Operating Procedure - Varian 919-0520 Manuel D'instructions

The pump operation is optimized using the special Varian Mi-
croVac controller only.
The safety specifications agreement using the pump is guaran-
teed using the Varian controller and cable only.
The High Voltage cable feedthrough is designed for use with
cable Varian (P/N 929-0706) in conjunction with Varian Mi-
croVac controller (P/N 929-0200 or 929-0201).
Only in this case the "H.V. Cable Safety Interlock" function is
available. This function switch off the high voltage when the
relevant cable is disconnected from the pump.
The pump can be installed in any position. For convenience, a
pump is usually mounted vertically with the inlet up, or placed
horizontally.
Pumps can be supported by the mounting flange in any posi-
tion.
For detailed information about the pump installation, see the
appendix "Technical Information".
USE
All the instructions for the correct use of the pump are con-
tained in the control unit manual.
Read the manual carefully before using the pump.
Rough pumping down to 1x10 mbar is recommended for the
most rapid starting. Roughing with an oil-sealed mechanical
pump is not desirable, but when used, a trap in the roughing
line is recommended to reduce pressure due to water vapor
and oils from the mechanical pump. Be careful to minimize the
time that this pump is open to the system and ion pump, since
mechanical pump vapors will start diffusing into the system at
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pressures below 1x10 mbar and cause contamination. In sys-
tems where oils must be completely eliminated, turbopump
roughing pumps should be used.
Hygroscopic deposits and hydrogen absorption into titanium
may cause starting times to increase with age. During exposure
to air, the deposits of titanium compound absorb water vapor. In
subsequent start ups, pump heating causes release of the wa-
ter vapor and some previously pumped hydrogen; thus, the
starting time may be lengthened.
CAUTION
CAUTION
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Operating procedure

Refer to the MicroVac control unit instruction manual and follow
the procedure below when operating the pump:
1. With a clean roughing pump, establish a roughing pressure
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of 1x10 mbar or lower in the vacuum system.
2. Plug the control unit into a suitable power source and
switch the power ON.
3. When the start-up is at a pressure higher than 1x10 mbar,
MicroVac controller will show an High Load condition.
4. Allow the roughing valve to remain open after turning on the
ion pump until an adequate starting pressure is reached. If
the ion pump voltage drops after closing the roughing
valves, reopen the valve for additional rough pumping. As
the pressure decreases, the voltage again will rise, and the
roughing valve should be closed.
5. When venting the pump, use dry nitrogen. This will avoid
water vapor absorption on the pump walls.
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
Do not put any electronic device near the pump otherwise the
magnetic field around it may cause a device malfunctioning.
MAINTENANCE
The 2 l/s series pumps do not require any maintenance. Any
work performed on the pump must be carried out by authorized
personnel.
Before carrying out any work on the pump, disconnect it from
the High Voltage supply.
If a pump is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Com-
munity) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste
but must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
8
INSTRUCTIONS FOR USE
WARNING!
CAUTION
WARNING!
DISPOSAL
87-900-091-01(B)
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