Brooks Instrument MultiFlo GF40 Serie Mode D'emploi page 44

Appendix A: GF40 Series Gas Table
Brooks ® GF40 Devices
Table A-4 GF40 Series Gas Table - Codes 104-636, Bins SA45 to SA50
Gas
Gas Symbol
Code
104 C4H8-i)
106 C4H8-h)
107 C4H8-g)
108 SiCl4
109 C3H9N
110 SF6
111 C4H10-d)
113 GeCl4
117 C4H10-c)
118 C2F6
119 C2ClF5
121 WF6
122 C5H12
128 C3F8
129 C4F8
138 C3F6
155 C2HF5
156 C2H2F4
160 CH2F2
185 CH6Si
190 (CH3)3SiH
193 PCl3
241 C4F10
249 B2F4
266 C5F8
270 C4F6
297 C4F6-q)
354 C5F8O
360 CF3I
368 Si3H9N
371 C4H11N
385 C3H2F4
500 15%PH3/N2 500 15%PH3/N2
501 5%PH3/N2
502 20%SiH4/N2
509 10%GeH4/H2
516 10%PH3/H2
517 25%PH3/SiH4
527 10%PH3/N2
528 4.5%PH3/N2
529 20%SiH4/He
532 10%H2/N2
535 4%PH3/N2
536 20%O2/He
537 1%PH3/Ar
538 10%PH3/Ar
542 5%H2/N2
544 2%SiH4/H2
546 1%PH3/He
549 .5%B2H6/Ar
550 .5%PH3/N2
557 1%B2H6/H2
559 1%BCl3/H2
560 1%BCl3/N2
563 1%PH3/H2
565 10%SiH4/Ar
584 15%PH3/SiH4
589 2%SiH4/He
595 3%B2H6/N2
597 3%H2/N2
603 30%He/O2
604 30%O2/He
605 4%B2H6/N2
606 4%H2/He
607 4%H2/N2
615 5%B2H6/Ar
626 5%PH3/Ar
627 5%PH3/SiH4
628 5%SiH2Cl2/Ar
632 50%PH3/SiH4
636 8%PH3/SiH4
For reference only, consult factory on the latest tables.
A-4
Min inlet pressure for vac.
Gas Name
SA40-SA47
Butene 19.7
Isobutylene 19.7
Cisbutene 19.7
Silicon Tetrachloride 8.7
Trimethylamine 6.7
Sulfur Hexafluoride 19.7
Isobutane 19.7
Germanium Tetrachloride 19.7
Butane 19.7
Hexafluoroethane (Freon-116) 19.7
Chloropentafluoroethane (Freon-1 24.7
Tungsten Hexafluoride 9.7
Dimethylpropane 24.7
Perfluoropropane 19.7
Octafluorocyclobutane 19.7
Hexafluoropropylene 19.7
PENTAFLUOROETHANE (FREON 19.7
Tetrafluoroethane (Freon-134a) 24.7
Difluoromethane 24.7
Methylsilane (MONO) 9.7
Trimethylsilane (TMSi) 6.7
Phosphorus Trichloride
Perfluorobutane 14.7
Difluroborane 14.7
Octafluorocyclopentene 9.7
Hexafluoro-2-butyne 9.7
Hexafluoro Butadiene-1-3 14.7
Epoxyperfluorocyclopentene 19.7
trifluoroiodo-Methane 14.7
Trisilylamine (TSA) 6.0
Dimethylethylamine 8.7
2,3,3,3-tetrafluoro-1-Propene 14.7
15%Phosphine/Nitrogen 15%Phosphine/Nitrogen 24.7 24 7
5%Phosphine/Nitrogen 24.7
20%Silane/Nitrogen 20.7
10%Germane/Hydrogen 20.7
10%Phosphine/Hydrogen 14.7
25%Phosphine/Silane 14.7
10%Phosphine/Nitrogen 19.7
4.5%Phosphine/Nitrogen 20.7
20%Silane/Helium 20.7
10%Hydrogen/Nitrogen 20.7
4%Phosphine/Nitrogen 20.7
20%Oxygen/Helium 19.7
1%Phosphine/Argon 24.7
10%Phosphine/Argon 24.7
5%Hydrogen/Nitrogen 24.7
2%Silane/Hydrogen 24.7
1%Phosphine/Helium 24.7
.5%Diborane/Argon 24.7
.5%Phosphine/Nitrogen 24.7
1%Diborane Hydrogen 24.7
1%Boron Trichloride/Hydrogen 24.7
1%Boron Trichloride/Nitrogen 24.7
1%Phosphine/Hydrogen 19.7
10%Silane/Argon 24.7
15%Phosphine/Silane 19.7
2%Silane/Helium 19.7
3%Diborane/Nitrogen 20.7
3%Hydrogen/Nitrogen 24.7
30%Helium/Oxygen 24.7
30%Oxygen/Helium 19.7
4%Diborane/Nitrogen 19.7
4%Hydrogen/Helium 19.7
4%Hydrogen/Nitrogen 24.7
5%Diborane/Argon 24.7
5%Phosphine/Argon 27.7
5%Phosphine/Silane 14.7
5%Dichlorosilane/Argon 24.7
50%Phosphine/Silane 16.7
8%Phosphine/Silane 16.7
SA45
exhaust (PSIA)
SA48 SA50 Low High Low
19.7 160 480
19.7 261 800
19.7 261 790
173 520
8.7 241 720
19.7 29.7 238 715
19.7 29.7 217 653
24.7 24.7 262 810
19.7 29.7 235 706
19.7 219 658
29.7 211 640
11.7 151 452
29.7 185 570
19.7 155 465
19.7 155 465
