WSB ZPiezo CAN
1
1.1
General instructions ................................................................................................................... 4
1.2
1.3
1.4
Guarantee information .............................................................................................................. 7
2
DEVICE DESCRIPTION ......................................................................................................................... 8
2.1
General ....................................................................................................................................... 8
2.2
2.3
Technical Data ............................................................................................................................ 9
3
OPERATING CONCEPT ...................................................................................................................... 10
3.1
3.2
Start-up .................................................................................................................................... 11
3.3
4
CARE AND MAINTENANCE ............................................................................................................... 13
4.1
Care .......................................................................................................................................... 13
4.2
5
5.1
5.2
Fitting a stage insert ................................................................................................................. 16
6
APPENDIX ......................................................................................................................................... 17
6.1
Troubleshooting ....................................................................................................................... 17
6.2
07/2015
Contents
CONTENTS
432339-9010-000
Carl Zeiss
3