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Installation and Operation Manual
X-TMF-GF40-Series-MFC-eng
Part Number: 541B195AAG
October, 2017
4-4 Troubleshooting Checklist
Section 4 Maintenance & Troubleshooting
1. Check environmental factors that could affect changes to GF40 Series
performance. The most common environmental factors are listed in
Table 4-1.
2. Check supply voltage and check for a consistent ground.
3. Insure OEM tool setpoint matches the setpoint at the GF40 Series.
Observe for consistency.
4. Verify isolations valves are open and the gas supply is turned on. Then
verify operating pressures are within operating ranges.
5. Check GF40 Series voltage response by moving the setpoint back and forth.
Observe for voltage changes.
Table 4-1 Environmental Factors
GF40 Series
Performance
Inaccurate flow.
Control problems. Can
not reach setpoint.
Oscillation.
Zeroing problems, Indicated
zero is not stable.
®
Brooks
Possible Causes
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
Dirty gas chamber
Changes in gas.
Differential pressure not within operating range
Inlet pressure not stable
Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
GF40 Devices
4-3
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