19.7 185 556
19.7 236 711
29.7 261 800
29.7 534 1612 1613
14.7 341 1050 1051
190 572
19.7 121 370
19.7 19.7 301 920
14.7 135 406
177 533
14.7 161 500
19.7 123 369
14.7 202 609
7.2 182 560
8.7 191 580
14.7 218 656
29 7 29.7 841 2500 2501 841 2500 2501
29.7 871 2600 2601
25.7 44.7 781 2310 2311
20.7 801 2400 2401
14.7 814 2500 2501
29.7 561 1700 1701
24.7 851 2510 2511
29.7 881 2600 2601
29.7 1001 3000 3001
29.7 881 2610 2611
29.7 871 2600 2601
29.7 1103 3331 3332 10000 10001 21000 21001 48000
29.7 1201 3700 3701
29.7 1111 3400 3401
29.7 861 2600 2601
29.7 871 2600 2601
29.7 1201 3700 3701 11000 11001 23000 23001 55000
29.7 1201 3700 3701
29.7 881 2600 2601
29.7 851 2510 2511
29.7 871 2600 2601
29.7 871 2600 2601
19.7 851 2531 2532
29.7 1101 3300 3301
19.7 551 1630 1631
19.7 1201 3600 3601 10700 10701 22300 22301 54000
29.7 851 2500 2501
29.7 861 2600 2601
29.7 951 2800 2801
29.7 1061 3203 3204 10000 10001 20000 20001 45000
29.7 831 2500 2501
19.7 1201 3600 3601 11000 11001 22300 22301 55000
29.7 861 2600 2601
1085 3278 3279
32.7 1171 3600 3601
19.7 19.7 541 1600 1601
29.7 1101 3300 3301
24.7 581 1730 1731
24.7 541 1610 1611
Installation and Operation Manual
X-TMF-GF40-Series-MFC-eng
Part Number: 541B195AAG
October, 2017
SA46 SA47 SA48
High Low High Low High
481 1400 1401 2920 2921 6480
801 2110 2111 4500 4501 8600
791 2100 2101 4400 4401 8400
521 1280 1281 2660
721 1910 1911 4000 4001 7700
716 1900 1901 3900 3901 7300
654 1800 1801 3800 3801 7300
811 2200 2201 4700 4701 9500
707 1910 1911 4000 4001 7800
659 1740 1741 3700 3701 7000
641 1620 1621 3400 3401 6200
453 1160 1161 2410 2411 4330
571 1500 1501 3110 3111 6000
466 1200 1201 2500 2501 4700
466 1150 1151 2400 2401 4400
557 1460 1461 3040 3041 5620
712 1900 1901 4000 4001 7500
801 2020 2021 4300 4301 7800
4300 4301 8900 8901 16100
2800 2801 5900 5901 11000
573 1530 1531 3200
371 950 951 1930 1931 3500
921 2600 2601 5500 5501 11600 11601
407 1040 1041 2200 2201 3900
534 1400 1401 2900
501 1250 1251 2610 2611 4760
370 1000 1001 2040 2041 3900
610 1530 1531 3200 3201 5670
561 1400 1401 2900 2901 5300
581 1530 1531 3200 3201 6100
657 1720 1721 3600 3601 6700
6900 6900 6901 14200 14201 28100 6901 14200 14201 28100
7200 7201 15000 15001 30000
6500 6501 13300 13301 27000 27001
7100 7101 15000 15001 34000
7500 7501 16000 16001 37000
4600 4601 9600 9601 19000
7100 7101 14500 14501 29000
7200 7201 15000 15001 30000
8700 8701 18000 18001 40000
7400 7401 15200 15201 31000
7200 7201 15000 15001 30000
9700 9701 20000 20001 37000
9000 9001 18400 18401 35000
7400 7401 15100 15101 31000
8000 8001 16200 16201 39000
9700 9701 20000 20001 37000
7500 7501 15000 15001 30000
7900 7901 16000 16001 39000
7900 7901 16200 16201 39000
7300 7301 15000 15001 30000
7900 7901 16000 16001 38000
8800 8801 18000 18001 34000
4500 4501 9500 9501 18400
7100 7101 14500 14501 29000
7400 7401 15100 15101 31000
8100 8101 17000 17001 35000
7000 7001 14300 14301 29000
7400 7401 15100 15101 31000
8900 8901 18200
9500 9501 19300 19301 36000
4500 4501 9400 9401 18200 18201
8800 8801 18000 18001 33000
4800 4801 10000 10001 19100
4500 4501 9400 9401 18200
Doc# 990-100-0087 RevF • Ref. Temp. 0.0°C
SA50
Low High
7301 11200
7301 11700
9501 15600
7801 12300
20300
45000
30000