7. Starting, operation
Specifications
Pressure ranges
Overpressure safety
1)
Burst pressure
1)
Measuring principle
Materials
Wetted parts
Pressure connection
■
Pressure sensor
■
Case
Inboard helium leak test
Surface finish
Dead volume
Permissible Medium
Power supply U+
Signal output and maximum
ohmic load R
A
1) 1 psi = 0.069 bar
WIKA operating instructions, model WUC-1x
Models WUC-10, WUC-15 and WUC-16
WUC-16
psi
30
60
100
bar
2
4
7
psi
120
120
210
psi
1,800 1,800 2,200 2,600 4,800
Other pressure ranges and pressure units (e.g. MPa, kg/cm
Metal thin-film sensor
316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR)
2.4711 / UNS R30003
304 SS
< 1 x 10
mbar l/sec (atm STD cc/sec) according to Semi F1
-9
Electropolished, average Ra ≤ 0.13 µm (RA 5); max. Ra ≤ 0.18 µm (RA 7) per Semi F19
cm
WUC-10 < 1.5, WUC-15 < 1, WUC-16 < 1
3
Specialty gases, vapors, liquids
U+ in DC V
10 ... 30 with output signal 4 ... 20 mA / 0 ... 5 V
14 ... 30 with output signal 0 ... 10 V
R
in Ohm
4 ... 20 mA, 2-wire
A
0 ... 5 V, 3-wire
0 ... 10 V, 3-wire
WUC-10 / WUC-15
160
250
350
500
11
17
25
36
320
500
750
1,100 2,100 3,000
6,200 7,400 8,000 10,500 10,500 10,500 10,500
) on request
2
R
≤ (U+ – 10 V) / 0.02 A
A
R
> 5 k
A
R
> 10 k
A
1,000 1,500
2,000
3,000
70
100
145
225
4,200
6,600
EN
5,000
360
10,000
15