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Varian MidiVac 929-5000 Notice De Mode D'emploi

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MidiVac
Controller
Model 929-5000
Model 929-5001
Model 929-5002
Model 929-5003
Model 929-5004
Model 929-5005
Model 929-5006
Model 929-5007
87-900-080-01 (D)
APRIL 2006
All manuals and user guides at all-guides.com
vacuum technologies
(I)
MANUALE DI ISTRUZIONI
(D)
BEDIENUNGSHANDBUCH
(F)
NOTICE DE MODE D'EMPLOI
(GB) INSTRUCTION MANUAL

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Sommaire des Matières pour Varian MidiVac 929-5000

  • Page 1 All manuals and user guides at all-guides.com vacuum technologies MidiVac MANUALE DI ISTRUZIONI Controller BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 929-5000 (GB) INSTRUCTION MANUAL Model 929-5001 Model 929-5002 Model 929-5003 Model 929-5004 Model 929-5005 Model 929-5006 Model 929-5007 87-900-080-01 (D) APRIL 2006...
  • Page 2 All manuals and user guides at all-guides.com MidiVac Controller...
  • Page 3 All manuals and user guides at all-guides.com...
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  • Page 5: Table Des Matières

    All manuals and user guides at all-guides.com ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................7 MODE D’EMPLOI ......................13 INSTRUCTIONS FOR USE ....................19 TECHNICAL INFORMATION ....................25 MIDIVAC CONTROLLER DESCRIPTION .....................25 MIDIVAC CONTROLLER SPECIFICATION ..................27 MIDIVAC CONTROLLER OUTLINE ......................27 PUMP CONNECTION ..........................28 REMOTE I/O CONNECTOR ........................28 USE ................................30 Setting Mode .............................30 Operating Mode..........................30...

  • Page 6: Informazioni Generali

    Questa apparecchiatura è destinata Il controller MidiVac della Varian è un controller per le professionale. L'utilizzatore deve leggere attentamente pompe ioniche. L'unità può essere preconfigurata in il presente manuale di istruzioni ed ogni altra fabbrica a seconda delle necessità del cliente, o...

  • Page 7: Preparazione Per L'installazione

    All manuals and user guides at all-guides.com ISTRUZIONI PER L’USO PREPARAZIONE PER L'INSTALLAZIONE Il controller viene fornito in un imballo protettivo ATTENZIONE! speciale; se si presentano segni di danni, che Il controller può essere usato sia come unità da tavolo potrebbero essersi verificati durante il trasporto, sia come modulo a rack, in ogni caso deve essere contattare l'ufficio vendite locale.
  • Page 8 All manuals and user guides at all-guides.com ISTRUZIONI PER L’USO Controlli ed Indicatori del Pannello Frontale del MidiVac In questo paragrafo sono riportate le principali La figura e la tabella della pagina seguente illustrano il procedure operative. Per ulteriori dettagli e per pannello frontale del controller MidiVac con il significato procedure che coinvolgono collegamenti o particolari e la funzione dei relativi controlli e degli indicatori.
  • Page 9 All manuals and user guides at all-guides.com ISTRUZIONI PER L’USO RIF. DESCRIZIONE DESCRIZIONE con (12) su OFF con (12) su ON Freccia in giù Quando premuto consente di diminuire il valore Cambia il valore della tensione massima in uscita della funzione selezionata con il pulsante (16). dal controller da 7 kV a 5 kV e da 5 kV a 3 kV.

  • Page 10: Procedure Di Uso

    è di spegnimento, per cui per autorizzato. In caso di guasto è possibile usufruire del accendere l’alta tensione occorre passare in modo servizio di riparazione Varian o del "Varian advance “Local” premendo il tasto “Menu” del pannello frontale, exchange service", che permette di ottenere un oppure inviare il comando di accensione dell’alta...

  • Page 11: Messaggi Di Errore

    Guasto generico dei circuiti di controllo Spegnere e riaccendere il controller. Se l’errore dell’alta tensione. si ripresenta chiamare l’assistenza Varian. Err 5 L’interlock del cavo dell’alta tensione è aperto. Se si dispone di un cavo alta tensione con il filo di interlock, verificare che il connettore dal lato della pompa sia inserito correttamente.

  • Page 12: Beschreibung

    GEBRAUCHSANLEITUNG ALLGEMEINES BESCHREIBUNG DES CONTROLLERS Dieser Apparat ist für Fachbetriebe bestimmt. Vor Der MidiVac-Controller der Firma Varian ist ein Gerät Gebrauch sollte der Benutzer dieses Handbuch sowie zur Steuerung von Ionenpumpen. Das Gerät kann im alle weiteren mitgelieferten Zusatzdokumentationen Werk nach den Angaben des Kunden voreingestellt genau lesen.

