61 C3H6-a)
62 PF3
63 CF4
67 SiH2Cl2
69 C3H6-b)
70 BCl3
72 ClO3F
73 C2H6O
74 CClF3
77 ClF3
79 BBr3
80 CBrF3
84 CCl2F2
85 C2H7N
88 SiF4
89 C3H8
94 C2F4
97 Si2H6
98 C4H8-j)
99 GeF4
100 C4H6-e)
102 POCl3
For reference only, consult factory on the latest tables.
Min inlet pressure for vac.
Gas Name
SA40-SA47
Helium
19.7
Neon
24.7
Argon
24.7
Krypton
29.7
Xenon
24.7
Hydrogen
14.7
Air
24.7
Carbon Monoxide
24.7
Hydrogen Bromide
24.7
Hydrogen Chloride
24.7
Hydrogen Fluoride
14.7
Nitrogen
24.7
Deuterium
14.7
Oxygen
24.7
Nitric Oxide
24.7
Hydrogen Iodide
24.7
Fluorine
24.7
Chlorine
24.7
Hydrogen Sulfide
24.7
Hydrogen Selenide
24.7
Carbon Dioxide
24.7
Nitrous Oxide
24.7
Methane
24.7
Ammonia
24.7
Ozone
24.7
Phosphine
19.7
Sulfur Dioxide
19.7
Methyl Fluoride
24.7
Carbonyl Sulfide
24.7
Arsine
24.7
Methyl Chloride
24.7
Cyanogen Chloride
14.7
Ethylene
Ethylene
24.7
24 7
Silane
24.7
Acetylene
16.7
Germane
24.7
Methyl Bromide
19.7
Ethylene Oxide
14.7
Carbonyl Fluoride
19.7
Methyl Mercaptan
24.7
Boron Trifluoride
19.7
Fluoroform (Freon-23)
24.7
Vinyl Fluoride
24.7
Methylamine
24.7
Nitrogen Trifluoride
24.7
Ethane
24.7
Chlorodifluoromethane (Freon-22)
24.7
Diborane
19.7
Phosgene
12.7
Cyclopropane
24.7
Phosphorus Trifluoride
19.7
Carbon Tetrafluoride (Freon-14)
24.7
Dichlorosilane
14.7
Propylene
19.7
Boron Trichloride
11.7
Perchloryl Fluoride
14.7
Dimethylether
14.7
Chlorotrifluoromethane (Freon-13)
24.7
Chlorine Trifluoride
14.7
Boron Tribromide
24.7
Bromotrifluoromethane (Freon-13B
24.7
Dichlorodifluoromethane (Freon-12
24.7
Dimethylamine
9.7
Silicon Tetrafluoride
19.7
Propane
9.7
Tetrafluoroethylene
19.7
DISILANE
19.7
Transbutene
19.7
Germanium Tetrafluoride
20.7
Butadiene
19.7
Phosphorus Oxychloride
9.7
Appendix A: GF40 Series Gas Table
SA40
SA41
exhaust (PSIA)
SA48
SA50
Low High Low High Low High Low High Low
24.7
29.7
5
14
15
5
14
15
29.7
29.7
5
14
15
4
11
12
3
6
7
14.7
29.7
3
10
11
29.7
29.7
3
10
11
29.7
3
10
11
3
8
9
29.7
32.7
3
10
11
17.7
3
10
11
29.7
29.7
3
10
11
14.7
3
10
11
29.7
29.7
3
10
11
29.7
39.7
3
10
11
29.7
3
5
6
29.7
3
9
10
29.7
3
6
7
29.7
3
8
9
29.7
3
7
8
29.7
29.7
3
7
8
29.7
29.7
3
7
8
24.7
29.7
3
7
8
24.7
29.7
3
8
9
29.7
29.7
3
8
9
24.7
3
7
8
24.7
3
5
6
29.7
3
7
8
29.7
3
6
7
29.7
3
6
7
29.7
26.7
3
6
7
21.7
3
5
6
29.7
29 7
3
3
6
6
7
7
29.7
3
6
7
19.7
