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MicroVac
Controller
Model 929-0200
Model 929-0201
87-900-089-01 (E)
JULY 2003
vacuum technologies
MANUALE ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
INSTRUCTION MANUAL

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Sommaire des Matières pour Varian MicroVac 929-0200

  • Page 1 vacuum technologies MicroVac MANUALE ISTRUZIONI Controller BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI INSTRUCTION MANUAL Model 929-0200 Model 929-0201 87-900-089-01 (E) JULY 2003...
  • Page 2 MicroVac Controller...
  • Page 5: Table Des Matières

    ISTRUZIONI PER L’USO ....................GEBRAUCHSANLEITUNG ................... MODE D’EMPLOI ......................INSTRUCTIONS FOR USE ................... TECHNICAL INFORMATION ..................MICROVAC CONTROLLER DESCRIPTION .................. CONTROLLER SPECIFICATIONS ....................CONTROLLER OUTLINE ....................... INTERCONNECTIONS ........................FUSE HOLDER AND VOLTAGE CHANGER ASSEMBLY ............. Input/Output Interconnections ....................Input Signals ......................... Output Signals ........................
  • Page 6: Informazioni Generali

    Le note contengono informazioni importanti estrapolate dal testo. IMMAGAZZINAMENTO Imballo dei controller Durante trasporto l'immagazzinamento Ogni controller giunge dalla Varian predisposto per una MicroVac devono essere soddisfatte le seguenti certa tensione di alimentazione: condizioni ambientali: • temperatura: da -20 °C a +70 °C •...
  • Page 7: Comandi, Indicatori E Connettori Del Controller

    ISTRUZIONI PER L’USO INSTALLAZIONE Comandi, Indicatori e Connettori Del Controller Di seguito sono illustrati sia il pannello frontale che quello posteriore con le interconnessioni. PERICOLO! Per maggiori dettagli fare riferimento alla sezione "Technical Information". Il controller è fornito di un cavo di alimentazione a tre fili con una spina di tipo approvato a livello internazionale.
  • Page 8: Installazione Scala Graduata In Pascal O In Millibar Fornita Come Accessorio

    ISTRUZIONI PER L’USO 1. Modulo di ingresso dell’alimentazione per il Controller. Comprende il fusibile di protezione, il cambia-tensione, la presa di alimentazione di potenza ed il filtro EMC (non compreso nel blocco presa/cambia-tensione). 2. Connettore di uscita alta tensione per alimentazione pompa (tipo KINGS).
  • Page 9: Procedure Di Uso

    In caso di guasto è possibile usufruire del servizio di principale in posizione ON dopo aver inserito il cavo di alimentazione nella presa di rete. riparazione Varian o del "Varian advance exchange service", che permette di ottenere un controller rigenerato in sostituzione di quello guasto.
  • Page 10: Gebrauchsanleitung

    Geltung kommenden Bestimmungen übernimmt die werden. Es ist vollständig recyclebar und entspricht der Firma Varian keinerlei Haftung. Der MicroVac ist ein EG-Richtlinie 85/399 für Umweltschutz. Hochspannungsnetzgerät niedriger Leistung, das zur Versorgung von Ionenpumpen verwendet wird. Er ist einem...
  • Page 11: Steuerungen, Anzeigen Und Anschlüsse Des Controllers

    GEBRAUCHSANLEITUNG INSTALLATION Steuerungen, Anzeigen und Anschlüsse des Controllers Nachstehend werden dass Bedienfeld des Controllers sowie die Anschlußfelder beschrieben. Für weitere GEFAHR! Einzelheiten siehe "Technical Information". Der Controller wird mit einem 3-adrigen Netzkabel geliefert, das mit einem den internationalen Normen entsprechenden Stecker ausgerüstet ist. Es sollte immer dieses Netzkabel benutzt werden, das an eine korrekt geerdete Steckdose anzuschließen ist, um Stromentladungen zu vermeiden.
  • Page 12: Installation Der Als Zubehör Gelieferten Skala In Pascal Oder Millibar

    GEBRAUCHSANLEITUNG 1. Eingangsmodul Controller-Stromversorgung Sicherung, Spannungswahlschalter, Leistungsstecker und EMC-Filter (nicht Block Stecker/ Spannungswahlschalter eingeschlossen). 2. Hochspannungs-Ausgangsstecker Pumpen versorgung (Typ KINGS). 3. Stecker zur Aktivierung der Ausgangshochspannung (H.V. Cable Interlock). 4. Eingangs-/Ausgangsstecker für Signale für Zubehör. Rücktafel der Controller Installation der als Zubehör gelieferten Skala in Pascal oder Millibar Controller MicroVac...
  • Page 13: Bedienung

    Wartung. Alle Eingriffe dürfen nur von autorisiertem Zum Einschalten des Controllers genügt es, das Personal vorgenommen werden. Bei Defekten kann der Reparatur Service von Varian Netzkabel an die Steckdose anzuschließen. oder der "Varian Advance Exchange Service" in Anspruch genommen werden, der den defekten Pumpenstart Controller durch ein Austauschgerät ersetzt.
  • Page 14: Indications Generales