  • Page 13: Vor Der Installation

    All manuals and user guides at all-guides.com GEBRAUCHSANLEITUNG VOR DER INSTALLATION Controller wird einer speziellen ACHTUNG! Schutzverpackung geliefert. Eventuelle Der Controller kann auf einen Tisch oder ein Gestell Transportschäden müssen der zuständigen örtlichen montiert werden. beiden Fällen muß eine Verkaufsstelle gemeldet werden. ungehinderte Zirkulation der Kühlluft durch die im Gehäuse vorne und unten eingelassen Luftöffnungen Beim Auspacken vorsichtig vorgehen, damit der...
  • Page 14 All manuals and user guides at all-guides.com GEBRAUCHSANLEITUNG Schalter und Anzeigen auf der vorderen GEBRAUCH Schalttafel des MidiVac-Controllers diesem Kapitel sind wichtigsten Seite abgebildeten Tabelle In der auf der nachfolgenden Betriebsvorgänge aufgeführt. Für weitere Hinweise wird die vordere Schalttafel des MidiVac-Controllers bezüglich Anschluß...
  • Page 15 All manuals and user guides at all-guides.com GEBRAUCHSANLEITUNG POS. BEZEICHNUNG BEZEICHNUNG Schalter (12) auf OFF Schalter (12) auf ON Pfeil nach oben Ermöglicht die Reduzierung des Wertes der über Reduzierung Wertes maximalen den Schalter (16) selektionierten Funktion Ausgangsspannung des Controllers von 7 kV auf 5 kV bzw. von 5 kV auf 3 kV.

  • Page 16: Bedienung

    Hochspannung die Umschaltung auf den Modus Fachpersonal ausgeführt werden. Bei Störungen kann "Local" mittels der Taste "Menü" am Frontpaneel der Varian-Reparaturdienst bzw. der "Varian advanced erforderlich ist oder der Steuerbefehl zur Zuschaltung exchange service" in Anspruch genommen werden, der der Hochspannung per Fernsteuerung über den für den Austausch defekter Controller sorgt.

  • Page 17: Fehlermeldungen

    Verbessern Sie den Grobbetriebsdruck (Roughing automatisch abgeschaltet, und auf der Anzeige Pressure) der Pumpe. erscheint die Fehlermeldung “Err 1”. Schalten Sie den Controller aus und anschließend wieder ein. Sollte die Störung weiterhin vorliegen, so wenden Sie sich an den Varian-Kundendienst. 87-900-080-01 (D)

  • Page 18: Indications Generales

    INDICATIONS GENERALES DESCRIPTION DU CONTROLEUR Cet appareillage a été conçu en vue d'une utilisation Le contrôleur MidiVac de la société Varian est un professionnelle. Il est conseillé à l'utilisateur de lire contrôleur pour les pompes ioniques. Cette unité peut attentivement cette notice d'instructions ainsi que toute être préconfigurée en usine selon les exigences du...

  • Page 19: Preparation Pour L'installation

    All manuals and user guides at all-guides.com MODE D'EMPLOI PREPARATION POUR L'INSTALLATION Le contrôleur est livré dans un emballage de protection ATTENTION! spécial; si l'on constate des marques de dommages Le contrôleur peut être utilisé aussi bien comme unité pouvant s'être produits pendant le transport, contacter de table que comme module à...

  • Page 20: Utilisation

    All manuals and user guides at all-guides.com MODE D'EMPLOI Commandes et Diodes du Panneau Frontal UTILISATION du MidiVac Ce paragraphe reporte les principales procédures présente le panneau frontal du La figure ci-après opérationnelles. Pour tout autre détail et pour les contrôleur MidiVac ainsi que la signification et la procédures concernant...
  • Page 21 All manuals and user guides at all-guides.com MODE D'EMPLOI DESCRIPTION REF. DESCRIPTION Avec (12) sur OFF Avec (12) sur ON Flèche en bas Permet de diminuer la valeur de la fonction Modifie la valeur de la tension maximum à la sortie sélectionnée à...

  • Page 22: Entretien

    En cas de panne, il est possible de s'adresser au de la dernière commande (allumage ou coupure) Service de réparation Varian ou au "Varian advance donnée à l’ordinateur à distance. La condition initiale exchange service" qui permet d'obtenir un contrôleur pré-configurée en usine est d’arrêt et pour allumer la...

  • Page 23: Messages D'erreur

    La pression dans la pompe est trop élevée. la pompe. Eteindre et rallumer la haute tension. Si l'erreur persiste, contacter service assistance Varian. Le contrôller a coupé la haute tension suite à Sélectionner mode fonctionnement Err 2 l'intervention du "Protect".

  • Page 24: General Information

    Varian before operating the equipment. option cards relevant to the serial communication and the Set Point function. Varian will not be responsible for an events caused by non-compliance operational procedures,...