3
6
7
29.7
3
5
6
24.7
3
3
4
19.7
3
5
6
19.7
3
5
6
29.7
3
4
5
24.7
3
5
6
24.7
26.7
3
5
6
29.7
34.7
3
6
7
29.7
32.7
3
4
5
29.7
34.7
3
5
6
29.7
26.7
3
5
6
29.7
3
4
5
19.7
3
4
5
14.7
3
3
4
29.7
3
4
5
24.7
3
4
5
24.7
29.7
3
4
5
19.7
3
3
4
19.7
3
4
5
14.7
3
3
4
20.7
3
4
5
19.7
3
3
4
29.7
3
4
5
20.7
3
3
4
29.7
29.7
3
4
5
29.7
3
3
4
29.7
3
3
4
14.7
3
3
4
24.7
3
3
4
11.7
3
3
4
19.7
3
3
4
19.7
3
3
4
19.7
3
3
4
24.7
3
3
4
19.7
3
3
4
9.7
9.7
3
®
Brooks
GF40 Devices
SA42
SA43
SA44
High
42
43
128
129
400
401 1194
42
43
129
130
400
401 1207
42
43
130
131
400
401 1214
32
33
100
101
302
303
930
19
20
58
59
178
179
546
30
31
92
93
280
281
860
30
31
92
93
280
281
860
30
31
92
93
280
281
860
25
26
77
78
235
236
723
30
31
92
93
280
281
860
30
31
94
95
281
282
880
30
31
92
93
280
281
860
30
31
94
95
280
281
880
30
31
92
93
280
281
860
30
31
92
93
280
281
860
15
16
46
47
141
142
432
27
28
83
84
254
255
780
19
20
57
58
173
174
531
25
26
76
77
232
233
713
22
23
66
67
202
203
620
22
23
69
70
209
210
642
21
22
65
66
200
201
611
23
24
71
72
215
216
660
24
25
73
74
223
224
685
26
27
82
83
250
251
770
22
23
67
68
205
206
629
17
18
52
53
157
158
482
22
23
67
68
204
205
625
20
21
60
61
183
184
562
18
19
56
57
171
172
524
20
21
60
61
180
181
560
15
16
46
47
142
143
435
18
18
19
19
56
56
57
57
170
170
171
171
523
523
18
19
56
57
170
171
523
18
19
57
58
170
171
530
17
18
53
54
161
162
495
11
12
35
36
108
109
332
15
16
46
47
140
141
430
17
18
53
54
160
161
500
14
15
44
45
132
133
410
16
17
50
51
150
151
457
15
16
48
49
145
146
445
18
19
56
57
170
171
520
14
15
44
45
133
134
410
15
16
46
47
140
141
430
16
17
50
51
153
154
469
12
13
36
37
112
113
345
12
13
38
39
116
117
358
11
12
35
36
106
107
325
14
15
44
45
133
134
410
14
15
42
43
129
130
400
13
14
40
41
121
122
372
10
11
29
30
89
90
273
12
13
36
37
110
111
338
10
11
31
32
94
95
289
12
13
38
39
114
115
350
11
12
36
37
110
111
340
12
13
39
40
120
121
360
11
12
35
36
107
108
327
12
13
37
38
115
116
352
10
11
32
33
100
101
300
9
10
30
31
91
92
282
11
12
34
35
101
102
310
11
12
34
35
103
104
316
10
11
32
33
100
101
300
10
11
31
32
100
101
300
10
11
30
31
92
93
282
9
10
27
28
83
84
250
10
11
30
31
92
93
282
10
11
30
31
92
93
280
4
5
14
15
45
46
139
Doc# 990-100-0087 RevF • Ref. Temp. 0.0°C
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