Varian Turbo-V 6000 Notice De Mode D'emploi page 82

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FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
Does not start
Does not spin freely
Does not reach full speed
Mechanical Contact
Cooling defective
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS
Bad feedthrough
Vacuum leak
Error code on display
Customer application:
LEAK DETECTORS
Cannot calibrate
Vacuum system unstable
Failed to start
Customer application:
PRIMARY PUMPS
Pump doesn't start
Doesn't reach vacuum
Pump seized
Customer application:
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Request for Return
POSITION
Noise
Vibrations
Leak
Overtemperature
......................
Poor vacuum
High voltage problem
Other
No zero/high backround
Cannot reach test mode
Other
Noisy pump (describe)
Over temperature
Other
FAILURE DESCRIPTION
PARAMETERS
Power:
Vertical
Current:
Horizontal
Temp 1:
Upside-down
Other:
Temp 2:
OPERATION TIME:
VALVES/COMPONENTS
Main seal leak
Solenoid failure
Damaged sealing area
Customer application:
INSTRUMENTS
Gauge tube not working
Communication failure
Error code on display
Customer application:
DIFFUSION PUMPS
Heater failure
Doesn't reach vacuum
Vacuum leak
Customer application:
Rotational Speed:
Inlet Pressure:
Foreline Pressure:
Purge flow:
Bellows leak
Damaged flange
Other
Display problem
Degas not working
Other
Electrical problem
Cooling coil damage
Other

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Ce manuel est également adapté pour:

969-9491969-9591

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