    Les notes contiennent des renseignements importants, isolés du texte. EMMAGASINAGE Emballage des Contrôleurs Pendant le transport et l'emmagasinage des Micro Chaque contrôleur est fourni par Varian prééquipé pour Vaccontrôleurs, il faudra veiller à respecter les une certaine tension d'alimentation: conditions environnementales suivantes: •...
  • Page 15: Commandes, Indicateurs Et Connecteurs Du Contrôleur

    MODE D'EMPLOI INSTALLATION Commandes, Indicateurs et Connecteurs du Contrôleur La figure ci-après représente le tableau de commande du Contrôleur et les tableaux d'interconnexion. Pour de DANGER! plus amples détails, se reporter à la section "Technical Information". Le contrôleur est doté d'un câble d'alimentation à trois fils avec une fiche du type approuvé...
  • Page 16: Installation Échelle Graduée En Pascal Ou En Millibar Livrée Comme Accessoire

    MODE D'EMPLOI 1. Module d’entrée de l’alimentation du Contrôleur. Il est doté du fusible de protection, du dispositif de changement de tension, de la prise d’alimentation en puissance et du filtre EMC (qui n’est pas compris dans le bloc prise/dispositif de changement de tension). 2.
  • Page 17: Procedures D'utilisation

    En cas de panne, il est possible de faire appel au mettre l’interrupteur principal sur ON après avoir branché le câble d'alimentation sur la prise du réseau. service de réparation Varian ou au "Varian advance exchange service", qui permet d’obtenir un contrôler régénéré à la place de celui en panne.
  • Page 18: General Information

    If this shows signs of damage which may have other additional information supplied by Varian before occurred during transport, contact your local sales operating the equipment. Varian will not be held office. When unpacking, ensure that the module is not responsible for any events occurring due to non- dropped or subjected to any form of impact.
  • Page 19: Controller Controls, Indicators And Connectors

    INSTRUCTIONS FOR USE INSTALLATION Controller Controls, Indicators and Connectors The following paragraph illustrates either the front and rear panel with its interconnections. More details are WARNING! contained in the appendix "Technical Information". The controller is equipped with a 3-wire power cord and plug (internationally approved) for user's safety.
  • Page 20: Pascal Or Millibar Graduated Scale Installation (Supplied As A Fitting)

    INSTRUCTIONS FOR USE 1. Input module for the controller power supply. It includes the protection fuse, the voltage changer, the power supply plug, and the EMC filter (not included into the plug/voltage switch assembly). 2. High voltage output connector for the pump (KINGS type) power supply.
  • Page 21: Use Procedure

    When a fault has occurred it is possible to use the after plugging the power cable into a suitable power source. Varian repair service or the “Varian advance exchange service”, that allows to obtain a regenerated controller replacing the faulty one.
  • Page 22: Technical Information

    TECHNICAL INFORMATION MICROVAC CONTROLLER DESCRIPTION Inspect the controller for any shipping damage. The MicroVac controller is a quarter rack solid state power supply with self protection features, which • Model 929-0200 is factory set for 120 Vac generates the high voltage for the pump. operation.
  • Page 23: Controller Specifications

    TECHNICAL INFORMATION CONTROLLER SPECIFICATIONS Operation Mini, 2 l/s pumps 0 °C to +45 °C Operating Input: temperature Voltage 100, 120, 220, 240 Storage temperature -20 °C to +70 °C Vac ±10%, 1-phase Fuse (mains) (slow blow) Frequency 47 to 63 Hz disregarding the mains Power 40 VA maximum...
  • Page 24 TECHNICAL INFORMATION 1x10 1x10 1x10 1x10 1x10 1x10 CURRENT (A) Voltage/current diagram on front connector 1x10 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE (TORR) Pressure/voltage diagram on front connector for 2 l/s pump and Minipump 87-900-089-01 (E)
  • Page 25: Controller Outline

    TECHNICAL INFORMATION CONTROLLER OUTLINE The outline dimensions for the MicroVac controllers are shown in the following figures. Controller outline INTERCONNECTIONS The following figure shows the Controller interconnections. Controller interconnections 87-900-089-01 (E)
  • Page 26: Fuse Holder And Voltage Changer Assembly

    TECHNICAL INFORMATION FUSE HOLDER AND VOLTAGE CHANGER Input/Output Interconnections ASSEMBLY All input/output signals are accessible at J001 accessory connector. If a change in line voltage operation is desired, proceed as follows: With the provided P001 mating connector make the connections with AWG 24 (0.24 mm 2 ) - or smaller wire •...
  • Page 27: Pump Connection

    • Plug the controller connector. Interlock Jack position Interlock The interlock is a safety device designed by Varian to prevent serious damages to the operator due to high voltage on the pump power connector. Therefore, two serial electrically connected interlocks are planned;...
  • Page 28: Use

    Make all vacuum manifold and electrical connections Replacement controllers are available on advance and refer to the ion pump instruction manual prior to exchange basis through Varian service/sales operating the MicroVac controller. organization. NOTE WARNING! The accessory P001 connector should be left in position •...
  • Page 29 TECHNICAL INFORMATION 87-900-089-01 (E)
  • Page 30 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 31 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 32 Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. vtk.technical.support@varianinc.com Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.

Ce manuel est également adapté pour:

Microvac 929-0201

Table des Matières