Table des Matières
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6
3 Installation
3.1 Anschlüsse
3.1.1 Signaleingänge 4 - 20 mA
Grobvakuum VSC
1
SubD,
9pol, weibl.
6
2
Pin 4:
4-20 mA
7
3
Pin 7:
24 VDC, max. 5W
8
4
9
Pin 9:
AGND
5
Feinvakuum VSP
1
SubD,
9pol, weibl.
6
2
Pin 3:
4-20 mA
7
3
Pin 7:
15 VDC, max. 5W
8
4
9
Pin 9:
AGND
5
3.1.2 Signaleingang 0 - 10 V
Amphenol
C91E, 6pol, weibl.
Pin 1:
Identifikation
1
2
(Pin 2:)
(Analog Out,
3
6
0-10V,max.10kΩ
siehe Kap. 3.1.3 !)
5
4
Signaleingang,
Pin 3:
0-10V
GND
Pin 4:
24 VDC, max. 5W
Pin 5:
AGND
Pin 6:
3 Installation
3.1 Connectors
3.1.1 Signal Input 4 - 20 mA
Rough Vacuum VSC
1
SubD,
9pole, female
6
2
Pin 4:
4-20 mA
7
3
Pin 7:
24 VDC, max. 5W
8
4
9
Pin 9:
AGND
5
Fine Vacuum VSP
1
SubD,
9pole, female
6
2
Pin 3:
4-20 mA
7
3
Pin 7:
15 VDC, max. 5W
8
4
9
Pin 9:
AGND
5
3.1.2 Signal Input 0 - 10 V
Amphenol
C91E, 6pole, female
Pin 1:
identification
1
2
(Pin 2:)
(analog out,
3
6
0-10V, max. 10kΩ
see chap. 3.1.3 !)
5
4
signal input,
Pin 3:
0-10V
GND
Pin 4:
24 VDC, max. 5W
Pin 5:
AGND
Pin 6:
3
Installation
3.1 Connecteurs
3.1.1 Entrées de Signaux 4-20 mA
Vide grossier VSC
1
SubD,
9 pôles, femelle
6
2
Pin 4:
4-20 mA
7
3
8
Pin 7:
24 VDC, max. 5W
4
9
Pin 9:
AGND
5
Vide poussé VSP
1
SubD,
9 pôles, femelle
6
2
Pin 3:
4-20 mA
7
3
8
Pin 7:
15 VDC, max. 5W
4
9
Pin 9:
AGND
5
3.1.2 Entrée de Signaux 0-10 V
Amphenol
C91E,
Pin 1:
Identification
1
2
(Pin 2:)
(Sortie analog.
3
6
0-10V, max. 10kΩ
--> chap. 3.1.3 !)
5
4
Pin 3:
Entrée de si-
gnaux,
Pin 4:
Terre
Pin 5:
24 VDC, max. 5W
Pin 6:
AGND
6 pôles, femelle
0-10V
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