4�4 Signaux De Sortie - Honeywell SPM Manuel Technique

4.4 Signaux de sortie
Gas Calibration (Étalonnage de gaz)
Ammoniac (NH )
3
Ammoniac XP (NH )
3
Arsine (AsH )
3
Arsine XP (AsH )
3
Arsine XP (AsH ) Niveau bas
3
Trifluorure de bore (BF
Trifluorure de bore XP (BF
Trifluorure de bore XP (BF
Brome (Br )
2
CHDI
Chlore II (Cl )
2
Chlore III (Cl )
2
Chlore (Cl ) Niveau bas
2
Chlore XP (Cl )
2
Chlore XP (Cl ) Niveau bas
2
Dioxyde de chlore (ClO
Dioxyde de chlore (ClO
Diborane (B H )
2 6
Diborane XP (B H )
2 6
Diméthylamine (DMA)
Diméthylamine (DMA) Niveau bas
Diméthylamine XP (DMA)
Disilane (Si H )
2 6
Fluor (F )
2
Fluor (F ) Niveau bas
2
Germane (GeH )
4
Germane XP (GeH )
4
HDI
HMDI
Hydrazine (N H )
2 4
Hydrazine Niveau bas (N
Manuel technique du SPM
Détecteurs SPM (Single Point Monitor)
) Niveau bas
3
)
3
) Niveau bas
3
)
2
) [sur Chemcassette F /Oxydant]
2 2
H )
2 4
Étalonnage
LDL**
du zéro 9,33 mA
4,56 mA*
4,0 mA
0 ppm 2,6 ppm 25,0 ppm
0 ppm 1,5 ppm* 25,0 ppm
0 ppb 15 ppb* 50 ppb
0 ppb 10 ppb* 50 ppb
0 ppb 0,5 ppb 5,0 ppb
0 ppb 67 ppb* 333 ppb
0 ppm 0,1 ppm 1,0 ppm
0 ppb 50 ppb 333 ppb
0 ppb 11 ppb 100 ppb
0 ppb 2 ppb 20 ppb
0 ppm 0,05 ppm 0,5 ppm
0 ppm 0,05 ppm 0,5 ppm
0 ppb 1 ppb 10 ppb
0 ppm 0,05 ppm 050 ppm
0 ppb 4 ppb* 20 ppb
0 ppb 11 ppb 100 ppb
0 ppb 31 ppb* 100 ppb
0 ppb 31 ppb* 100 ppb
0 ppb 11 ppb 100 ppb
0 ppm 1,0 ppm* 5,0 ppm
0 ppm 0,1 ppm* 2,0 ppm
0 ppm 0,5 ppm 5,0 ppm
0 ppm 1,5 ppm* 5,0 ppm
0 ppm 0,11 ppm 1,00 ppm
0 ppm 0,06 ppm 0,33 ppm
0 ppb 141 ppb* 200 ppb
0 ppb 141 ppb* 200 ppb
0 ppb 1 ppb* 20 ppb
0 ppb 2 ppb 20 ppb
0 ppb 20 ppb* 100 ppb
0 ppb 1 ppb 10 ppb
4-3
Pleine échelle
14,67 mA
20,0 mA
50,0 ppm 75,0 ppm
50,0 ppm 75,0 ppm
100 ppb 150 ppb
100 ppb 150 ppb
10,0 ppb 15,0 ppb
667 ppb 1000 ppb
2,0 ppm 3,0 ppm
667 ppb 1000 ppb
200 ppb 300 ppb
40 ppb 60 ppb
1,00 ppm 1,50 ppm
1,00 ppm 1,50 ppm
20 ppb 30 ppb
1,00 ppm 1,50 ppm
40 ppb 60 ppb
200 ppb 300 ppb
200 ppb 300 ppb
200 ppb 300 ppb
200 ppb 300 ppb
10,0 ppm 15,0 ppm
4,0 ppm 6,0 ppm
10,0 ppm 50,0 ppm
10,0 ppm 15,0 ppm
2,00 ppm 3,00 ppm
0,67 ppm 1,00 ppm
400 ppb 600 ppb
400 ppb 600 ppb
40 ppb 60 ppb
40 ppb 60 ppb
200 ppb 300 ppb
20 ppb 30 ppb