  • Page 25: Preparation For Installation

    All manuals and user guides at all-guides.com INSTRUCTIONS FOR USE PREPARATION FOR INSTALLATION The controller is supplied in a special protective CAUTION! packing. If this shows signs of damage which may have The controller can be used as a bench unit or as a rack occurred during transport, contact your local sales module, but it must be positioned so that free air can office.
  • Page 26 All manuals and user guides at all-guides.com INSTRUCTIONS FOR USE MidiVac Front Panel Controls and Indicators The figure and the table of the following page illustrate This paragraph describes the fundamental operating the MidiVac front panel controls and indicators with procedures.
  • Page 27 All manuals and user guides at all-guides.com INSTRUCTIONS FOR USE DESCRIPTION REF. DESCRIPTION with (12) set to OFF with (12) set to ON Downwards arrow When pressed, it decreases the value of the When pressed it changes the maximum output function selected by means of the (16) pushbutton.

  • Page 28: Use Procedure

    When a on, the high voltage signal will depend on the last fault has occurred it is possible to use the Varian repair command (on or off) from the host computer. The initial service.

  • Page 29: Error Messages

    The pump pressure is too high. Improve the pump roughing pressure. Switch off and on again the high voltage. Should the error still be present, call the Varian offices. Err 2 The controller has switched off the High Select the “Start”...

  • Page 30: Technical Information

    All manuals and user guides at all-guides.com TECHNICAL INFORMATION MIDIVAC CONTROLLER DESCRIPTION The MidiVac Controller base is available in eight • Model 929-5003 set for 230 Vac positive polarity and versions which differ in the factory set input voltage, the single HV output connector polarity and the number of High Voltage output •...
  • Page 31 All manuals and user guides at all-guides.com TECHNICAL INFORMATION It consist of various boards. The following figure shows Microprocessor board (located on front panel: it is the minimum configuration. based on a single chip microprocessor with a large input/output capability. It manages commands coming from the front panel keyboard and drives the front panel display and the high voltage output.

  • Page 32: Midivac Controller Specification

    All manuals and user guides at all-guides.com TECHNICAL INFORMATION MIDIVAC CONTROLLER SPECIFICATION Operating: Input: − Temperature 0 to + 45 °C − Voltage 90 to 130 Vac - 1 phase 90% maximum non − Humidity 180 to 265 Vac - 1 phase (factory preset) condensing −...

  • Page 33: Pump Connection

    All manuals and user guides at all-guides.com TECHNICAL INFORMATION The signals available on the connector pins are PUMP CONNECTION detailed in the following table. The pump is connected to the controller rear panel via HV connector by a coaxial high voltage cable assembly DESCRIPTION (cable to be separately ordered).
  • Page 34 All manuals and user guides at all-guides.com TECHNICAL INFORMATION Recorder Output Diagram from 0 to 5 V Recorder Output Diagram from 0 to 0.1 V 87-900-080-01 (D)

  • Page 35: Use

    All manuals and user guides at all-guides.com TECHNICAL INFORMATION Operating Mode During the normal operating condition the only available The controller can be used in two different modes: operations are: • setting mode Switching on/off of the high voltage • operating mode Selection of the value (voltage or current) to be displayed The first mode enables the user to set some operating...
  • Page 36 All manuals and user guides at all-guides.com TECHNICAL INFORMATION VacIon Plus 500 Pressure Vs Current Diagram VacIon Plus 300 Pressure Vs Current Diagram 87-900-080-01 (D)
  • Page 37 All manuals and user guides at all-guides.com TECHNICAL INFORMATION VacIon Plus 150 Pressure vs Current Diagram VacIon Plus 75 Pressure vs Current Diagram 87-900-080-01 (D)
  • Page 38 All manuals and user guides at all-guides.com TECHNICAL INFORMATION VacIon Plus 55 Pressure Vs Current Diagram VacIon Plus 40 Pressure Vs Current Diagram 87-900-080-01 (D)
  • Page 39 All manuals and user guides at all-guides.com TECHNICAL INFORMATION VacIon Plus 25 Pressure Vs Current Diagram VacIon Plus 20 Pressure Vs Current Diagram 87-900-080-01 (D)

  • Page 40: Customer Information

    NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 41 All manuals and user guides at all-guides.com Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact...
  • Page 42 Toll Free # 1 (800) 882 7426 Tel: 00 800 234 234 00 vtt.technical.support@varianinc.com China Mexico Varian Technologies - Beijing Varian, S. de R.L. de C.V. Rm 1648 Central Tower South Wing Concepcion Beistegui No 109 China Beijing Junefield Plaza Col Del Valle No.

Ce manuel est également adapté pour:

Midivac 929-5001Midivac 929-5002Midivac 929-5003Midivac 929-5004Midivac 929-5005Midivac 929-5006 ... Afficher tout

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