10.3.11 Contrôleur de gaz
N°
1
FILTER, 2300B-SS-1/8-2U
2
VALVE ASSY (NEB)
3
VALVE ASSY (DRY)
4
SUS316L 1.6X1.0X40
5
Valve, SI
6
VALVE, RELIEF RAB2V-150
7
REGULATOR, AR10-M5BG
8
VALVE ASSY SAGINOMIYA
9
FILTER,PTFE 20 MICRON
10
QUARTZ TUBE, TSP040375
11
VALVE, RELIEF
12
Y, UNION KQ2U06-00A-ROHS
13
FEP TUBE 6mm, GAS
14
FEP TUBE 1/16, NEB
15
FEP TUBE 4 mm, DRY
16
FEP TUBE 1/16, DRY
17
POLYURETHANE TUBE, U2-4-6X4BK
18
TEE, RUN KQ2Y04-M5A-ROHS
19
TEE, RUN KQ2Y06-M5A-ROHS
20
TUBE, M5-MF 80MM
21
3-WAY JOINT ASSY
22
TUBE, M5-MF 260MM
23
TUBE, M5-MF 200MM
24
FILTER ASSY
Nom de la pièce
Réf.
-
S040-51226-01
S225-14292-41
S228-49000-40
S225-15688-91
S040-27013-01
S040-72556-02
S221-48813-91
S221-18154
S016-70402-01
S225-15688-42
S035-65459-03
S225-15846-93
S225-14255-41
S225-14255-42
S225-14255-43
S016-46021
S035-65465-02
S035-65465-05
S221-41410-93
S221-25211-91
S221-41410-94
S221-41410-92
S225-14042-41
LCMS-8060
10.3 Configurations de l'unité
Remarques
297
LCMS-8060NX
CL
CL
10